초록 ▼

A pivotless compliant structure is disclosed that can be used to increase the geometric advantage or mechanical advantage of a microelectromechanical (MEM) actuator such as an electrostatic comb actuator, a capacitive-plate electrostatic actuator, or a thermal actuator. The compliant structure, base

A pivotless compliant structure is disclosed that can be used to increase the geometric advantage or mechanical advantage of a microelectromechanical (MEM) actuator such as an electrostatic comb actuator, a capacitive-plate electrostatic actuator, or a thermal actuator. The compliant structure, based on a combination of interconnected flexible beams and cross-beams formed of one or more layers of polysilicon or silicon nitride, can provide a geometric advantage of from about 5:1 to about 60:1 to multiply a 0.25-3 .mu.m displacement provided by a short-stroke actuator so that such an actuator can be used to generate a displacement stroke of about 10-34 .mu.m to operate a ratchet-driven MEM device or a microengine. The compliant structure has less play than conventional displacement-multiplying devices based on lever arms and pivoting joints, and is expected to be more reliable than such devices. The compliant structure and an associated electrostatic or thermal actuator can be formed on a common substrate (e.g. silicon) using surface micromachining.

대표청구항 ▼

[ What is claimed is:] [1.] A pivotless compliant structure formed on a substrate for receiving an input displacement at one end thereof from a motive source, and generating a multiplied displacement therefrom for provision to a load, the pilotless compliant structure comprising:(a) a plurality of f

[ What is claimed is:] [1.] A pivotless compliant structure formed on a substrate for receiving an input displacement at one end thereof from a motive source, and generating a multiplied displacement therefrom for provision to a load, the pilotless compliant structure comprising:(a) a plurality of flexible beams each attached at one end thereof to the substrate, with the other end of each of the flexible beams being moveable;(b) an input beam connected between the motive source and a first flexible beam;(c) an output beam connected between the load and a second flexible beam; and(d) a plurality of cross-beams interconnecting the first flexible beam to the second flexible beam, with each of the cross-beams further being connected between the moveable ends of an adjacent pair of the plurality of flexible beams, with each of the flexible beams, input beam, output beam, and cross-beams being formed, at least in part, of polycrystalline silicon or silicon nitride.