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특허 상세정보

MyON담기
내보내기 페이스북 공유 카카오톡 공유

Microelectromechanical accelerometer for automotive applications

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B60G-017/00   
미국특허분류(USC) 280/005.514 ; 280/006.157
출원번호 US-0568845 (1995-12-07)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Jones, Tullar & Cooper, P.C.
인용정보 피인용 횟수 : 195  인용 특허 : 44
초록
▼

A micromechanical capacitive accelerometer is provided from a single silicon wafer. The basic structure of the micromechanical accelerometer is etched in the wafer to form a released portion in the substrate, and the released and remaining portions of the substrate are coated with metal under conditions sufficient to form a micromechanical capacitive accelerometer. The substrate is preferably etched using reactive-ion etching for at least the first etch step in the process that forms the basic structure, although in another preferred embodiment, all etch...

대표
청구항
▼

[What is claimed is:] [1.]an accelerometer for producing a continuous output signal in response to sensed acceleration vectors, said accelerometer including at least two capacitively-coupled fingers, at least one of said fingers moves relative to another finger in response to said acceleration vectors to produce a change in capacitance, wherein at least one of said fingers is characterized by an aspect ratio greater than about 4 to 1, said fingers being fabricated from a single silicon substrate by etching the substrate at least partially by reactive ion...

이 특허에 인용된 특허 (44)

  1. Rudolf Felix (Cortaillod CHX). Accelerometer. USP1984114483194.
  2. Grard Marcillat (Chatellerault FRX). Accelerometer sensor with flat pendular structure. USP1987054663972.
  3. Bennett Paul T. (Phoenix AZ) Dunn William C. (Mesa AZ). Accelerometer utilizing an annular mass. USP1993105249465.
  4. Beringhause Steven (North Attleboro MA) Mandeville Raymond E. (Cumberland RI) Rolph ; III W. Donald (East Walpole MA). Accelerometer with central mass in support. USP1992065121180.
  5. Petersen Kurt E. (San Jose CA) Barth Phillip W. (Palo Alto CA). Accelerometer with integral bidirectional shock protection and controllable viscous damping. USP1989114882933.
  6. Smith Bradley W. (Odgen UT) Erickson James D. (North Ogden UT) Jamison Patrick D. (Ludwigsburg DEX) Tyroller Peter A. (Kirchheim/T. DEX) Bergfried Dietrich (Boeblingen DEX) Mattes Bernhard (Sachsenhe. Air bag system for a motor vehicle. USP1995055411289.
  7. Zhang Zhihong (Novi MI). Automotive antilock braking. USP1995105454630.
  8. Fujishiro Takeshi (Yokohama JPX) Takahashi Sadahiro (Yokosuka JPX) Kaneko Takanobu (Yokosuka JPX). Automotive suspension system with variable damping characteristics. USP1987094696489.
  9. Suzuki Seiko (Hitachioota JPX) Tsuchitani Shigeki (Mito JPX) Miki Masayuki (Katsuta JPX) Matsumoto Masahiro (Hitachi JPX). Capacitance type accelerometer. USP1992035095752.
  10. Bernstein Jonathan J. (Medfield MA) Weinberg Marc S. (Needham MA). Comb drive micromechanical tuning fork gyro. USP1994095349855.
  11. Miyamori Masahiro (Osaka JPX). Crash/non-crash discrimination using frequency components of acceleration uniquely generated upon crash impact. USP1995075436838.
  12. Tang William C. (Ann Arbor MI). Digital capacitive accelerometer. USP1994105353641.
  13. Danel Jean-Sebastien (Grenoble FRX) Delapierre Gilles (Seyssinet FRX) Michel France (Sassenage FRX). Directional accelerometer and its microlithographic fabrication process. USP1987034653326.
  14. Nagasaka Hiroko (Yokohama JPX) Motegi Nawoto (Kanagawa JPX). Dry etching method of compound semiconductor. USP1987024640737.
  15. Dietrich Klaus (Stockdorf DEX) Kroy Walter (Ottobrunn DEX). Electric transducer for measuring mechanical quantities. USP1988094772928.
  16. Lin William C. (Troy MI). Method and apparatus for initializing antilock brake control on split coefficient surface. USP1994055315518.
  17. Core Theresa A. (North Andover MA) Howe Roger T. (Lafayette CA). Method for fabricating microstructures. USP1994055314572.
  18. Smeltzer Ronald K. (Mercer County NJ) Morris Wesley H. (Fort Pierce FL). Method of making stabilized silicon-on-insulator field-effect transistors having 100 oriented side and top surfaces. USP1987054662059.
