초록 ▼

The present invention allows large glass substrates to be rapidly moved from one processing station to another. Such movement occurs such that drives in different chambers are synchronized to move the glass substrates on shuttles at appropriate times. In systems according to the invention, at least

The present invention allows large glass substrates to be rapidly moved from one processing station to another. Such movement occurs such that drives in different chambers are synchronized to move the glass substrates on shuttles at appropriate times. In systems according to the invention, at least a first and second chamber are provided. Typically, the first chamber is a load lock and the second chamber is a processing chamber. A substrate transfer shuttle is used to move substrate along a guide path defined by, e.g., guide rollers. Drive mechanisms are employed for most chambers to drive the shuttle along associated portions of the path. A control system is provided which powers the drive mechanism for the first chamber to drive the substrate transfer shuttle from a first position toward a second position and through an intermediate position. At the intermediate position, the substrate transfer shuttle begins to engage and induce movement of the drive mechanism for the second chamber. The control system receives an input caused by the induced movement of the drive mechanism for the second chamber, this input indicative of the substrate transfer shuttle having moved a predetermined distance beyond the intermediate position. The input may then be used to synchronize movement of the substrate transfer shuttle from the first chamber to the second chamber. Such synchronization may include reducing power to the drive mechanism for the first chamber and/or powering the drive mechanism for the second chamber.

대표청구항 ▼

[ What is claimed is:] [1.]1. An apparatus for processing a substrate, comprising:a first processing chamber;a second processing chamber in communication with the first processing chamber;a substrate transfer shuttle moveable along a shuttle path between a first position in the first chamber and a s

[ What is claimed is:] [1.]1. An apparatus for processing a substrate, comprising:a first processing chamber;a second processing chamber in communication with the first processing chamber;a substrate transfer shuttle moveable along a shuttle path between a first position in the first chamber and a second position in the second chamber to transfer a substrate between the first chamber and the second chamber;a drive mechanism isolated from the chambers and located between the first and second chambers, the drive mechanism configured to move the substrate transfer shuttle along an associated portion of a shuttle path; anda control system configured to control the drive mechanism and to power the drive mechanism to drive the substrate transfer shuttle from at least the first position to the second position.