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Electro-optical device having silicon nitride interlayer insulating film 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-027/01
  • H01L-027/12
  • H01L-031/039
출원번호 US-0250399 (1999-02-16)
우선권정보 JP0339588 (1993-12-03)
발명자 / 주소
  • Yamazaki Shunpei,JPX
  • Takemura Yasuhiko,JPX
출원인 / 주소
  • Semiconductor Energy Laboratory Company, Ltd., JPX
대리인 / 주소
    Nixon Peabody LLPCostellia
인용정보 피인용 횟수 : 294  인용 특허 : 133

초록

Using thin film transistors (TFTs), an active matrix circuit, a driver circuit for driving the active matrix circuit or the like are formed on one substrate. Circuits such as a central processing unit (CPU) and a memory, necessary to drive an electric device, are formed using single crystalline semi

대표청구항

[What is claimed is:] [1.]a first gate electrode;a first gate insulating film formed on said first gate electrode;a semiconductor layer formed over said first gate electrode with said first gate insulating film interposed therebetween, said semiconductor layer including at least a pair of impurity d

이 특허에 인용된 특허 (133)

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    22. Yamazaki,Shunpei; Murakami,Satoshi; Koyama,Jun; Tanaka,Yukio; Kitakado,Hidehito; Ohnumo,Hideto, Display including casing and display unit.
    23. Yamazaki,Shunpei; Koyama,Jun, Display system.
    24. Hayakawa, Masahiko, Driver circuit, display device including the driver circuit, and electronic device including the display device.
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    26. Shunpei Yamazaki JP; Hidehito Kitakado JP; Takeshi Fukunaga JP, Electro-optical device and electronic equipment.
    27. Yamazaki, Shunpei; Kitakado, Hidehito; Fukunaga, Takeshi, Electro-optical device and electronic equipment.
    28. Yamazaki, Shunpei; Takemura, Yasuhiko, Electro-optical device and method for manufacturing the same.
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    31. Yamazaki, Shunpei; Takemura, Yasuhiko, Electro-optical device and method for manufacturing the same.
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    34. Ono, Koji; Suzawa, Hideomi; Arao, Tatsuya, Electroluminescence display device.
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    53. Yamazaki,Shunpei; Koyama,Jun; Fukunaga,Takeshi, Electrooptical device and method of fabricating the same.
    54. Yamazaki,Shunpei; Adachi,Hiroki, Ferroelectric liquid crystal and goggle type display devices.
    55. Yamazaki, Shunpei; Adachi, Hiroki, Ferroelectric liquid crystal display device comprising gate-overlapped lightly doped drain structure.
    56. Kimura, Hajime; Satake, Rumo, Illumination apparatus.
    57. Kimura, Hajime; Satake, Rumo, Illumination apparatus.
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    61. Yamazaki, Shunpei; Tanaka, Koichiro, Laser processing method.
    62. Yamazaki, Shunpei; Fukunaga, Takeshi; Koyama, Jun; Inukai, Kazutaka, Light emitting device and manufacturing method thereof.
    63. Yamazaki, Shunpei; Fukunaga, Takeshi; Koyama, Jun; Inukai, Kazutaka, Light emitting device and manufacturing method thereof.
    64. Yamazaki, Shunpei, Light-emitting device having a triple-layer wiring structure.
    65. Kim,Hyung Guel; Lee,Dong Ho; Ma,Won Seok, Liquid crystal display.
    66. Yamazaki, Shunpei; Hirakata, Yoshiharu, Liquid crystal display device and manfacturing method thereof.
    67. Yamazaki, Shunpei; Hirakata, Yoshiharu, Liquid crystal display device and manufacturing method thereof.
    68. Yamazaki, Shunpei; Hirakata, Yoshiharu, Liquid crystal display device and manufacturing method thereof.
    69. Kim,Jong Il; Kwon,Oh Nam, Liquid crystal display device and method of manufacturing the same.
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    76. Yamazaki,Shunpei; Hirakata,Yoshiharu, Liquid crystal display device with particular TFT structure and method of manufacturing the same.
    77. Yamazaki, Shunpei; Koyama, Jun, Liquid crystal electrooptical device.
    78. Yamazaki, Shunpei; Koyama, Jun, Liquid crystal electrooptical device.
    79. Yamazaki,Shunpei; Koyama,Jun, Liquid crystal electrooptical device.
    80. Matsubayashi, Daisuke, Memory device and electronic device.
    81. Matsubayashi, Daisuke, Memory device and electronic device.
    82. Matsubayashi, Daisuke, Memory device and electronic device.
    83. Yamazaki, Shunpei; Tanaka, Koichiro, Method for manufacturing a display device.
    84. Yamazaki, Shunpei; Tanaka, Koichiro, Method for manufacturing a display device including irradiating overlapping regions.
    85. Yamazaki,Shunpei; Tanaka,Koichiro, Method for manufacturing a display device including irradiating overlapping regions.
    86. Yamazaki,Shunpei; Tanaka,Koichiro, Method for manufacturing a display device including irradiating overlapping regions.
    87. Jinbo, Yasuhiro, Method for manufacturing semiconductor device.
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    89. Yamazaki, Shunpei, Method of fabricating a semiconductor device.
    90. Yamazaki, Shunpei, Method of fabricating a semiconductor device.
    91. Yamazaki, Shunpei, Method of fabricating a semiconductor device.
    92. Yamazaki,Shunpei, Method of fabricating a semiconductor device by doping impurity element into a semiconductor layer through a gate electrode.
    93. Yamazaki, Shunpei; Ohtani, Hisashi; Suzawa, Hideomi; Takayama, Toru, Method of forming a semiconductor device.
    94. Chung, Yun-Mo; Lee, Ki-Yong; Jeong, Min-Jae; Seo, Jin-Wook; Hong, Jong-Won; Na, Heung-Yeol; Kang, Eu-Gene; Chang, Seok-Rak; Yang, Tae-Hoon; Ahn, Ji-Su; Kim, Young-Dae; Park, Byoung-Keon; Lee, Kil-Won; Lee, Dong-Hyun; Yoon, Sang-Yon; Park, Jong-Ryuk; Choi, Bo-Kyung; Lisachenko, Maxim, Method of forming polycrystalline silicon layer and atomic layer deposition apparatus used for the same.
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    97. Hamada, Takashi; Arai, Yasuyuki, Method of manufacturing a semiconductor device.
    98. Yamazaki,Shunpei, Method of manufacturing a semiconductor device having a gate electrode with a three layer structure.
    99. Kobori,Isamu; Arai,Michio, Method of manufacturing a semiconductor method of manufacturing a thin-film transistor and thin-film transistor.
    100. Koyama, Jun; Ohtani, Hisashi; Ogata, Yasushi; Yamazaki, Shunpei, Method of manufacturing an active matrix display device.
    101. Ono,Koji; Suzawa,Hideomi; Arao,Tatsuya, Method of manufacturing semiconductor device.
    102. Nakajima, Setsuo; Ohtani, Hisashi; Yamazaki, Shunpei, Method of manufacturing semiconductor devices.
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    115. Yamazaki, Shunpei; Sato, Masataka; Ohno, Masakatsu; Yasumoto, Seiji; Adachi, Hiroki, Peeling method and manufacturing method of flexible device.
    116. Koyama,Jun, Reflective type semiconductor display device.
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    118. Koyama, Jun, Semiconductor device.
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    124. Shunpei Yamazaki JP, Semiconductor device.
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    202. Shunpei Yamazaki JP; Jun Koyama JP; Setsuo Nakajima JP; Naoya Sakamoto JP, Semiconductor device and method for manufacturing the same.
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    204. Tsunoda,Akira; Yamazaki,Shunpei; Koyama,Jun, Semiconductor device and method for manufacturing the same.
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    226. Sung, Chae Gee, Semiconductor device and method of manufacturing the same.
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