  19. Cole John C. (Mercer Island WA). Micro-miniature accelerometer. USP1988044736629.
  20. Boura Andr (Chatellerault FRX). Micromachined accelerometer with electrostatic return. USP1987124711128.
  21. Lane Richard L. (Penfield NY). Micromachined microaccelerometer for measuring acceleration along three axes. USP1994105357803.
  22. O\Brien Benedict B. (Manhattan Beach CA) Burns Brent E. (Torrance CA) Geen John A. (Wrentham MA). Miniature silicon accelerometer and method. USP1993045205171.
  23. Sherman Steven J. (Andover MA) Brokaw A. Paul (Burlington MA) Tsang Robert W. K. (Bedford MA) Core Theresa (Framington MA). Monolithic accelerometer. USP1994095345824.
  24. Dunn William C. (Mesa AZ) Liaw H. Ming (Scottsdale AZ) Ristic Ljubisa (Phoenix AZ) Roop Raymond M. (Scottsdale AZ). Monolithic circuit with integrated bulk structure resonator. USP1993115260596.
  25. Greiff Paul (Wayland MA). Monolithic micromechanical accelerometer. USP1992065126812.
  26. Petersen Kurt E. (San Jose CA) Shartel Anne C. (San Jose CA). Planar semiconductor three direction acceleration detecting device and method of fabrication. USP1982084342227.
  27. Kravitz Stanley H. (Coopersburg PA) Manocha Ajit S. (Allentown PA) Willenbrock ; Jr. William E. (Manchester Township ; Ocean County NJ). Plasma pretreatment with BCl3 to remove passivation formed by fluorine-etch. USP1984014426246.
  28. MacDonald Noel C. (Ithaca NY) Zhang Zhoying L. (Ithaca NY) Porkolab Gyorgy A. (Ithaca NY). Process for fabricating submicron single crystal electromechanical structures. USP1995025393375.
  29. MacDonald Noel C. (Ithaca NY) Zhang Zuoying L. (Ithaca NY). RIE process for fabricating submicron, silicon electromechanical structures. USP1994055316979.
  30. MacDonald Noel C. (Ithaca) Zhang Zuoying L. (Ithaca NY). RIE process for fabricating submicron, silicon electromechanical structures. USP1993035198390.
  31. Allen Henry V. (Freemont CA) Terry Stephen C. (Palo Alto CA) De Bruin Diederik W. (Santa Clara CA). Self-testable micro-accelerometer. USP1993105253510.
  32. Allen Henry V. (Fremont CA) Terry Stephen C. (Palo Alto CA) De Bruin Diederik W. (Santa Clara CA). Self-testable micro-accelerometer and method. USP1992045103667.
  33. Hansson, Jan I.. Silicon accelerometer. USP1985114553436.
  34. Roszhart Terry V. (North Caldwell NJ). Silicon micromachined accelerometer. USP1990084945765.
  35. Marek Jiri (Reutlingen DEX). Silicon-mass angular acceleration sensor. USP1993085233213.
  36. Kimura Makoto,JPX ; Takahashi Toru,JPX ; Shimizu Hiroyuki,JPX. Suspension control system for automotive vehicle. USP1998105828970.
  37. Teguri Yoshihiko (Okazaki JPX) Ide Seiya (Okazaki JPX). Trigger device for vehicle safety apparatus. USP1996025490067.
  38. Williams David A. (Milton Keynes GBX). Vehicle suspension control system. USP1994035295074.
  39. Fulks Gary C. (Paris FRX). Vehicle suspension control with relative suspension position sensor and differentiator. USP1993105255191.
  40. Williams David A. (Cranfield GBX) Wright Peter G. (Norwich GBX). Vehicle suspension system. USP1986124625993.
  41. Watanabe Kenichi (Hiroshima JPX) Takehara Shin (Hiroshima JPX) Shimoe Hiroo (Hiroshima JPX) Miyoshi Akihiko (Hiroshima JPX) Kamimura Shoich (Hiroshima JPX). Vehicle suspension system having variable suspension properties. USP1989054830397.
  42. Chin Yuen-Kwok (Troy MI) Lin William C. (Troy MI). Vehicle wheel slip control on split coefficient surface. USP1994015275474.
  43. Breed Allen (Boontown Township ; Morris County NJ) Thuen Ted (Morris Plains NJ) Grossi Carl (Wharton NJ). Velocity change sensor with improved spring bias. USP1992035098122.
