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Process for producing micro-heat exchangers 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B21D-053/04
출원번호 US-0142303 (1998-09-03)
우선권정보 DE9608824 (1996-03-07)
국제출원번호 PCT/EP97/00840 (1997-02-21)
§371/§102 date 19980903 (19980903)
국제공개번호 WO-9732687 (1997-09-12)
발명자 / 주소
  • Ehrfeld Wolfgang,DEX
  • Weber Lutz,DEX
  • Richter Thomas,DEX
  • Michel Frank,DEX
출원인 / 주소
  • Institut Fur Mikrotechnik Mainz GmbH, DEX
대리인 / 주소
    Hudak & Shunk Co., L.P.A.
인용정보 피인용 횟수 : 47  인용 특허 : 14

초록

A method for fabrication of micro heat exchangers, which enable an efficient heat transfer between two flowing media. In a first processing step, a plastic layer is structurized by means of photolithography, x-ray deep lithography, or laser ablation. This plastic structure is galvanically molded in

대표청구항

[ What is claimed is:] [1.]1. A method for fabrication of heat exchangers, in which individual metal layers have structured surfaces and the structured metal layers are stacked and joined together to form a microstructure body with channel like passageways comprising the steps of:a) incorporating a

이 특허에 인용된 특허 (14)

  1. Godshalk Kimberly M. (Beaverton OR) Murdock Bruce (Beaverton OR), Application of micromechanical machining to cooling of integrated circuits.
  2. Pringle William L. (Grosse Pointe Shores MI), Heat exchanger.
  3. Nikolai Zoubkov,RUX ; Alexander Ovtchinnikov,RUX, Method and apparatus of producing a surface with alternating ridges and depressions.
  4. Corbin Antoine,FRX ; Demoncy Philippe,FRX ; Foulu Jacques,FRX ; Sudraud Pierre,FRX, Method for depositing metal fine lines on a substrate.
  5. Little William A. (Palo Alto CA), Micro miniature refrigerators.
  6. Barlow Joel W. (Austin TX) Badrinarayan Balasubramanian (Austin TX) Beaman Joseph J. (Austin TX) Bourell David L. (Austin TX) Crawford Richard H. (Austin TX) Marcus Harris L. (Austin TX) Tobin James , Mold useful for injection molding of plastics, and methods of production and uses thereof.
  7. Baumgartner Charles E. (Niskayona NY) Hamly Katherine D. (Clifton Park NY), Molding thermoplastic materials for producing textured articles.
  8. Kagawa Seiji (Kawaguchi JPX) Kagawa Yoichiro (Kawaguchi JPX), Porous film manufacturing apparatus.
  9. Dinglreiter Heinz (Forst DEX) Kalb Helmut (Eggenstein-Leo. DEX) Rapp Richard (Stutensee DEX), Process for galvanically forming structured plate-shaped bodies.
  10. Schubert Klaus (Karlsruhe DEX) Bier Wilhelm (Eggenstein-Leopoldshafen DEX) Linder Gerd (Karlsruhe DEX) Schmid Peter (Munich DEX) Bichler Peter (Schondorf DEX) Brunner Winfried (Unterhaching DEX) Simo, Process for manufacturing finely structured bodies such as heat exchangers.
  11. Bier Wilhelm (Egg-Leopoldshafen DEX) Maner Asim (Linkenheim DEX) Schubert Klaus (Karslruhe DEX), Process for producing a two-dimensionally extending metallic microstructure body with a multitude of minute openings and.
  12. Lessmllmann Christoph (Gernsbach DEX) Eicher Joachim (Karlsruhe DEX) Reinecke Holger (Dortmund DEX), Process for producing microstructure metallic elements.
  13. Bacher Walter,DEX ; Bley Peter,DEX ; Harmening Michael,DEX, Process of making a microstructured plastic mold.
  14. Inoue Kiyoshi (Tokyo JPX), Traveling-wire EDM method and apparatus with a cooled machining fluid.

