초록 ▼

A magnetic drive system for moving a substrate transfer shuttle along a linear path between chambers in a semiconductor fabrication apparatus. A rack with rack magnets is secured to the shuttle, and a rotatable pinion with pinion magnets is positioned adjacent the rack so that the pinion magnets can

A magnetic drive system for moving a substrate transfer shuttle along a linear path between chambers in a semiconductor fabrication apparatus. A rack with rack magnets is secured to the shuttle, and a rotatable pinion with pinion magnets is positioned adjacent the rack so that the pinion magnets can magnetically engage the rack magnets. Thus, rotation of the pinion will cause the shuttle to move along the linear path. The magnets may be oriented with a helix angle between their primary axis and the axis of rotation of the pinion. One rack and one pinion are located on each side of the shuttle. A set of lower guide rollers supports the shuttle, and a set of upper guide rollers prevents the shuttle from lifting off the lower guide rollers.

대표청구항 ▼

[What is claimed is:] [1.]a first chamber;a second chamber in communication with the first chamber;a substrate support movable along a generally linear path between the first chamber and the second chamber, the substrate support including a plurality of linearly-spaced magnets;a first plurality of g

[What is claimed is:] [1.]a first chamber;a second chamber in communication with the first chamber;a substrate support movable along a generally linear path between the first chamber and the second chamber, the substrate support including a plurality of linearly-spaced magnets;a first plurality of guide rollers positioned to contact a lower portion of the substrate support;a second plurality of guide rollers positioned to contact an upper portion of the substrate support; anda rotatable pinion having a plurality of pinion magnets, wherein the pinion magnets and the linearly-spaced magnets can magnetically engage so that rotation of the pinion magnets is magnetically translated to the substrate support to move the substrate support along the linear path.