  44. Williams David A. (Milton Keynes GBX) Wright Peter G. (Wymondham GBX) Burke David (Carleton Rise GBX). Wheeled vehicle steering system. USP1994095348111.

이 특허를 인용한 특허 피인용횟수: 195

  1. Axelrod, Noel; Ofek, Eran. Accelerometer. USP2009117617729.
  2. Potter, Michael D.. Accelerometer and methods thereof. USP2005026854330.
  3. Lutz, Markus; Partridge, Aaron; Kronmueller, Silvia. Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same. USP2005106952041.
  4. Lutz,Markus; Partridge,Aaron; Kronmueller,Silvia. Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same. USP2008017317233.
  5. Hattori,Yutaka; Hatano,Yasuo. Anti-lock brake system and sensor unit for the same. USP2009017481501.
  6. Greywall, Dennis S.. Article comprising a freestanding micro-tube and method therefor. USP2003046545796.
  7. Cox, Keith; Kapoor, Gaurav; Culbert, Michael. Automatic adjustment of thermal requirement based on motion detection and frequency of disturbances. USP2014068756176.
  8. Krylov, Viacheslav; Amir, Emil; Rabanim, Shila. Bistable force and/or acceleration sensor. USP2017019551728.
  9. Messenger, Robert K.; McLain, Timothy W.; Anderson, Jeffrey K.; Howell, Larry L.. Bistable micromechanical devices. USP2009067554342.
  10. Silverbrook, Kia. Camera sensing device for capturing and manipulating images. USP2011067969477.
  11. Silverbrook, Kia. Camera system comprising color display and processor for decoding data blocks in printed coding pattern. USP2015099124735.
  12. Silverbrook, Kia. Camera system comprising color display and processor for decoding data blocks in printed coding pattern. USP2015119185246.
  13. Silverbrook, Kia; Lapstun, Paul. Camera system for with velocity sensor and de-blurring processor. USP2013048421869.
  14. Silverbrook, Kia; Lapstun, Paul. Camera system to facilitate a cascade of imaging effects. USP2014118896724.
  15. Silverbrook, Kia. Camera system with color display and processor for Reed-Solomon decoding. USP2014128922791.
  16. Silverbrook, Kia. Camera system with color display and processor for reed-solomon decoding. USP2015028953178.
  17. Silverbrook, Kia; Walmsley, Simon Robert. Camera unit incorporating program script scanner. USP2015018936196.
  18. Silverbrook, Kia. Camera with linked parallel processor cores. USP2015089113007.
  19. Silverbrook, Kia. Camera with linked parallel processor cores. USP2015099143635.
  20. Umemura,Akinobu; Ito,Hirokazu. Capacitive acceleration sensor system. USP2007107287429.
  21. Je, Chang-Han; Hwang, Gunn; Jung, Sung-Hae; Lee, Myung-Lae; Choi, Chang-Auck. Capacitive accelerometer. USP2012028113054.
  22. Ayazi, Farrokh; Amini, Babak Vakili; Abdolvand, Reza. Capacitive microaccelerometers and fabrication methods. USP2010077757393.
  23. Langereis, Geert. Capacitive sensor device and a method of sensing accelerations. USP2015099128114.
  24. Silverbrook, Kia. Central processor with multiple programmable processor units. USP2015109154647.
  25. Silverbrook, Kia. Central processor with multiple programmable processor units. USP2015119185247.
  26. Andres, Robert M.. Crash pulse energy algorithm for an inflatable restraint system. USP2009057539568.
  27. Silverbrook, Kia; Lapstun, Paul. De-blurring in a digital image system. USP2010017646403.
  28. Silverbrook, Kia. Digital camera having image processor and printer. USP2015109167109.
  29. Silverbrook, Kia. Digital camera having image processor and printer. USP2015119197767.
  30. Silverbrook, Kia. Digital camera system for simultaneous printing and magnetic recording. USP2012108285137.
  31. Silverbrook,Kia; Lapstun,Paul. Digital camera system having motion deblurring means. USP2006097110024.
  32. Silverbrook, Kia. Digital camera with quad core processor. USP2014118878953.
  33. Silverbrook, Kia. Digital camera with quad core processor. USP2014128913151.
  34. Silverbrook, Kia. Disposable digital camera with printing assembly. USP2015069044965.
  35. Silverbrook, Kia. Disposable digital camera with printing assembly. USP2015089108430.
  36. Silverbrook, Kia. Disposable digital camera with printing assembly. USP2015109168761.
  37. Partridge, Aaron; Lutz, Markus; Kronmueller, Silvia. Electromechanical system having a controlled atmosphere, and method of fabricating same. USP2017099771257.
