초록 ▼

An apparatus for converting PFC gases exhausted from semiconductor processing equipment to less harmful, non-PFC gases. One embodiment of the apparatus includes a silicon filter and a plasma generation system. The plasma generation system forms a plasma from the effluent PFC gases. Constituents from

An apparatus for converting PFC gases exhausted from semiconductor processing equipment to less harmful, non-PFC gases. One embodiment of the apparatus includes a silicon filter and a plasma generation system. The plasma generation system forms a plasma from the effluent PFC gases. Constituents from the plasma react with silicon and/or oxygen in the filter and convert the effluent PFC gases to less harmful, non-PFC gaseous products and byproducts. Another embodiment includes a plasma generation system and a particle trapping and collection system. The particle trapping and collection system traps silicon containing residue from deposition processes that produces such residue, and the plasma generation system forms a plasma from the effluent PFC gases. Constituents from the plasma react with the collected residue to convert the effluent PFC gases to less harmful, non-PFC gaseous products and byproducts.

대표청구항 ▼

[ What is claimed is:] [1.] An apparatus for reducing perfluorocompound (PFC emissions from a processing chamber, said apparatus comprising:a vessel chamber, defining a fluid conduit having an inlet port and an outlet port;a PFC oxidizing agent in said fluid conduit; anda plasma generation system ca

[ What is claimed is:] [1.] An apparatus for reducing perfluorocompound (PFC emissions from a processing chamber, said apparatus comprising:a vessel chamber, defining a fluid conduit having an inlet port and an outlet port;a PFC oxidizing agent in said fluid conduit; anda plasma generation system capable of exciting PFC gases present in said fluid conduit into a plasma state wherein said plasma generation system comprises a hollow cathode reactor having a cathode and an anode; and wherein said hollow cathode reactor comprises a plurality of cathodes and a plurality of anodes alternatively arranged to define at least a portion of said vessel chamber.