초록 ▼

A structure and method are present where a sidewall of a load lock chamber is formed by extrusion, to produce a reproducible tubular structure to form the walls of a vacuum chamber with greatly improved vacuum performance. The use of an extruded structure reduces the dimensional variability, increas

A structure and method are present where a sidewall of a load lock chamber is formed by extrusion, to produce a reproducible tubular structure to form the walls of a vacuum chamber with greatly improved vacuum performance. The use of an extruded structure reduces the dimensional variability, increases the uniformity of a surface finish, and provides uniform top and bottom sealing arrangements, which allow full and easy access to the inside of the sidewalls for cleaning. In another arrangement heat transfer fluid passages can be formed in the wall of the chamber simultaneously as the wall of the chamber is extruded. Heating of cooling liquid can then be circulated through the passages in the wall of the chamber to heat the walls of the chamber as sometimes required to prevent condensation on the inside of the chamber walls, or provide cooling as is required for cool down of a wafer, after processing at an elevated temperature.

대표청구항 ▼

[ What is claimed is:] [1.] A vacuum containment chamber comprising:an extruded tubular wall section surrounding a central space, said tubular wall having a uniform cross sectional shape and a first end and a second end;a first end cover attachable and sealable to said first end of said tubular wall

[ What is claimed is:] [1.] A vacuum containment chamber comprising:an extruded tubular wall section surrounding a central space, said tubular wall having a uniform cross sectional shape and a first end and a second end;a first end cover attachable and sealable to said first end of said tubular wall section and a second end cover attachable and sealable to said second end of said tubular wall section;wherein said tubular wall section includes a series of peripheral tubular passages integral with the wall of the chamber and separated from said central space by a portion of said tubular wall section, said series of peripheral tubular passages not being connected to said central space.