초록 ▼

A wafer transfer system is described for transferring a wafer while at substantially the same time another wafer is being processed. The wafer transfer system comprises, in one embodiment, a transfer chamber having a wafer transfer blade, a load lock chamber coupled to the transfer chamber, a robot

A wafer transfer system is described for transferring a wafer while at substantially the same time another wafer is being processed. The wafer transfer system comprises, in one embodiment, a transfer chamber having a wafer transfer blade, a load lock chamber coupled to the transfer chamber, a robot for loading and unloading the wafer into the load lock chamber, and a slider coupled to the wafer transfer blade for moving the wafer transfer blade between the transfer chamber and the load lock chamber. According to a preferred embodiment, the slider utilizes a magnetic coupling mechanism.

대표청구항 ▼

[ What is claimed is:] [1.]1. A device for processing a plurality of wafers, comprising:a transfer chamber within which processing of said plurality of wafers takes place;a load lock chamber coupled to said transfer chamber;a plurality of stages located within and coupled to said transfer chamber, s

[ What is claimed is:] [1.]1. A device for processing a plurality of wafers, comprising:a transfer chamber within which processing of said plurality of wafers takes place;a load lock chamber coupled to said transfer chamber;a plurality of stages located within and coupled to said transfer chamber, said stages being disposed at a predetermined radius from a hub concentrically located within and operatively coupled to said transfer chamber, each of said plurality of stages being capable of supporting one of said plurality of wafers during processing;a transfer blade located within and operationally coupled to said transfer chamber, said transfer blade having a retracted and an extended position; in said retracted position, said transfer blade is located at said predetermined radius, in said extended position said transfer blade is in said load lock chamber, said transfer blade being capable of transferring said plurality of wafers one at a time from said load lock chamber to said transfer chamber or from said transfer chamber to said load lock chamber while others of said plurality of wafers are being processed on said plurality of stages within said transfer chamber; and,a plurality of fins having a first end and a second end, said first end of each of said fins being coupled to said hub, said second end of each of said fins being located at said predetermined radius, said fins being capable of synchronous movement about said hub, said fins further being in communication with said plurality of stages and said transfer blade such that each of said plurality of fins can transfer one of said plurality of wafers from said transfer blade to one of said plurality of stages, from one of said plurality stages to another of said plurality of stages or from one of said plurality of stages to said transfer blade.