  38. Partridge, Aaron; Lutz, Markus; Kronmueller, Silvia. Electromechanical system having a controlled atmosphere, and method of fabricating same. USP2011098018077.
  39. Adams,Scott; Davis,Tim; Miller,Scott; Shaw,Kevin; Chong,John Matthew; Lee,Seung (Chris) Bok. Electrostatic actuator for microelectromechanical systems and methods of fabrication. USP2006087098571.
  40. Adams,Scott; Davis,Tim; Miller,Scott; Shaw,Kevin; Chong,John Matthew; Lee,Seung Bok (Chris). Electrostatic actuator for microelectromechanical systems and methods of fabrication. USP2007087261826.
  41. Partridge, Aaron; Lutz, Markus; Gupta, Pavan. Encapsulated microelectromechanical structure. USP2017099758371.
  42. Partridge, Aaron; Lutz, Markus; Gupta, Pavan. Encapsulated microelectromechanical structure. USP20181010099917.
  43. Partridge, Aaron; Lutz, Markus; Gupta, Pavan. Encapsulated microelectromechanical structure. USP2016099440845.
  44. Silverbrook, Kia. Hand held image capture device with multi-core processor and wireless interface to input device. USP2015028953060.
  45. Silverbrook, Kia. Hand held image capture device with multi-core processor for facial detection. USP2014108854493.
  46. Silverbrook, Kia. Hand held image capture device with multi-core processor for facial detection. USP2014118896720.
  47. Silverbrook, Kia. Hand-held quad core processing apparatus. USP2014118891008.
  48. Silverbrook, Kia. Hand-held quad core processing apparatus. USP2015018934053.
  49. Silverbrook, Kia. Handheld digital camera device with orientation sensing and decoding capabilities. USP2016019237244.
  50. Silverbrook, Kia. Handheld imaging device incorporating multi-core image processor. USP2017029584681.
  51. Silverbrook, Kia. Handheld imaging device with VLIW image processor. USP2017019560221.
  52. Silverbrook, Kia. Handheld imaging device with image processor provided with multiple parallel processing units. USP2015028947592.
  53. Silverbrook, Kia. Handheld imaging device with integrated chip incorporating on shared wafer image processor and central processor. USP2015119179020.
  54. Silverbrook, Kia. Handheld imaging device with multi-core image processor integrating common bus interface and dedicated image sensor interface. USP2015049013717.
  55. Silverbrook, Kia. Handheld imaging device with multi-core image processor integrating common bus interface and dedicated image sensor interface. USP2015069060081.
  56. Silverbrook, Kia. Handheld imaging device with multi-core image processor integrating common bus interface and dedicated image sensor interface. USP2015089113008.
  57. Silverbrook, Kia. Handheld imaging device with multi-core image processor integrating common bus interface and dedicated image sensor interface. USP2015099148530.
  58. Silverbrook, Kia. Handheld imaging device with multi-core image processor integrating image sensor interface. USP2014128913137.
  59. Silverbrook, Kia. Handheld imaging device with quad-core image processor integrating image sensor interface. USP2014128908069.
  60. Silverbrook, Kia. Handheld imaging device with system-on-chip microcontroller incorporating on shared wafer image processor and image sensor. USP2014128908051.
  61. Potter, Michael D.. High temperature embedded charge devices and methods thereof. USP2013118581308.
  62. Silverbrook, Kia. Image capture and processing integrated circuit for a camera. USP2014108872952.
  63. Silverbrook, Kia. Image capture and processing integrated circuit for a camera. USP2014128908075.
  64. Silverbrook, Kia. Image capture device with linked multi-core processor and orientation sensor. USP2015028953061.
  65. Silverbrook, Kia. Image processing method using sensed eye position. USP2014128902333.
  66. Silverbrook, Kia. Image sensing and printing device. USP2015059036162.
  67. Silverbrook, Kia. Image sensing and printing device. USP2015079088675.
  68. Silverbrook, Kia. Image sensing and printing device. USP2015099137397.
  69. Silverbrook, Kia. Image sensing and printing device. USP2012098274665.
  70. Silverbrook, Kia. Inkjet nozzle with paddle layer arranged between first and second wafers. USP2012018096642.
  71. Koury, Jr., Daniel N.; McNeil, Andrew C.. MEMS device and method of reducing stiction in a MEMS device. USP2009127628072.
  72. Yue, Aiwu; Leonardson, Ronald B.. MEMS enhanced capacitive pick-off and electrostatic rebalance electrode placement. USP2005016841992.
