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Attachment of a micromechanical microphone 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H04R-025/00
출원번호 US-0335419 (1999-06-17)
우선권정보 FI0001413 (1998-06-18)
발명자 / 주소
  • Hietanen Jarmo,FIX
  • Rusanen Outi,FIX
출원인 / 주소
  • Nokia Mobile Phones Limited, FIX
대리인 / 주소
    Perrman & Green, LLP
인용정보 피인용 횟수 : 84  인용 특허 : 11

초록 ▼

The invention relates to a method for attaching a micromechanical microphone (1) to be used in connection with a mobile station to a substrate (2), in which a diaphragm (4) and back electrode (6) for the microphone (1) are placed within a distance of each other, wherein an air gap (7) is formed betw

대표청구항 ▼

[ What is claimed is:] [1.] A method for attaching a micromechanical microphone (1) used in connection with a mobile station to a substrate (2), in which a diaphragm (4) and a back electrode (6) for the microphone (1) are placed within a distance from each other, wherein an air gap (7) is formed bet

이 특허에 인용된 특허 (11)

  1. Bernstein Jonathan J. (Medfield MA), Acoustic transducer with improved low frequency response.
    상세보기
  2. Kuehnel Wolfgang (Darmstadt DEX), Capacitive sound transducer.
    상세보기
  3. Staat Raimund,DEX ; Hinke Claus-Peter,DEX, Capacitor microphone.
    상세보기
  4. Lewiner Jacques (5 ; rue Bory d\Arnex 92210 Saint-Cloud FRX) Hennion Claude (18 ; rue Flatters 75005 Paris FRX), Electroacoustic piezoelectric transducers.
    상세보기
  5. van Halteren Aart Z. (Hobrede NLX), Electroacoustic transducer of the electret type.
    상세보기
  6. Hill James A. (Moscow ID) Goodwin Anthony R. H. (Moscow ID), Electrostatic transducer and method for manufacturing same.
    상세보기
  7. Moret Jean-Marc (Cortaillod CHX) Bergqvist Johan Wilhelm (Bole CHX), Integrated capacitive transducer.
    상세보기
  8. Malmi Kalevi (Salo FIX) Lajunen Ari-Pekka (Salo FIX), Method and circuit arrangement for adjusting the volume in a mobile telephone.
    상세보기
  9. O'Boyle John, Micro-electronic assembly including a flip-chip mounted micro-device and method.
    상세보기
  10. Jarvinen Kari Juhani,FIX, Parametric speech coding.
    상세보기
  11. Barnett Ricky William,GB2, Radio telephone connector.
    상세보기

이 특허를 인용한 특허 (84)

