초록 ▼

This invention provides a method by which the performance of reciprocating NMPV (No-Moving-Parts-Valve) micropumps can be optimized for a given choice of valve design, e.g. for diffuser/nozzle valves, rectifier valves etc. The method can more generally be used to design and produce NMPV micropumps w

This invention provides a method by which the performance of reciprocating NMPV (No-Moving-Parts-Valve) micropumps can be optimized for a given choice of valve design, e.g. for diffuser/nozzle valves, rectifier valves etc. The method can more generally be used to design and produce NMPV micropumps with structures optimized for maximal pump performance. The method can further be used to design and construct NMPV pumps significantly smaller in size than those currently available to the art without significant loss in pump performance.

대표청구항 ▼

[ We claim:] [1.]1. A method for making a micropump having no-moving-parts valves wherein the micropump comprises:(1) a pump cavity of a selected diameter with at least one deformable cavity diaphragm of a selected thickness and which together define a cavity volume;(2) one or more inlet valves and

[ We claim:] [1.]1. A method for making a micropump having no-moving-parts valves wherein the micropump comprises:(1) a pump cavity of a selected diameter with at least one deformable cavity diaphragm of a selected thickness and which together define a cavity volume;(2) one or more inlet valves and one or more outlet valves in fluid communication with the pump cavity, each inlet valve being a conduit with no moving parts shaped such that fluid flow in the conduit is restricted less in the direction toward the pump cavity than in the direction away from the pump cavity and each outlet valve being a conduit with no moving parts and shaped such that fluid flow in the conduit is restricted less in the direction away from the pump cavity than in the direction toward the pump cavity; and(3) an actuator with a selected diameter which actuator is attached to the deformable cavity diaphragm to periodically change the cavity volume and to thereby pump fluid from each inlet valve through the pump cavity and through each outlet valve; ch comprises the steps of:(a). selecting values for a geometric, materials, or other input parameter selected from the group consisting of valve geometry, pump cavity etch depth, diaphragm area, bubble volume, diaphragm diameter, diaphragm thickness, diaphragm density, diaphragm modulus of elasticity, Poisson's ratio of the diaphragm, thickness of the actuator, diameter of the actuator, density of the actuator, modulus of elasticity of the actuator, and Poisson's ratio of the actuator;(b). calculating a first value of a pump performance parameter selected from the group consisting of pump cavity fluid pressure, diaphragm centerline deflection, the diaphragm swept volume flow rate, outlet volume flow rate and net volume flow rate using a linear systems model employing the selected input parameter values;(c). varying the value of one or more of the input parameters;(d). calculating the value of the selected pump performance parameter as a function of the varying input parameter or parameters;(e). comparing the performance parameter calculated as a function of the varying input parameter or parameters to the first calculated value of the performance parameter to determine the values of the input parameter or parameters that result in optimized pump performance; and(f). employing the values of the input parameter or parameters obtained in step (e) to make the micropump.