초록

Therefore, these parts are mounted on a mass flow controller as a unit and the process gas unit can be made compact and integrated as a whole.

대표청구항 ▼

[What is claimed is:] [1.]a supply valve for supplying process gas to the semiconductor manufacturing apparatus;a purge valve for supplying inert gas;a check valve disposed in a passage between an inert gas source and the purge valve;a single-piece manifold, the supply valve, the purge valve and the

[What is claimed is:] [1.]a supply valve for supplying process gas to the semiconductor manufacturing apparatus;a purge valve for supplying inert gas;a check valve disposed in a passage between an inert gas source and the purge valve;a single-piece manifold, the supply valve, the purge valve and the check valve being mounted in alignment on the single-piece manifold so that the check valve is positioned next to the purge valve;the single-piece manifold including:a process gas output passage that communicates an output port of the supply valve with an external process gas exit porta purge gas input passage that communicates an input port of the check valve with an external purge gas entry port; anda lower side block disposed under the single-piece manifold;wherein the purge gas input passage extends in an inclined direction to bypass the process gas output passage, extends within the lower side block under the process gas output passage and communicates with an upwardly opening connecting port.