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Method for growing beta-silicon carbide nanorods, and preparation of patterned field-emitters by chemical vapor depositon (CVD) 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C30B-029/62
출원번호 US-0252568 (1999-02-18)
발명자 / 주소
  • Lee Shuit-tong,HKX
  • Lee Chun-Sing,HKX
  • Wang Ning,HKX
  • Bello Igor,HKX
  • Lai Carol Hau Ling,HKX
  • Zhou Xing Tai,CNX
  • Au Frederick Chi Kan,HKX
출원인 / 주소
  • City University of Hong Kong, HKX
대리인 / 주소
    Merchant & Gould P.C.
인용정보 피인용 횟수 : 68  인용 특허 : 6

초록 ▼

A method and an apparatus have been developed to grow beta-silicon carbide nanorods, and prepare patterned field-emitters using different kinds of chemical vapor deposition methods. The apparatus includes graphite powder as the carbon source, and silicon powder as silicon sources. Metal powders (Fe,

대표청구항

[ What is claimed is:] [1.]1. A method for the growth of beta-silicon carbide nanorods on a substrate by chemical vapor deposition, wherein solid carbon and solid silicon are used as the carbon and silicon sources, hydrogen is used as a reactant gas, and wherein a metal powder is used as a catalyst.

이 특허에 인용된 특허 (6)

  1. Brandes George R. ; Beetz Charles P. ; Xu Xueping ; Ramani Swayambu V. ; Besser Ronald S., Integrated circuit devices and methods employing amorphous silicon carbide resistor materials.
    상세보기
  2. Hoffman Wesley P. ; Wapner Phillip G., Microscopic tube devices and method of manufacture.
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  3. Lieber Charles M. ; Wong Eric, Preparation of carbide nanorods.
    상세보기
  4. Kaji Kichiro (Kobe JPX) Shimasaki Katsunori (Kobe JPX) Yamamoto Masakazu (Ikeda JPX) Saiki Kozo (Kobe JPX) Yura Keita (Kobe JPX) Habata Hidetsugu (Osaka JPX) Kimura Isao (Suita JPX) Suzuki Tetsuo (Ko, Process for producing silicon carbide whiskers.
    상세보기
  5. Dunmead Stephen D. (Midland MI) Weimer Alan W. (Midland MI) Carroll Daniel F. (Midland MI) Eisman Glenn A. (Midland MI) Cochran Gene A. (Midland MI) Susnitzky David W. (Midland MI) Beaman Donald R. (, Silicon nitride/silicon carbide composite powders.
    상세보기
  6. Fox Joseph R. (Solon OH) White Douglas A. (Cleveland Heights OH), VLS Fiber growth process.
    상세보기

이 특허를 인용한 특허 (68)

