초록 ▼

A TEOS trap for controlling TEOS polymerization from reaction furnace effluent in a vacuum pump line a SiO.sub.2 CVD process includes a molecular species-selective flow impeding medium that adsorbs and retains TEOS and water molecules from the effluent long enough to consume substantially all the wa

A TEOS trap for controlling TEOS polymerization from reaction furnace effluent in a vacuum pump line a SiO.sub.2 CVD process includes a molecular species-selective flow impeding medium that adsorbs and retains TEOS and water molecules from the effluent long enough to consume substantially all the water molecules in TEOS hydrolysis reactions while allowing non-hydrolyzed TEOS, ethylene, and other gaseous byproducts to pass through the trap and retaining solid and liquid phase SiO.sub.2 -rich TEOS polymers formed by the hydrolysis reactions in the trap for subsequent removal and disposal. The molecular species-selective flow impeding medium has a plurality of adsorption surfaces to make a surface density that performs the TEOS and water flow impeding fuction and solid and liquid phase TEOS polymer trapping function.

대표청구항 ▼

[The embodiments of the invention in which an exclusive property or privilege is claimed which follow:] [1.]adsorbing and retaining TEOS and water molecules from the effluent on adsorption surfaces in a trap for long enough dwell time to consume substantially all of the water molecules in TEOS hydro

[The embodiments of the invention in which an exclusive property or privilege is claimed which follow:] [1.]adsorbing and retaining TEOS and water molecules from the effluent on adsorption surfaces in a trap for long enough dwell time to consume substantially all of the water molecules in TEOS hydrolysis reactions while allowing non-hydrolyzed TEOS molecules and ethylene molecules to continue flowing in the effluent and retaining solid and/or liquid phase TEOS polymers formed by the hydrolysis reactions on the absorption surfaces in the trap.