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특허 상세정보

MyON담기
내보내기 페이스북 공유 카카오톡 공유

Exposure method and exposure apparatus

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) G03F-009/00   
미국특허분류(USC) 430/005
출원번호 US-0184655 (1998-11-03)
우선권정보 JP0355336 (1997-12-24)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Fitzpatrick, Cella, Harper & Scinto
인용정보 피인용 횟수 : 67  인용 특허 : 1
초록

An exposure apparatus and method for transferring a pattern to an object to be exposed by exposure to evanescent light using a mask having an aperture pattern having a width of 100 nm or less. The mask is arranged opposite to the object to be exposed, and pressure is applied to the mask arranged opposite to the object from the side of the mask opposite to the surface facing the object to generate evanescent light under the pressure applied, to transfer the pattern of the mask to the object to be exposed by exposure to the evanescent light.

대표
청구항

[ What is claimed is:] [1.] An exposure apparatus for transferring a pattern to an object to be exposed by exposure using a mask having a width of 100 nm or less, said apparatus comprising:contact means for bringing a first surface of the mask into substantially uniform contact with the object to be exposed by elastically deforming the mask; andirradiation means for irradiating a second surface of the mask, which is brought into substantially uniform contact with the object to be exposed, the second surface being opposite to the first surface.

이 특허에 인용된 특허 (1)

  1. Inoue Takashi,JPX ; Nagano Hiroyuki,JPX ; Ishii Yoshimichi,JPX. Exposure apparatus for transferring a mask pattern onto a substrate. USP1998045737064.

