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특허 상세정보

Microelectromechanical accelerometer for automotive applications

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B60G-017/00   
미국특허분류(USC) 280/005.514 ; 280/006.157
출원번호 US-0568845 (1995-12-07)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Jones, Tullar & Cooper, P.C.
인용정보 피인용 횟수 : 195  인용 특허 : 44
초록

A micromechanical capacitive accelerometer is provided from a single silicon wafer. The basic structure of the micromechanical accelerometer is etched in the wafer to form a released portion in the substrate, and the released and remaining portions of the substrate are coated with metal under conditions sufficient to form a micromechanical capacitive accelerometer. The substrate is preferably etched using reactive-ion etching for at least the first etch step in the process that forms the basic structure, although in another preferred embodiment, all etch...

대표
청구항

[What is claimed is:] [1.]an accelerometer for producing a continuous output signal in response to sensed acceleration vectors, said accelerometer including at least two capacitively-coupled fingers, at least one of said fingers moves relative to another finger in response to said acceleration vectors to produce a change in capacitance, wherein at least one of said fingers is characterized by an aspect ratio greater than about 4 to 1, said fingers being fabricated from a single silicon substrate by etching the substrate at least partially by reactive ion...

이 특허에 인용된 특허 (44)

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