  73. Kanemoto, Kei. MEMS sensor, MEMS sensor manufacturing method, and electronic device. USP2012128338896.
  74. Amin, Nurul; Xue, Song S.; Ryan, Patrick J.. MEMS shock sensors. USP2010107810373.
  75. Leonardson,Ronald B.; Malametz,David L.. MEMS teeter-totter accelerometer having reduced non-linearty. USP2006117140250.
  76. Cox, Keith; Kapoor, Gaurav; Culbert, Michael. Method and apparatus for detecting conditions of a peripheral device including motion, and determining/predicting temperature(S) wherein at least one temperature is weighted based on detected conditions. USP2013038392340.
  77. Wehrenberg, Paul James. Method and apparatus for detecting free fall. USP2009067541551.
  78. Wehrenberg,Paul James. Method and apparatus for detecting free fall. USP2008047351925.
  79. Wehrenberg,Paul James. Method and apparatus for detecting free fall. USP2007127307228.
  80. Lutz,Markus; Partridge,Aaron. Method for adjusting the frequency of a MEMS resonator. USP2007057221241.
  81. Lutz,Markus; Partridge,Aaron. Method for adjusting the frequency of a MEMS resonator. USP2006097102467.
  82. Potter,Michael D.. Method for non-damaging charge injection and a system thereof. USP2007057217582.
  83. Potter,Michael D.. Method for non-damaging charge injection and system thereof. USP2008087408236.
  84. Partridge, Aaron; Lutz, Markus; Kronmueller, Silvia. Method of fabricating electromechanical device having a controlled atmosphere. USP2009047514283.
  85. Partridge, Aaron; Lutz, Markus; Kronmueller, Silvia. Method of fabricating microelectromechanical systems and devices having trench isolated contacts. USP2005086936491.
  86. Silverbrook, Kia. Method of processing images captured by digital camera to reduce distortion. USP2011098013905.
  87. Wehrenberg, Paul J.; Leiba, Aaron; Williams, Richard C.; Falkenburg, David R.; Gerbarg, Louis G.; Chang, Ray L.. Methods and apparatuses for operating a portable device based on an accelerometer. USP2017119829999.
  88. Wehrenberg, Paul J.; Leiba, Aaron; Williams, Richard C.; Falkenburg, David R.; Gerbarg, Louis G.; Chang, Ray L.. Methods and apparatuses for operating a portable device based on an accelerometer. USP2017029575569.
  89. Wehrenberg, Paul J.; Leiba, Aaron; Williams, Richard C.; Falkenburg, David R.; Gerbarg, Louis G.; Chang, Ray L.. Methods and apparatuses for operating a portable device based on an accelerometer. USP2018039921666.
  90. Wehrenberg, Paul J.; Leiba, Aaron; Williams, Richard C.; Falkenburg, David R.; Gerbarg, Louis G.; Chang, Ray L.. Methods and apparatuses for operating a portable device based on an accelerometer. USP2010037688306.
  91. Wehrenberg, Paul J.; Leiba, Aaron; Williams, Richard C.; Falkenburg, David R.; Gerbarg, Louis G.; Chang, Ray L.. Methods and apparatuses for operating a portable device based on an accelerometer. USP2014048698744.
  92. Potter,Michael D.. Methods for distributed electrode injection. USP2007107287328.
  93. Subramanian, Krupakar M.. Methods of etching trenches into silicon of a semiconductor substrate. USP2016129524875.
  94. Potter,Michael D.. Micro fluidic valves, agitators, and pumps and methods thereof. USP2007037195393.
  95. Potter,Michael D.. Micro-electro-mechanical switch and a method of using and making thereof. USP2007107280014.
  96. Lee,Robb M.; Shul,Randy J.; Polosky,Marc A.; Hoke,Darren A.; Vernon,George E.. Microelectromechanical acceleration-sensing apparatus. USP2006127148436.
  97. Partridge, Aaron; Lutz, Markus; Kronmueller, Silvia. Microelectromechanical device including an encapsulation layer of which a portion is removed to expose a substantially planar surface having a portion that is disposed outside and above a chamber and including a field region on which integrated circuits are formed and methods for fabricating same. USP2010127859067.
  98. Partridge, Aaron; Lutz, Markus; Kronmueller, Silvia. Microelectromechanical device including an encapsulation layer of which a portion is removed to expose a substantially planar surface having a portion that is disposed outside and above a chamber and including a field region on which integrated circuits are formed, and methods for fabricating same. USP2014018623686.