  1. Ando,Toshihiro; Gamo,Mika; Zhang,Yafei, 3C-SIC nanowhisker and synthesizing method and 3C-SIC nanowhisker.
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  2. Ando, Toshihiro; Gamo, Mika; Zhang, Yafei, 3C-SiC nanowhisker.
    상세보기
  3. Hatta,Akitmitsu; Yoshimura,Hiroaki; Ishimoto,Keiichi; Kanakusa,Hiroaki; Kawagoe,Shinichi, Acicular silicon crystal and process for producing the same.
    상세보기
  4. Quick, Nathaniel R.; Kar, Aravinda, Apparatus and method for increasing thermal conductivity of a substrate.
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  5. Quick, Nathaniel R., Apparatus and method for transformation of substrate.
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  6. Quick, Nathaniel R.; Kar, Aravinda, Apparatus and method of forming high crystalline quality layer.
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  7. Ledford, Jordan T.; Laszewski, Matthew R.; Malecki, Harry C., CNS-infused carbon nanomaterials and process therefor.
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  8. Shah, Tushar K.; Morber, John J., CNS-shielded wires.
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  9. Shah, Tushar K.; Malecki, Harry C.; Adcock, Daniel Jacob, CNT-based resistive heating for deicing composite structures.
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  10. Shah, Tushar K.; Malecki, Harry C., CNT-based signature control material.
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  11. Shah, Tushar K.; Alberding, Mark R.; Malecki, Harry C., CNT-infused EMI shielding composite and coating.
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  12. Shah, Tushar K.; Gardner, Slade H.; Alberding, Mark R.; Malecki, Harry C., CNT-infused carbon fiber materials and process therefor.
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  13. Shah, Tushar K.; Gardner, Slade H.; Alberding, Mark R.; Malecki, Harry C., CNT-infused carbon fiber materials and process therefor.
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  14. Shah, Tushar K.; Gardner, Slade H.; Alberding, Mark R., CNT-infused fiber and method therefor.
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  15. Shah, Tushar K.; Adcock, Daniel J.; Malecki, Harry C., CNT-infused fiber as a self shielding wire for enhanced power transmission line.
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  16. Shah, Tushar K.; Adcock, Daniel Jacob; Malecki, Harry C., CNT-infused fiber as a self shielding wire for enhanced power transmission line.
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  17. Shah, Tushar K.; Gardner, Slade H.; Alberding, Mark R.; Malecki, Harry C., CNT-infused metal fiber materials and process therefor.
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  18. Shah, Tushar K.; Gardner, Slade H.; Alberding, Mark R.; Malecki, Harry C., CNT-infused metal fiber materials and process therefor.
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  19. Shah, Tushar K.; Alberding, Mark R.; Malecki, Harry C.; Markkula, Samuel J.; Hughes, John Anthony; Kline, Shawn C., CNT-tailored composite air-based structures.
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  20. Shah, Tushar K.; Alberding, Mark R.; Malecki, Harry C.; Markkula, Samuel J.; Hughes, John Anthony; Kline, Shawn C., CNT-tailored composite sea-based structures.
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  21. Malet, Brandon K.; Shah, Tushar K., Carbon fiber substrates having carbon nanotubes grown thereon and processes for production thereof.
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  22. Won-bong Choi KR, Carbon nanotube field emission array and method for fabricating the same.
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  23. Manohara, Harish M.; Bronikowski, Michael J., Carbon nanotube high-current-density field emitters.
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  24. Shah, Tushar K.; Malecki, Harry C.; Malet, Brandon K.; Hoskins, Robert D.; Patel, Jigar M., Carbon nanotube-infused fiber materials containing parallel-aligned carbon nanotubes, methods for production thereof, and composite materials derived therefrom.
    상세보기
  25. Shah, Tushar K.; Malecki, Harry C.; Carson, Murray N., Ceramic composite materials containing carbon nanotube-infused fiber materials and methods for production thereof.
    상세보기
  26. Shah, Tushar K.; Pietras, Bradley W.; Adcock, Daniel Jacob; Malecki, Harry C.; Alberding, Mark R., Composites comprising carbon nanotubes on fiber.
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  27. Lieber, Charles M.; Hafner, Jason H.; Cheung, Chin Li; Kim, Philip, Direct growth of nanotubes, and their use in nanotweezers.
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  28. Fleischer, Corey Adam; Hetzel, Lawrence P.; Shah, Tushar K., Electrical devices containing carbon nanotube-infused fibers and methods for production thereof.
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  29. Fleischer, Corey Adam; Hetzel, Lawrence P.; Shah, Tushar K.; Floyd, Mandel Durwood; Pensero, Greogry F.; Burgess, William Patrick; Sedlak, Joseph J.; Liu, Han, Electrical devices containing carbon nanotube-infused fibers and methods for production thereof.
    상세보기
  30. Colby, Steven M., Electron source.
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  31. Quick, Nathaniel R.; Kar, Aravinda, Energy conversion device.
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  32. Hafner, Jason H.; Cheung, Chin Li; Lieber, Charles M., Fabrication of nanotube microscopy tips.
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  33. Alberding, Mark R.; Malecki, Harry C.; Shah, Tushar K.; Adcock, Daniel J., Flame-resistant composite materials and articles containing carbon nanotube-infused fiber materials.
