초록 ▼

The object of the invention is to provide an automatic module and cassette station detecting and aligning semiconductor wafer/substrate material handling unit with a thermal processing chamber module having an integrated, sturdy, chemical and temperature resistant wafer lift pins and door actuation

The object of the invention is to provide an automatic module and cassette station detecting and aligning semiconductor wafer/substrate material handling unit with a thermal processing chamber module having an integrated, sturdy, chemical and temperature resistant wafer lift pins and door actuation apparatus. One of the benefits that is derived from this apparatus is the ability to quickly and easily attach various processing modules at any docking position of the semiconductor wafer/substrate material handling unit (hereinafter MHU). The MHU of this apparatus has the additional benefit of a cassette station that automatically aligns and detects a plurality of different size and shape semiconductor wafer/substrate cassettes. The semiconductor wafer/substrate cassettes may also be functionally attached to a module that is docked to the MHU for use. A further benefit of this apparatus is the ability to cluster MHUs providing for the use of additional modules, all of which may be controlled by one central processing unit. Additionally the modules and MHU are specifically designed to dock and lock utilizing a locating mechanism which places the module in the precise location with respect to the MHU for use. Once the module is docked and then locked the exhaust interface between the module and the MHU self-aligns and self-seals. In a Thermal Processing Chamber module utilizing the benefits of the aforementioned modularity, docking and locking, clustering, and exhaust interfacing, this invention further enure the benefit of an integrated compact wafer lift pin and door actuation mechanism which provides for a low-profile lift pin mechanism that maintains the lift pins at a level position during operation and an integrated chamber door utilizing one prime mover and one control path which simplifies operation and reduces parts count and improves the reliability of the module's precise acceptance and delivery of a wafer from the MHU. In yet another benefit of this disclosure in the Thermal Processing Chamber module this invention utilizes thermal processing chamber lift pins comprised of materials of very low thermal conductivity which are sturdy, chemical and temperature resistant and hence minimize the pins thermal effect on the resist coating thickness applied to a wafer.

대표청구항 ▼

[ Having described the invention, we claim:] [1.] A new and improved Automatic Modular Wafer Substrate Handling Device comprising:a central processing unit;one or more material handling unit in electronic communication with said central processing unit;one or more process module removably attached b

[ Having described the invention, we claim:] [1.] A new and improved Automatic Modular Wafer Substrate Handling Device comprising:a central processing unit;one or more material handling unit in electronic communication with said central processing unit;one or more process module removably attached by a self sealing, self-aligning and self-leveling docking means to said material handling unit wherein said process module is in electronic communication with said central processing unit utilizing a removably attached electronic self recognition means which causes said central processing unit to automatically recognize said process module and said process module's function;one or more auto-sizing cassette station removably attached to said material handling unit and/or said process module wherein said auto-sizing cassette station is in electronic communication with said central processing unit utilizing a removably attached electronic wafer size detection means which causes said central processing unit to automatically spatially align and recognize the size of said wafer stored in said auto-sizing cassette station;one or more wafer handling robot means removably and rotatably attached one each to said material handling unit wherein said wafer handling robot means is in electronic communication with said central processing unit such that said central processing unit may electronically direct said wafer handling robot means to retreive and deliver said wafer to and from said auto-sizing cassette station to and from said process module in any combination thereof according to user defined parameters;one or more thermal processing chamber removably attached one each to one or more of said process module wherein said thermal processing chamber is in electronic communication with said central processing unit;a plurality of chemical and temperature resistant lift pins removably and movably attached to said thermal processing chamber wherein said chemical and temperature resistant lift pins are further comprised of an actuation contact end and a substrate contact end wherein said substrate contact end is split into a plurality of wafer contact area surfaces low in thermal impact;a thermal processing chamber door means removably and pivotally attached to said thermal processing chamber wherein said thermal processing chamber door means is in electronic communication with said central processing unit such that said central processing unit may control said thermal processing door means to obtain an open or a closed position according to user defined parameters; anda lift pin actuation means removably attached to said thermal processing door means wherein said chemical and temperature resistant lift pins are contacted by said lift pin actuation means upon said actuation contact end of said chemical and temperature resistant lift pins causing said chemical and temperature resistant lift pins to move to a user defined position when said thermal processing chamber door means is in said open position and when said thermal processing chamber door means is in said closed position said lift pin actuation means causes said chemical and temperature resistant lift pins to move to an alternative user defined position which may include said user defined position.