  1. Minervini, Anthony D., Acoustic transducer module.
    상세보기
  2. Minervini,Anthony D., Acoustic transducer module.
    상세보기
  3. Collins, James Steven, Acoustical transducer with reduced parasitic capacitance.
    상세보기
  4. Rombach, Pirmin Herman Otto; Rehder, Jorg, Board mounting of microphone transducer.
    상세보기
  5. Minervini, Anthony D., Bottom port multi-part surface mount MEMS microphone.
    상세보기
  6. Minervini, Anthony D., Bottom port multi-part surface mount silicon condenser microphone package.
    상세보기
  7. Minervini, Anthony D., Bottom port surface mount MEMS microphone.
    상세보기
  8. Minervini, Anthony D., Bottom port surface mount MEMS microphone.
    상세보기
  9. Minervini, Anthony D., Bottom port surface mount silicon condenser microphone package.
    상세보기
  10. Minervini, Anthony D., Bottom port surface mount silicon condenser microphone package.
    상세보기
  11. Hsu, Wei-Chan; Wu, Li-Te, Chip-scaled MEMS microphone package.
    상세보기
  12. Krüger, Hans; Stelzl, Alois, Component arrangement provided with a carrier substrate.
    상세보기
  13. Collins,James Steven, Electret condenser microphone.
    상세보기
  14. Leidl, Anton; Pahl, Wolfgang; Wolff, Ulrich, Electrical module comprising a MEMS microphone.
    상세보기
  15. Yen, Kai-Hsiang; Chen, Jen-Yi; Sung, Po-Hsun, Electro-acoustic sensing device.
    상세보기
  16. Szczech, John B.; Van Kessel, Peter, Embedded dielectric as a barrier in an acoustic device and method of manufacture.
    상세보기
  17. Bauer, Christian; Krueger, Hans; Stelzl, Alois, Encapsulated electrical component and production method.
    상세보기
  18. Krueger,Hans; Portmann,J��rgen; Nicolaus,Karl; Feiertag,Gregor; Stelzl,Alois, Encapsulated electronic component and production method.
    상세보기
  19. Sjursen,Walter P.; Leedom,Marvin A.; Mahoney,Derek D.; Margicin,John M.; Fritz,Frederick J.; Aceti,John G.; Preves,David A.; Palanisamy,Ponnusamy, Hearing aid with large diaphragm microphone element including a printed circuit board.
    상세보기
  20. Pilgrim, Thomas; Puder, Henning, Hearing apparatus with a facility for reducing a microphone noise and method for reducing microphone noise.
    상세보기
  21. Niederdr채nk,Torsten; Weistenh철fer,Christian, Hearing device.
    상세보기
  22. Dehe, Alfons, Housed loudspeaker array.
    상세보기
  23. Watson, Joshua; Grosse, Daniel Todd; Jacobs, Michael Robert; Schimpf, William F.; Del Valle Figueroa, Ivelisse, Ingress protection for reducing particle infiltration into acoustic chamber of a MEMS microphone package.
    상세보기
  24. Yeh, Chien-Nan; Wang, Chin-Hung; Lee, Hsin-Li; Chen, Jien-Ming; Ho, Tzong-Che; Pan, Li-Chi, MEMS acoustic transducer and method for fabricating the same.
    상세보기
  25. Leidl, Anton; Pahl, Wolfgang; Wolff, Ulrich, MEMS microphone.
    상세보기
  26. Hsiao, Wei-Min, MEMS microphone module and method thereof.
    상세보기
  27. Pahl, Wolfgang, MEMS microphone, production method and method for installing.
    상세보기
  28. Leidl, Anton; Krueger, Hans; Stelzl, Alois; Pahl, Wolfgang; Seitz, Stefan, MEMS package and method for the production thereof.
    상세보기
  29. Pahl, Wolfgang; Leidl, Anton; Seitz, Stefan; Krueger, Hans; Stelzl, Alois, MEMS package and method for the production thereof.
    상세보기
  30. Pahl, Wolfgang, Method for applying a structured coating to a component.
    상세보기
  31. Collins, James Steven, Method for manufacturing acoustical transducer with reduced parasitic capacitance.
    상세보기
  32. Minervini, Anthony D., Methods of manufacture of bottom port multi-part surface mount MEMS microphones.
    상세보기
  33. Minervini, Anthony D., Methods of manufacture of bottom port multi-part surface mount silicon condenser microphone packages.
    상세보기
  34. Minervini, Anthony D., Methods of manufacture of bottom port surface mount MEMS microphones.
    상세보기
  35. Minervini, Anthony D., Methods of manufacture of bottom port surface mount MEMS microphones.
    상세보기
  36. Minervini, Anthony D., Methods of manufacture of bottom port surface mount silicon condenser microphone packages.
    상세보기
  37. Minervini, Anthony D., Methods of manufacture of bottom port surface mount silicon condenser microphone packages.
    상세보기
  38. Minervini, Anthony D., Methods of manufacture of top port multi-part surface mount MEMS microphones.
    상세보기
  39. Minervini, Anthony D., Methods of manufacture of top port multi-part surface mount silicon condenser microphone packages.
    상세보기
  40. Minervini, Anthony D., Methods of manufacture of top port multi-part surface mount silicon condenser microphones.
    상세보기
  41. Minervini, Anthony D., Methods of manufacture of top port multipart surface mount silicon condenser microphone package.
    상세보기
  42. Minervini, Anthony D., Methods of manufacture of top port surface mount MEMS microphones.
    상세보기
