초록 ▼

A process and an apparatus for recovering a noble gas, which can recover a noble gas exhausted from a noble gas employing system efficiently and also can supply the noble gas of a predetermined purity to the noble gas employing system and which can reduce consumption of the noble gas. In the process

A process and an apparatus for recovering a noble gas, which can recover a noble gas exhausted from a noble gas employing system efficiently and also can supply the noble gas of a predetermined purity to the noble gas employing system and which can reduce consumption of the noble gas. In the process and apparatus for recovering a noble gas, when a noble gas contained in an exhaust gas exhausted from a noble gas employing system operated under reduced pressure is recovered, switching between introduction of the exhaust gas to a recovery system and exhaustion of the exhaust gas to an exhaust system is carried out under reduced pressure, and this switching operation is carried out depending on the content of impurity components contained in the exhaust gas or on the running state of the noble gas employing system.

대표청구항 ▼

[ What is claimed is:] [1.]1. A process for recovering a noble gas, which comprises, in recovering a noble gas contained in an exhaust gas exhausted from a noble gas employing system operated under reduced pressure, carrying out an operation of switching between introduction of the exhaust gas to a

[ What is claimed is:] [1.]1. A process for recovering a noble gas, which comprises, in recovering a noble gas contained in an exhaust gas exhausted from a noble gas employing system operated under reduced pressure, carrying out an operation of switching between introduction of the exhaust gas to a recovery system and exhaustion of the exhaust gas to an exhaust system depending on the content of impurity components contained in the exhaust gas.