이 특허를 인용한 특허 피인용횟수: 67

  1. Weber,Jonathan L.. Active sensor receiver detector array for countermeasuring shoulder-fired missiles. USP2007037193691.
  2. Rogers, John A.; Ying, Ming; Bonifas, Andrew; Lu, Nanshu. Appendage mountable electronic devices conformable to surfaces. USP20180810052066.
  3. Rogers, John A; Ying, Ming; Bonifas, Andrew; Lu, Nanshu. Appendage mountable electronic devices conformable to surfaces. USP2017019554484.
  4. Ghaffari, Roozbeh; Callsen, Gilman; Arora, William J.; Schlatka, Benjamin. Catheter balloon having stretchable integrated circuitry and sensor array. USP2016039289132.
  5. Rogers, John; Kim, Dae-Hyeong; Litt, Brian; Viventi, Jonathan. Conformable actively multiplexed high-density surface electrode array for brain interfacing. USP2015018934965.
  6. Nakasato, Shinji; Inao, Yasuhisa. Device and method for controlling close contact of near-field exposure mask, and near-field exposure mask for the same. USP2010087777864.
  7. Rafferty, Conor; Dalal, Mitul. Embedding thin chips in polymer. USP2015109171794.
  8. Kiriya,Shinobu. Exposure apparatus and exposing method for elastically deforming a contact mask with control data. USP2007127312853.
  9. Yano,Koji; Kuroda,Ryo; Okamoto,Kohei. Exposure apparatus and method. USP2006067068353.
  10. Inao, Yasuhisa; Kuroda, Ryo; Mizutani, Natsuhiko. Exposure apparatus, exposure method, and exposure mask. USP2010067740992.
  11. Yamaguchi, Takako; Inao, Yasuhisa. Exposure mask, method of designing and manufacturing the same, exposure method and apparatus, pattern forming method, and device manufacturing method. USP2010047691540.
  12. Saito, Kenji; Kuroda, Ryo; Inao, Yasuhisa. Exposure method and apparatus using near field light. USP2004046721040.
  13. Inao, Yasuhisa; Kuroda, Ryo; Yamaguchi, Takako. Exposure method and exposure apparatus using near-field light and exposure mask. USP2004046720115.
  14. Arora, William J.; Ghaffari, Roozbeh. Extremely stretchable electronics. USP2016129516758.
  15. Arora, William J.; Ghaffari, Roozbeh. Extremely stretchable electronics. USP2013038389862.
  16. Arora, William J.; Ghaffari, Roozbeh. Extremely stretchable electronics. USP2015049012784.
  17. Elolampi, Brian; Ghaffari, Roozbeh; de Graff, Bassel; Arora, William; Hu, Xiaolong. Flexible electronic structure. USP2015109159635.
  18. Landschoot,Georges; Vackier,Rik. Handling the rotor of a rotary machine. USP2007027174616.
  19. Rogers, John A.; Kim, Dae-Hyeong; Omenetto, Fiorenzo; Kaplan, David L.; Litt, Brian; Viventi, Jonathan; Huang, Yonggang; Amsden, Jason. Implantable biomedical devices on bioresorbable substrates. USP2018069986924.
  20. Rogers, John A.; Kim, Dae-Hyeong; Omenetto, Fiorenzo; Kaplan, David L.; Litt, Brian; Viventi, Jonathan; Huang, Yonggang; Amsden, Jason. Implantable biomedical devices on bioresorbable substrates. USP2014038666471.
  21. Kobrin, Boris. Large area nanopatterning method and apparatus. USP2017059645504.
  22. Kuroda, Ryo; Shimada, Yasuhiro; Seki, Junichi; Yamaguchi, Takako; Inao, Yasuhisa. Light modulation apparatus and optical switch, movement detecting device and distance measuring device, alignment device and semiconductor aligner, and processes thereof. USP2003096628392.
  23. Kuroda,Ryo; Inao,Yasuhisa. Method and apparatus for detecting relative positional deviation between two objects. USP2007087262851.
  24. N철lscher,Christoph. Method for forming a structure element on a wafer by means of a mask and a trimming mask assigned hereto. USP2007117297468.
  25. Yamaguchi, Takako; Kuroda, Ryo. Method of detecting relative position of exposure mask and object to be exposed, alignment method, and exposure method using the same. USP2009097592108.
  26. Kuroda,Ryo; Mizutani,Natsuhiko. Method of manufacturing a device using a near-field photomask and near-field light. USP2009017473518.
  27. Dubin,Valery M.; Moon,Peter K.. Method of protecting a seed layer for electroplating. USP2006067060617.
  28. de Graff, Bassel; Arora, William J.; Callsen, Gilman; Ghaffari, Roozbeh. Methods and applications of non-planar imaging arrays. USP2013028372726.
  29. Nuzzo, Ralph G.; Rogers, John A.; Menard, Etienne; Lee, Keon Jae; Khang, Dahl-Young; Sun, Yugang; Meitl, Matthew; Zhu, Zhengtao. Methods and devices for fabricating and assembling printable semiconductor elements. USP2017099761444.
  30. Nuzzo, Ralph G.; Rogers, John A.; Menard, Etienne; Lee, Keon Jae; Khang, Dahl-Young; Sun, Yugang; Meitl, Matthew; Zhu, Zhengtao. Methods and devices for fabricating and assembling printable semiconductor elements. USP2017099768086.
  31. Nuzzo, Ralph G.; Rogers, John A.; Menard, Etienne; Lee, Keon Jae; Khang, Dahl-Young; Sun, Yugang; Meitl, Matthew; Zhu, Zhengtao. Methods and devices for fabricating and assembling printable semiconductor elements. USP2016099450043.
  32. Nuzzo, Ralph G.; Rogers, John A.; Menard, Etienne; Lee, Keon Jae; Khang, Dahl-Young; Sun, Yugang; Meitl, Matthew; Zhu, Zhengtao. Methods and devices for fabricating and assembling printable semiconductor elements. USP2013058440546.
  33. Nuzzo, Ralph G.; Rogers, John A.; Menard, Etienne; Lee, Keon Jae; Khang, Dahl-Young; Sun, Yugang; Meitl, Matthew; Zhu, Zhengtao. Methods and devices for fabricating and assembling printable semiconductor elements. USP2014038664699.
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  36. Ito, Toshiki; Mizutani, Natsuhiko; Terao, Akira. Near field exposure mask, method of forming resist pattern using the mask, and method of producing device. USP2011067968256.
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