  99. Partridge, Aaron; Lutz, Markus; Kronmueller, Silvia. Microelectromechanical device including an encapsulation layer of which a portion is removed to expose a substantially planar surface having a portion that is disposed outside and above a chamber and including a field region on which integrated circuits are formed, and methods for fabricating same. USP2013048421167.
  100. Koehler,David R.; Hoke,Darren A.; Weichman,Louis S.; Vernon,George E.; Shul,Randy J.; Beggans,Michael H.. Microelectromechanical safing and arming apparatus. USP2008067383774.
  101. Koehler,David R.; Hoke,Darren A.; Weichman,Louis S.; Vernon,George E.; Shul,Randy J.; Beggans,Michael H.. Microelectromechanical safing and arming apparatus. USP2006057051656.
  102. Partridge,Aaron; Lutz,Markus; Kronmueller,Silvia. Microelectromechanical systems and devices having thin film encapsulated mechanical structures. USP2006077075160.
  103. Partridge,Aaron; Lutz,Markus; Kronmueller,Silvia. Microelectromechanical systems having trench isolated contacts, and methods for fabricating same. USP2008047352040.
  104. Partridge,Aaron; Lutz,Markus; Kronmueller,Silvia. Microelectromechanical systems, and devices having thin film encapsulated mechanical structures. USP2007107288824.
  105. Clark William A. ; Juneau Thor N. ; Roessig Allen W. ; Lemkin Mark A.. Microfabricated structures with electrical isolation and interconnections. USP2001096291875.
  106. William A. Clark. Microfabrication using germanium-based release masks. USP2002086440766.
  107. Acar, Cenk; Shenoy, Ravindra Vaman; Black, Justin Phelps; Petersen, Kurt Edward; Ganapathi, Srinivasan Kodaganallur; Stephanou, Philip Jason. Micromachined piezoelectric X-Axis gyroscope. USP2013088516886.
  108. Stephanou, Philip Jason; Acar, Cenk; Shenoy, Ravindra Vaman; Burns, David William; Black, Justin Phelps; Petersen, Kurt Edward; Ganapathi, Srinivasan Kodaganallur. Micromachined piezoelectric three-axis gyroscope and stacked lateral overlap transducer (slot) based three-axis accelerometer. USP2015059021880.
  109. Acar, Cenk; Shenoy, Ravindra V.; Black, Justin Phelps; Petersen, Kurt Edward; Ganapathi, Srinivasan Kodaganallur; Stephanou, Philip Jason. Micromachined piezoelectric x-axis gyroscope. USP2016109459099.
  110. Acar, Cenk; Shenoy, Ravindra V.; Black, Justin Phelps; Petersen, Kurt Edward; Ganapathi, Srinivasan Kodaganallur; Stephanou, Philip Jason. Micromachined piezoelectric x-axis gyroscope. USP2017039605965.
  111. Acar, Cenk; Shenoy, Ravindra Vaman; Black, Justin Phelps; Petersen, Kurt Edward; Ganapathi, Srinivasan Kodaganallur; Stephanou, Philip Jason. Micromachined piezoelectric x-axis gyroscope. USP2013118584522.
  112. Acar, Cenk; Shenoy, Ravindra V.; Black, Justin Phelps; Petersen, Kurt Edward; Ganapathi, Srinivasan Kodaganallur; Stephanou, Philip Jason. Micromachined piezoelectric z-axis gyroscope. USP2016089410805.
  113. Acar, Cenk; Shenoy, Ravindra Vaman; Black, Justin Phelps; Petersen, Kurt Edward; Ganapathi, Srinivasan Kodaganallur; Stephanou, Philip Jason. Micromachined piezoelectric z-axis gyroscope. USP2013088516887.
  114. Wang, Chuan Wei. Micromachined sensors. USP2010107814794.
  115. Pannek,Thorsten; Bischof,Udo; Kronmueller,Silvia; Frey,Jens; Wilhelm,Ulf. Micromechanical component. USP2007097270868.
  116. Fuertsch,Matthias; Fischer,Frank; Metzger,Lars; Sundermeier,Frieder. Micromechanical mass flow sensor and method for the production thereof. USP2006067060197.
  117. Messenger, Robert K.; McLain, Timothy W.; Anderson, Jeffrey K.; Howell, Larry L.. Micromechanical positional state sensing apparatus method and system. USP2009117616013.
  118. Bertz, Andreas; Gessner, Thomas; K?chler, Matthias; Kn?fler, Roman. Microstructure and method for the production thereof. USP2005116969628.