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  34. Yang, Peidong; He, Rongrui; Goldberger, Joshua; Fan, Rong; Wu, Yiying; Li, Deyu; Majumdar, Arun, Fluidic nanotubes and devices.
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  35. Malet, Brandon K.; Shah, Tushar K., Glass substrates having carbon nanotubes grown thereon and methods for production thereof.
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  36. Shah, Tushar K.; Malecki, Harry C., Incorporation of nanoparticles in composite fibers.
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  37. Quick, Nathaniel R.; Kar, Aravinda, Laser assisted nano deposition.
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  38. Quick,Nathaniel R.; Kar,Aravinda, Laser assisted nano deposition.
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  39. Quick, Nathaniel R.; Kar, Aravinda, Laser formation of graphene.
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  40. Malecki, Harry C.; Shah, Tushar K., Low temperature CNT growth using gas-preheat method.
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  41. Malecki, Harry C.; Shah, Tushar K., Low temperature CNT growth using gas-preheat method.
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  42. Matsumoto, Takashi; Sugiura, Masahito; Koizumi, Kenjiro; Kashiwagi, Yusaku, Method for forming carbon nanotubes and carbon nanotube film forming apparatus.
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  44. Greulich-Weber, Siegmund; Friedel, Bettina, Method for producing an object at least partly with a silicon carbide structure from a blank of a carbon-containing material.
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  45. Quick, Nathaniel R.; Kar, Aravinda; Li, Yonggang; McNeice, Raymond R., Method of drawing a ceramic.
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  46. Quick,Nathaniel R.; Kar,Aravinda; Li,Yonggang; McNeice,Raymond R., Method of drawing a composite wire.
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  47. Lee,Sang Hyun; Jeong,Tae Won; Huh,Jeong Na, Method of manufacturing nano-wire.
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  48. Schlaf, Rudiger; Ren, Zhifeng F.; Wen, Jianguo; Carnahan, David L., Method of producing a branched carbon nanotube for use with an atomic force microscope.
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  49. Schlaf, Rudiger, Method of producing an integrated circuit with a carbon nanotube.
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  50. Quick, Nathaniel R.; Kar, Aravinda; Salama, Islam A., Optical device and method of making.
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  51. Quick, Nathaniel R.; Kar, Aravinda; Salama, Islam A., Optical device and method of making.
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  52. Roscheisen,Martin R.; Sager,Brian M., Polycrystalline optoelectronic devices based on templating technique.
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  53. Quick,Nathaniel R.; Kar,Aravinda; Salama,Islam A., Process for fabricating semiconductor component.
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  54. Quick, Nathaniel R.; Kar, Aravinda, Process of making a solid state energy conversion device.
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  55. Quick, Nathaniel R; Joshi, Pooran C; Duty, Chad Edward; Jellison, Jr., Gerald Earle; Angelini, Joseph Attilio, Processing of insulators and semiconductors.
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  56. Malecki, Harry C.; Gaigler, Randy L.; Fleischer, Corey A.; Liu, Han; Malet, Brandon K.; Markkula, Samuel J., Resistance measurement system and method of using the same.
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  57. Yang,Peidong; He,Rongrui; Goldberger,Joshua; Fan,Rong; Wu,Yi Ying; Li,Deyu; Majumdar,Arun, Sacrificial template method of fabricating a nanotube.
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  58. Quick, Nathaniel R.; Kar, Aravinda, Solid state energy conversion device.
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  59. Quick, Nathaniel R.; Kar, Aravinda, Solid state energy photovoltaic device.
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  60. Quick, Nathaniel R.; Kar, Aravinda, Solid state gas dissociating device, solid state sensor, and solid state transformer.
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  61. Fleischer, Corey Adam; Shah, Tushar K.; Hetzel, Lawrence P.; Malecki, Harry C., Spiral wound electrical devices containing carbon nanotube-infused electrode materials and methods and apparatuses for production thereof.
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  62. Fleischer, Corey Adam, Structural energy storage assemblies and methods for production thereof.
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  63. Fleischer, Corey Adam, Structural energy storage assemblies and methods for production thereof.
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  64. Zhao, Yiping; Fan, Jianguo, Structures having aligned nanorods and methods of making.
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  65. Malecki, Harry C.; Alberding, Mark R.; Malet, Brandon K.; Shah, Tushar K., System and method for surface treatment and barrier coating of fibers for in situ CNT growth.
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  66. Quick, Nathaniel R; Murray, Michael C, Thermal doping of materials.
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  67. Zhao, Yiping; Abell, Justin L.; Chen, Jing, Thin layer chromatography-surfaced enhanced Raman spectroscopy chips and methods of use.
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  68. Quick, Nathaniel R; Murray, Michael C, Ultra-high pressure doping of materials.
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