  43. Minervini, Anthony D., Methods of manufacture of top port surface mount MEMS microphones.
    상세보기
  44. Minervini, Anthony D., Methods of manufacture of top port surface mount silicon condenser microphone packages.
    상세보기
  45. Minervini, Anthony D., Methods of manufacture of top port surface mount silicon condenser microphone packages.
    상세보기
  46. Schrank, Franz; Schrems, Martin, Micro electro mechanical system (MEMS) microphone having a thin-film construction.
    상세보기
  47. Scheeper, Patrick Richard; Storgaard-Larsen, Torben, Micromachined capacitive component with high stability.
    상세보기
  48. Scheeper, Patrick Richard; Storgaard-Larsen, Torben, Micromachined capacitive electrical component.
    상세보기
  49. Kasai, Masaaki, Microphone.
    상세보기
  50. Peter Madaffari ; Walter P. Sjursen ; Christopher Poux ; Richard Moroney ; Ponnusamy Palanisamy, Microphone assembly for hearing aid with JFET flip-chip buffer.
    상세보기
  51. Loeppert, Peter V.; McCall, Ryan M.; Giesecke, Daniel; Vos, Sandra F.; Szczech, John B.; Lee, Sung Bok; Van Kessel, Peter, Microphone assembly with barrier to prevent contaminant infiltration.
    상세보기
  52. Takeuchi, Takanobu; Araki, Toru, Microphone filter and microphone unit.
    상세보기
  53. Cornelius,Elrick Lennaert; Clemens,Paul Leonardus; van Hal,Paul C.; Geskus,Mike, Microphone for a hearing aid or listening device with improved internal damping and foreign material protection.
    상세보기
  54. Harney, Kieran P.; Sengupta, Dipak; Moss, Brian; Guery, Alain V., Microphone module with sound pipe.
    상세보기
  55. Gong, Shih-Chin; Hsu, Wei-Chan, Microphone package with minimum footprint size and thickness.
    상세보기
  56. M��gelin,Raymond; Dubbeldeman,Eddy; Appel,Ronald, Microphone with internal damping.
    상세보기
  57. Wang, Christian; Rehder, Jörg; Johansen, Leif Steen; Scheel, Peter Ulrik, Miniature microphone assembly with hydrophobic surface coating.
    상세보기
  58. Huang, Chao-Ta; Chien, Hsin-Tang, Package and packaging assembly of microelectromechanical system microphone.
    상세보기
  59. Nakabayashi, Masakazu, Pressure responsive device and method of manufacturing semiconductor substrate for use in pressure responsive device.
    상세보기
  60. Mullenborn, Matthias; Scheel, Peter; Rombach, Pirmin, Pressure transducer.
    상세보기
  61. Tucker, Timothy J.; Mann, David A.; Wilson, Willard W., Process of manufacturing of electrostatic speakers.
    상세보기
  62. Pakhomov,Alexander; Goldburt,Tim, Seismic sensor.
    상세보기
  63. Pakhomov,Alexander; Goldburt,Tim, Seismic sensor.
    상세보기
  64. Feiertag, Gregor; Krueger, Hans; Leidl, Anton; Stelzl, Alois, Semiconductor chip arrangement with sensor chip and manufacturing method.
    상세보기
  65. Minervini, Anthony D., Silicon condenser microphone and manufacturing method.
    상세보기
  66. Mullenborn, Matthias; Kuhmann, Jochen F.; Scheel, Peter, Silicon-based sensor system.
    상세보기
  67. Rombach, Pirmin; Arnoldus, Morten Berg; Ginnerup, Morten, Single die MEMS acoustic transducer and manufacturing method.
    상세보기
  68. Chien, Hsin-Tang; Hsiao, Chieh-Ling; Wang, Chin-Hung, Stacked package structure for reducing package volume of an acoustic micro-sensor.
    상세보기
  69. Patten, David Talmage; Hoekstra, Tsjerk Hans, Stress decoupling in MEMS transducers.
    상세보기
  70. Mullenborn, Matthias; Kuhmann, Jochen F.; Scheel, Peter, Surface mountable transducer system.
    상세보기
  71. Mullenborn,Matthias; Kuhmann,Jochen F.; Scheel,Peter, Surface mountable transducer system.
    상세보기
  72. Hung, Li-Wen; Knickerbocker, John U., System for continuous monitoring of body sounds.
    상세보기
  73. Hung, Li-Wen; Knickerbocker, John U., System for continuous monitoring of body sounds.
    상세보기
  74. Minervini, Anthony D., Top port multi-part surface mount MEMS microphone.
    상세보기
  75. Minervini, Anthony D., Top port multi-part surface mount silicon condenser microphone.
    상세보기
  76. Minervini, Anthony D., Top port multi-part surface mount silicon condenser microphone.
    상세보기
  77. Minervini, Anthony D., Top port multi-part surface mount silicon condenser microphone.
    상세보기
  78. Minervini, Anthony D., Top port multi-part surface mount silicon condenser microphone package.
    상세보기
  79. Minervini, Anthony D., Top port multi-part surface mount silicon condenser microphone package.
    상세보기
  80. Minervini, Anthony D., Top port surface mount MEMS microphone.
    상세보기
  81. Minervini, Anthony D., Top port surface mount MEMS microphone.
    상세보기
  82. Minervini, Anthony D., Top port surface mount silicon condenser microphone package.
    상세보기
  83. Minervini, Anthony D., Top port surface mount silicon condenser microphone package.
    상세보기
  84. Bolognia, David; Harney, Kieran P., Transducer with enlarged back volume.
    상세보기

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