  119. Silverbrook, Kia; Lapstun, Paul; Walmsley, Simon Robert. Modular camera and printer. USP2014108866923.
  120. Borwick, III, Robert L.; DeNatale, Jeffrey F.; Anderson, Robert J.. Modules integrating MEMS devices with pre-processed electronic circuitry, and methods for fabricating such modules. USP2005126979872.
  121. Potter,Michael D.. Motion based, electrostatic power source and methods thereof. USP2008057378775.
  122. Weinberg, Harvey. Mounting method for satellite crash sensors. USP2016019235937.
  123. Silverbrook, Kia. Multi-core image processor for portable device. USP2017019544451.
  124. Silverbrook, Kia. Multi-core image processor for portable device. USP2014128902340.
  125. Silverbrook, Kia. Multi-core processor for hand-held, image capture device. USP2014108866926.
  126. Silverbrook, Kia. Multi-core processor for portable device with dual image sensors. USP2015089106775.
  127. Silverbrook, Kia. Multi-core processor for portable device with dual image sensors. USP2015099137398.
  128. Williams, Hilary L.. Multi-functional cellular telephone. USP201404RE44855.
  129. Fleming, Paul D.. Pen cartridge that transmits acceleration signal for recreating handwritten signatures and communications. USP2005086933933.
  130. Williams, Hilary L.. Portable computers. USP201109E042738.
  131. Williams, Hilary Lyndsay. Portable computers. USP201303RE44103.
  132. Williams, Hilary Lyndsay. Portable computers. USP201709RE46548.
  133. Williams, Hilary Lyndsay. Portable computers. USP201506RE45559.
  134. Silverbrook, Kia. Portable device with dual image sensors and quad-core processor. USP2015089113009.
  135. Silverbrook, Kia. Portable device with dual image sensors and quad-core processor. USP2015099143636.
  136. Silverbrook, Kia. Portable device with image sensor and quad-core processor for multi-point focus image capture. USP2015079083830.
  137. Silverbrook, Kia. Portable device with image sensor and quad-core processor for multi-point focus image capture. USP2015099124737.
  138. Silverbrook, Kia. Portable device with image sensors and multi-core processor. USP2014108854492.
  139. Silverbrook, Kia. Portable device with image sensors and multi-core processor. USP2014118890969.
  140. Silverbrook, Kia. Portable device with image sensors and multi-core processor. USP2015018934027.
  141. Silverbrook, Kia; Lapstun, Paul. Portable hand-held device for deblurring sensed images. USP2015069055221.
  142. Silverbrook, Kia. Portable hand-held device for displaying oriented images. USP2015069049318.
  143. Silverbrook, Kia. Portable hand-held device for displaying oriented images. USP2015079083829.
  144. Silverbrook, Kia. Portable hand-held device for displaying oriented images. USP2015099124736.
  145. Silverbrook, Kia; Lapstun, Paul. Portable hand-held device for manipulating images. USP2015069060128.
  146. Silverbrook, Kia. Portable hand-held device having networked quad core processor. USP2014128913182.
  147. Silverbrook, Kia. Portable hand-held device having quad core image processor. USP2015089113010.
  148. Silverbrook, Kia. Portable hand-held device having quad core image processor. USP2015109154648.
  149. Silverbrook, Kia. Portable hand-held device having quad core image processor. USP2015119191530.
  150. Silverbrook, Kia. Portable hand-held device having stereoscopic image camera. USP2014108854494.
  151. Silverbrook, Kia. Portable hand-held device having stereoscopic image camera. USP2014118890970.
  152. Silverbrook, Kia. Portable hand-held device having stereoscopic image camera. USP2014128922670.
  153. Silverbrook, Kia. Portable handheld device with multi-core image processor. USP2014118885179.
  154. Silverbrook, Kia. Portable handheld device with multi-core image processor. USP2015018928897.
  155. Silverbrook, Kia. Portable handheld device with multi-core image processor. USP2014118885180.
  156. Silverbrook, Kia. Portable handheld device with multi-core image processor. USP2015018937727.
  157. Silverbrook, Kia. Portable handheld device with multi-core image processor. USP2015129219832.
  158. Silverbrook, Kia. Portable handheld device with multi-core image processor. USP2016059338312.
  159. Silverbrook, Kia. Portable handheld device with multi-core microcoded image processor. USP2016089432529.
  160. Silverbrook, Kia. Portable handheld device with multi-core microcoded image processor. USP2015028947679.
  161. Silverbrook, Kia. Portable imaging device with multi-core processor. USP2015089100516.
  162. Silverbrook, Kia. Portable imaging device with multi-core processor. USP2015099131083.
  163. Silverbrook, Kia. Portable imaging device with multi-core processor and orientation sensor. USP2014098823823.
  164. King, Tobin Allen; Silverbrook, Kia. Print media cartridge with ink supply manifold. USP2014078789939.
  165. Ferrari, Paolo; Vigna, Benedetto; Montanini, Pietro; Ferrera, Marco. Process for manufacturing high-sensitivity accelerometric and gyroscopic integrated sensors, and sensor thus produced. USP201010RE41889.