이 특허를 인용한 특허 (47)

  1. Dessiatoun, Serguei V., Compact heat exchanging device based on microfabricated heat transfer surfaces.
  2. Appleby,Michael; Fraser,Iain; Atkinson,James E., Devices, methods, and systems involving castings.
  3. Tonkovich, Anna Lee; Simmons, Wayne W.; Silva, Laura J.; Qiu, Dongming; Perry, Steven T.; Yuschak, Thomas; Hickey, Thomas P.; Arora, Ravi; Smith, Amanda; Litt, Robert Dwayne; Neagle, Paul, Distillation process using microchannel technology.
  4. Tonkovich,Anna Lee; Simmons,Wayne W.; Silva,Laura J.; Qiu,Dongming; Perry,Steven T.; Yuschak,Thomas, Distillation process using microchannel technology.
  5. Viswanathan, Lakshminarayan; Molla, Jaynal A., Electronic devices with semiconductor die attached with sintered metallic layers, and methods of formation of such devices.
  6. LeViness, Stephen Claude; Daly, Francis; Richard, Laura Amanda; Rugmini, Sreekala, Fischer-Tropsch process.
  7. LeViness, Stephen Claude; Daly, Francis; Richard, Laura; Rugmini, Sreekala, Fischer-Tropsch process.
  8. Wang, Yong; Tonkovich, Anna Lee; Mazanec, Terry; Daly, Francis P.; VanderWiel, Dave; Hu, Jianli; Cao, Chunshe; Kibby, Charles; Li, Xiaohong Shari; Briscoe, Michael D.; Gano, Nathan; Chin, Ya-Huei, Fischer-Tropsch synthesis using microchannel technology and novel catalyst and microchannel reactor.
  9. Wang, Yong; Tonkovich, Anna Lee; Mazanec, Terry; Daly, Francis P.; VanderWiel, Dave; Hu, Jianli; Cao, Chunshe; Kibby, Charles; Li, Xiaohong; Briscoe, Michael D.; Gano, Nathan; Chin, Ya-Huei, Fischer-Tropsch synthesis using microchannel technology and novel catalyst and microchannel reactor.
  10. Wang, Yong; Tonkovich, Anna Lee; Mazanec, Terry; Daly, Francis P.; VanderWiel, Dave; Hu, Jianli; Cao, Chunshe; Kibby, Charles; Li, Xiaohong; Briscoe, Michael D.; Gano, Nathan; Chin, Ya-Huei, Fischer-tropsch synthesis using microchannel technology and novel catalyst and microchannel reactor.
  11. Wang,Yong; Tonkovich,Anna Lee; Mazanec,Terry; Daly,Francis P.; VanderWiel,Dave; Hu,Jianli; Cao,Chunshe; Kibby,Charles; Li,Xiaohong Shari; Briscoe,Michael D.; Gano,Nathan; Chin,Ya Huei, Fischer-tropsch synthesis using microchannel technology and novel catalyst and microchannel reactor.
  12. Price, Andrew R.; Kaina, Rachid; Garnett, Mark C., Method and structure for optimizing heat exchanger performance.
  13. Appleby, Michael P.; Fraser, Iain; Atkinson, James E., Methods for manufacturing three-dimensional devices and devices created thereby.
  14. Appleby, Michael P.; Fraser, Iain; Atkinson, James E., Methods for manufacturing three-dimensional devices and devices created thereby.
  15. Appleby, Michael P.; Fraser, Iain; Atkinson, James E., Methods for manufacturing three-dimensional devices and devices created thereby.
  16. Appleby,Michael P.; Fraser,Iain; Atkinson,James E., Methods for manufacturing three-dimensional devices and devices created thereby.
  17. Moon, Dong Ju; Lee, Sang Deuk; Yim, Hyoung Shick; Kang, Jung Shik; Park, MoonJu; Hur, Eun; Cho, Su Hyun; Lee, Byung Gwon, Micro-macro channel reactor.
  18. Wang, Yong; Tonkovich, Anna Lee; Mazanec, Terry; Daly, Francis P.; VanderWiel, Dave; Hu, Jianli; Cao, Chunshe; Kibby, Charles; Li, Xiaohong Shari; Briscoe, Michael D.; Gano, Nathan; Chin, Ya-Huei, Microchannel reactor.
  19. Tonkovich, Anna Lee; Qiu, Dongming; Long, Richard Q.; Yang, Barry L.; Yuschak, Thomas; Perry, Steven T., Microchannel with internal fin support for catalyst or sorption medium.
  20. Tonkovich,Anna Lee; Qiu,Dongming; Long,Richard Q.; Yang,Barry L.; Yuschak,Thomas; Perry,Steven T., Microchannel with internal fin support for catalyst or sorption medium.
