초록 ▼

Using a clean box comprising a box body having an aperture in one side surface, a side lid for hermetically closing the aperture, and gas inlet and outlet valves provided in the box body and having neither an evacuation device nor a transfer device, the gas inlet and outlet valves are opened by a ga

Using a clean box comprising a box body having an aperture in one side surface, a side lid for hermetically closing the aperture, and gas inlet and outlet valves provided in the box body and having neither an evacuation device nor a transfer device, the gas inlet and outlet valves are opened by a gas feeding/discharging mechanism in a state in which the aperture of the box body is closed by the side lid, a non-oxidizing gas is introduced through one of the gas inlet and outlet valves into the clean box, and a gas having filled the clean box before the introduction of the non-oxidizing gas is discharged through the other of the gas inlet and outlet valves.

대표청구항 ▼

[What is claimed is:] [1.]providing a clean box comprising a box body having an aperture in one surface, a lid configured to close said aperture hermetically, a gas inlet valve and a gas outlet valve provided in said box body, and a groove formed between said box body and said lid such that a suctio

[What is claimed is:] [1.]providing a clean box comprising a box body having an aperture in one surface, a lid configured to close said aperture hermetically, a gas inlet valve and a gas outlet valve provided in said box body, and a groove formed between said box body and said lid such that a suction space surrounding said aperture is formed when said clean box is closed by said lid;opening said gas inlet valve and said gas outlet valve when said aperture of said clean box is closed by said lid;introducing a non-oxidizing gas through said gas inlet valve to purge gases having been present in said clean box through said gas outlet valve so as to fill said box with the non-oxidizing gas; andclosing said gas inlet valve and said gas outlet valve so as to keep a semiconductor wafer stored in said clean box under non-oxidizing gas atmosphere.