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Method for bonding single crystal membranes to a curved surface

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/58
출원번호 US-0195169 (1998-11-17)
발명자 / 주소
  • Gorelik Vladimir A.
대리인 / 주소
    Thomas, Kayden, Horstemeyer & Risley
인용정보 피인용 횟수 : 15  인용 특허 : 21

초록

In accordance with the present invention, a preferred method for bonding a single crystal membrane to a supporting structure having a curved surface includes the steps of segmenting a unitary wafer of a single crystal, for example semiconductor material, into a plurality of semi-attached wafer segme

대표청구항

[ What is claimed is:] [1.]1. A method of fabricating a semiconductor element assembly comprising the steps of:segmenting a unitary wafer of semiconductor material into a plurality of semi-attached wafer segments, each of said serni-attached wafer segments being attached by a wafer bridge to an adja

이 특허에 인용된 특허 (21)

  1. Macomber Steven H. (Bethel CT) Mott Jeffrey S. (Shenorock NY), Apparatus and method for fabricating a chirped grating in a surface emitting distributed feedback semiconductor laser di.
  2. Mittal, Faquir C.; Solis, Charles R., Apparatus for use in cooling integrated circuit chips.
  3. Block Timothy R. (Rochester MN) Lu Tong (Rochester MN), Bidirectional free-space optical bus for electronics systems.
  4. Cathey Wade Thomas (359 Pinebrook Hills Boulder CO 80302) Smith Burton Jordon (1557 S. Dexter Way Denver CO 80222), Data communication system using light coupled interfaces.
  5. Lee Sukhan (4913 Revlon Dr. La Canada CA 91011), Distributed proximity sensor system having embedded light emitters and detectors.
  6. Altoz Frank E. (Catonsville MD), Flexible diaphragm cooling device for microwave antennas.
  7. Higgins David M. (346 Palouse Walla Walla WA 99362), Geometrically-integrated architecture of microcircuits for high-speed computers.
  8. Jannson Tomasz P. (Redondo Beach CA) Jannson Joanna L. (Redondo Beach CA) Yeung Peter C. (Redondo Beach CA), Holographic planar optical interconnect.
  9. Cray ; Jr. Seymour R. (Chippewa Falls WI), Immersion cooled high density electronic assembly.
  10. Mori Kei (3-16-3-501 Kaminoge ; Setagaya-ku ; Tokyo JPX), Integrated construction of a large number of optical conductor cables.
  11. Corfield Kenneth G. (Hampstead GB2) Heeks John S. (Harlow GB2), Interconnecting integrated circuits.
  12. Lloyd O. H. Perry (310 B San Jose Ave. Capitola CA 95010), Method and apparatus for interfacing of holographic and electronic data.
  13. Comberg Albert (Aachen DEX), Optical printer.
  14. Oka Syotaro (Muko JPX) Kiri Motosada (Kyoto JPX) Nakanishi Takeshi (Kyoto JPX) Shibata Kenji (Kyoto JPX), Radiation image detecting apparatus with IC modules stacked stepwise.
  15. Gorelik Vladimir (Savannah GA), Semiconductor architecture and application thereof.
  16. Gorelik Vladimir (Savannah GA), Semiconductor architecture and application thereof.
  17. Block Timothy R. (Rochester MN) Soderstrom Ronald L. (Rochester MN) Heiling Gerald M. (Pine Island MN) Rocca Charles J. (Rochester MN), Serial optical interconnect bus for logic cards and the like.
  18. Gaebe Carl F. (Fleetwood PA) Yeh Xian-Li (Macungie Township ; Lehigh County both of PA), Silicon-based optical subassembly.
  19. Broockman Eric C. (Raleigh NC) Cato Robert T. (Raleigh NC) Lynch Robert C. (Cary NC), Terminal device having closed chamber communications between functional units.
  20. Iversen Arthur H. (15315 Sobey Rd. Saratoga CA 95070), Thermal management of power conditioning systems.
  21. Parks Howard L. (Los Gatos CA), Three-dimensional microelectronic package for semiconductor chips.

이 특허를 인용한 특허 (15)

  1. Nesbitt, Bruce, Anti-microbial electrosurgical electrode and method of manufacturing same.
  2. Nesbitt,Bruce, Anti-microbial electrosurgical electrode and method of manufacturing same.
  3. Nesbitt,Bruce, Anti-microbial electrosurgical electrode and method of manufacturing same.
  4. Nesbitt,Bruce, Anti-microbial electrosurgical electrode and method of manufacturing the same.
  5. Nesbitt,Bruce, Coating reinforcing underlayment and method of manufacturing same.
  6. Nesbitt, Bruce, Electrosurgical electrode and method of manufacturing same.
  7. Nesbitt, Bruce, Electrosurgical electrode and method of manufacturing same.
  8. Nesbitt, Bruce, Electrosurgical electrode and method of manufacturing same.
  9. Nesbitt, Bruce, Electrosurgical electrode and method of manufacturing same.
  10. Nesbitt,Bruce, Electrosurgical electrode and method of manufacturing same.
  11. Nesbitt, Bruce, Method of forming a coating on a surface of a substrate.
  12. Nesbitt, Bruce, Method of forming a coating on a surface of a substrate.
  13. Nesbitt, Bruce, Method of forming a coating on a surface of a substrate.
  14. Kubota, Kazuyoshi; Vaccaro, Pablo O.; Aida, Tahito, Reflecting device and method of fabricating the same.
  15. Kubota, Kazuyoshi; Vaccaro, Pablo O.; Aida, Tahito, Semiconductor device having a folded layer structure.
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