  21. Mathias, James A.; Chadwell, G. Bradley; Qiu, Dongming; Tonkovich, Annalee Y.; Perry, Steven T.; Schmidt, Matthew B.; Fitzgerald, Sean P.; Hesse, David J.; Yuschak, Thomas D.; Yang, Bin, Multi-stream microchannel device.
  22. Mathias,James Allen; Chadwell,G. Bradley; Qiu,Dongming; Tonkovich,Anna Lee Y.; Perry,Steven T.; Schmidt,Matthew B., Multi-stream microchannel device.
  23. Mathias, James A.; Chadwell, G. Bradley; Qui, Dongming; Tonkovich, Anna Lee Y.; Perry, Steven T.; Schmidt, Matthew B.; Fitzgerald, Sean P.; Hesse, David J.; Yuschak, Thomas D.; Yang, Bin, Multi-stream multi-channel process and apparatus.
  24. Tonkovich, Anna Lee; Silva, Laura J.; Hesse, David John; Marchiando, Michael Alan; Lamont, Michael Jay; Qiu, Dongming; Dritz, Terence Andrew; Pagnotto, Kristina M.; Stevenson, Richard; Perry, Steven T.; Fanelli, Maddalena; Arora, Ravi; Yang, Bin; Fitzgerald, Sean Patrick; Sullivan, Timothy J.; Jarosch, Kai Tod Paul; Yuschak, Thomas, Multiphase mixing process using microchannel process technology.
  25. Tonkovich, Anna Lee; Silva, Laura J.; Hesse, David John; Marchiando, Michael Alan; Lamont, Micheal Jay; Qiu, Dongming; Dritz, Terence Andrew; Pagnotto, Kristina M.; Stevenson, Richard; Perry, Steven T.; Fanelli, Maddalena; Arora, Ravi; Yang, Bin; Fitzgerald, Sean Patrick; Sullivan, Timothy J.; Jarosch, Kai Tod Paul; Yuschak, Thomas, Multiphase mixing process using microchannel process technology.
  26. Tonkovich, Anna Lee; Hesse, David John; Neagle, Paul; Lamont, Micheal Jay; Daly, Francis P.; Jarosch, Kai Tod Paul; Stevenson, Richard; Silva, Laura J., Multiphase reaction process using microchannel technology.
  27. Long,Richard Q.; Tonkovich,Anna Lee; Daymo,Eric; Yang,Barry L.; Wang,Yong; Daly,Francis P., Oxidation process using microchannel technology and novel catalyst useful in same.
  28. Wand,Steven Michael; Emery,Brian James; Bogart,James Eric, Plate heat exchanger with enhanced surface features.
  29. Tonkovich, Anna Lee; Simmons, Wayne W.; Jarosch, Kai Tod Paul; Mazanec, Terry; Daymo, Eric; Peng, Ying; Marco, Jennifer Lynne, Process for conducting an equilibrium limited chemical reaction in a single stage process channel.
  30. Tonkovich,Anna Lee; Simmons,Wayne W.; Jarosch,Kai Tod Paul; Mazanec,Terry; Daymo,Eric; Peng,Ying; Marco,Jennifer Lynne, Process for conducting an equilibrium limited chemical reaction in a single stage process channel.
  31. Tonkovich, Anna Lee; Jarosch, Kai Tod Paul; Mazanec, Terry; Daly, Francis P.; Taha, Rachid; Aceves de Alba, Enrique, Process for conducting an equilibrium limited chemical reaction using microchannel technology.
  32. Brophy, John H.; Pesa, Frederick A.; Tonkovich, Anna Lee; McDaniel, Jeffrey S.; Jarosch, Kai Tod Paul, Process for converting a hydrocarbon to an oxygenate or a nitrile.
  33. Brophy,John H.; Pesa,Frederick A.; Tonkovich,Anna Lee; McDaniel,Jeffrey S.; Jarosch,Kai Tod Paul, Process for converting a hydrocarbon to an oxygenate or a nitrile.
  34. Mazanec, Terry; Tonkovich, Anna Lee; Simmons, Wayne W.; Daly, Francis P.; Long, Richard Q.; Silva, Laura J., Process for converting ethylene to ethylene oxide using microchannel process technology.
  35. Mathias,James A.; Arora,Ravi; Simmons,Wayne W.; McDaniel,Jeffrey S.; Tonkovich,Anna Lee; Krause,William A.; Silva,Laura J.; Qiu,Dongming, Process for cooling a product in a heat exchanger employing microchannels.
  36. Mathias, James A.; Arora, Ravi; Simmons, Wayne W.; McDaniel, Jeffrey S.; Tonkovich, Anna Lee; Krause, William A.; Silva, Laura J., Process for cooling a product in a heat exchanger employing microchannels for the flow of refrigerant and product.
  37. Qiu,Dongming; Tonkovich,Anna Lee; