초록 ▼

A method and apparatus are provided for making high purity and preferably oxygen free substantially void free and inclusion free copper castings such as billets from high purity copper. The castings are particularly useful to make sputtering targets used in sputtering deposition processes in the fab

A method and apparatus are provided for making high purity and preferably oxygen free substantially void free and inclusion free copper castings such as billets from high purity copper. The castings are particularly useful to make sputtering targets used in sputtering deposition processes in the fabrication of electronic components. The method comprises melting high purity copper in a covered crucible using a non-contaminating heating source such as a coil induction furnace. The melted copper in the crucible is solidified using a specially controlled cooling procedure wherein the bottom of the crucible is cooled so that molten copper is maintained on top of solidified and solidifying copper until the copper is solidified. In a preferred apparatus and method, the furnace and crucible, which is disposed between the coil of the furnace and contains molten copper, are positioned above a cooling jacket and the crucible passed continuously downwardly through the opening in the cooling jacket cooling the lower portion of the crucible. A reduced heat is maintained in the furnace to heat the upper portion of the crucible within the coil and maintain a layer of molten copper over the copper solidifying in the lower portion of the crucible passing through the water jacket. A reducing gas is supplied to the covered crucible and the crucible is insulated during the method.

대표청구항 ▼

[Thus, having described the invention, what is claimed is:] [1.]providing an open top container having a closed bottom and sidewalls for melting and holding copper therein;supplying high purity copper to the container;melting the copper in the container using a coil induction furnace wherein the coi

[Thus, having described the invention, what is claimed is:] [1.]providing an open top container having a closed bottom and sidewalls for melting and holding copper therein;supplying high purity copper to the container;melting the copper in the container using a coil induction furnace wherein the coil forms a vertical opening therebetween in which the container is positioned and forming an annular space between the container sidewalls and the coil and wherein the copper in the container is melted by energizing the furnace with an electric current;providing insulation in the annular space;providing a cooler having cooled sidewalls and a vertical opening therebetween, the cooler being configured to accommodate and receive the container in the vertical opening in a heat transfer relationship so that heat is transferred from the container to the cooler;positioning the bottom of the container at the top of the cooler opening and passing the container downwardly through the cooler opening at a controlled downward rate and/or a controlled cooler sidewall cooling rate wherein both solidified copper and molten copper are present in the container at the same time with the copper solidifying from the bottom of the container upwards toward the top of the container and continuing to solidify on top of the solidified copper so that a layer of molten copper is maintained on top of the solidified and solidifying copper until the copper is solidified and a casting is formed. [7.]an open top container having a closed bottom and sidewalls for melting and holding molten copper therein;means for supplying high purity copper to the container;a coil induction furnace wherein the coil forms a vertical opening therebetween in which the container is positioned and forming an annular space between the container sidewalls and the coil and the copper is melted by energizing the furnace with an electric current;insulation means positioned in the annular space; andmeans for cooling the container under cooling conditions wherein the container is cooled from the bottom upwards toward the top of the container so that both solidified copper and molten copper are present in the container at the same time with the copper solidifying from the bottom of the container upwards and continuing to solidify on top of the solidified copper so that a layer of molten copper is maintained on top of the solidified and solidifying copper until the copper is solidified and a casting is formed.