  166. Silverbrook, Kia. Quad-core camera processor. USP2015119191529.
  167. Silverbrook, Kia. Quad-core image processor. USP2014088810723.
  168. Silverbrook, Kia. Quad-core image processor. USP2014108854538.
  169. Silverbrook, Kia. Quad-core image processor. USP2014128902357.
  170. Silverbrook, Kia. Quad-core image processor for device with image display. USP2014128902324.
  171. Silverbrook, Kia. Quad-core image processor for facial detection. USP2014098836809.
  172. Potter,Michael D.. Rotational motion based, electrostatic power source and methods thereof. USP2007057211923.
  173. Hsieh,Jerwei; Chu,Huai Yuan; Tsai,Julius Ming Lin; Fang,Weileun. Selective etching method. USP2007077247247.
  174. Nakatani, Goro. Semiconductor device and method for manufacturing same. USP2015028946786.
  175. Wurzinger, Christoph Bernhard; Ceballos, Jose Luis. Sensor with movable part and biasing. USP2016129525925.
  176. Wurzinger, Christoph Bernhard; Ceballos, Jose Luis. Sensor with movable parts and biasing. USP20190110194250.
  177. Simoes, Paulo J.. Stackable and collapsible trolley cart system. USP2014048702111.
  178. Stephanou, Philip Jason; Burns, David William; Shenoy, Ravindra Vaman. Stacked lateral overlap transducer (SLOT) based three-axis accelerometer. USP2015059032796.
  179. Stephanou, Philip Jason; Burns, David William; Shenoy, Ravindra Vaman. Stacked lateral overlap transducer (SLOT) based three-axis accelerometer. USP20190210209072.
  180. Nicot,Christophe; Blanchin,Olivier. Suspension stop instrumented under deformation in order to measure forces. USP2007037192041.
  181. DeBoni, Albert W.. System and method for controlling vehicle suspension components and vehicle occupant protection devices. USP2005056889128.
  182. Silverbrook, Kia. System for creating garments using camera and encoded card. USP2012018102568.
  183. Lutz,Markus; Partridge,Aaron. Temperature compensation for silicon MEMS resonator. USP2006077071793.
  184. Lutz,Markus; Partridge,Aaron. Temperature compensation for silicon MEMS resonator. USP2007047202761.
  185. Lutz,Markus; Partridge,Aaron. Temperature compensation for silicon MEMS resonator. USP2006016987432.
  186. Lutz,Markus; Partridge,Aaron. Temperature controlled MEMS resonator and method for controlling resonator frequency. USP2007097268646.
  187. Lutz,Markus; Partridge,Aaron. Temperature controlled MEMS resonator and method for controlling resonator frequency. USP2006067068125.
  188. Lutz,Markus; Partridge,Aaron. Temperature controlled MEMS resonator and method for controlling resonator frequency. USP2008097427905.
  189. Okumura,Mika; Horikawa,Makio; Satou,Kimitoshi. Thin film accelerometer. USP2009027495301.
  190. Ishibashi,Kiyoshi; Horikawa,Makio; Okumura,Mika; Aoto,Masaaki; Yoshida,Daisaku; Takakura,Hirofumi. Thin-film structure and method for manufacturing the same, and acceleration sensor and method for manufacturing the same. USP2008057371600.
  191. Mehregany, Mehran. Three-axis accelerometers and fabrication methods. USP2013028372677.
  192. Scheibner, Dirk; Makuth, Jens. Vibration measurement system. USP2011027878066.
  193. Mehner, Jan; Makuth, Jens; Scheibner, Dirk. Vibration measuring system. USP2010107819012.
  194. Partridge, Aaron; Lutz, Markus; Gupta, Pavan. Wafer encapsulated microelectromechanical structure. USP2016099434608.
  195. Partridge, Aaron; Lutz, Markus; Gupta, Pavan. Wafer encapsulated microelectromechanical structure and method of manufacturing same. USP2014108871551.

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