초록 ▼

A micromechanical micromotion amplifier has an integrated structure formed primarily of silicon and comprises a plurality of long slender flexible beams which are connected in a predetermined manner. The beams are released from a silicon substrate for movement with respect to fixed points of referen

A micromechanical micromotion amplifier has an integrated structure formed primarily of silicon and comprises a plurality of long slender flexible beams which are connected in a predetermined manner. The beams are released from a silicon substrate for movement with respect to fixed points of reference upon the substrate. Each beam thereby has a fixed end and a relatively moveable free end. Compressive axial force induced by axial movement, applied to the moveable end of a beam, will cause that beam to deform or buckle. Buckling occurs transversely in-plane due to a high aspect ratio profile of each beam. The amount of lateral or transverse movement of a beam due to buckling is relatively large in relation to the applied axial force or axial movement which causes it. By arranging these beams in cooperating perpendicular pairs as micromotion amplifier stages, an input axial force/movement applied to the moveable free end of a first beam generates a transverse motion or buckling movement of that beam.

대표청구항 ▼

[ What is claimed is:] [1.] A micromotion amplifier comprising:a first micromechanical beam having a moveable first end, a middle region, a second end connected to a fixed reference and a longitudinal axis;an actuator operative upon the first end of said first beam in a direction coincident with the

[ What is claimed is:] [1.] A micromotion amplifier comprising:a first micromechanical beam having a moveable first end, a middle region, a second end connected to a fixed reference and a longitudinal axis;an actuator operative upon the first end of said first beam in a direction coincident with the longitudinal axis of said first beam and energizeable for motion with respect to the fixed reference of said first beam; anda second micromechanical beam having a moveable first end connected to the middle region of said first beam, a middle region, a second end connected to a fixed reference and a longitudinal axis substantially perpendicular to the longitudinal axis of said first beam,wherein energization of said actuator induces a first axial force upon the longitudinal axis of said first beam buckling the middle region of said first beam to a first magnitude and in a direction transverse to the longitudinal axis of said first beam, said buckling of the middle region of said first beam inducing a second axial force upon the longitudinal axis of said second beam buckling the middle region of said second beam to a second magnitude which is greater than said first magnitude and in a direction transverse to the longitudinal axis of said second beam, thereby generating amplified micromotion.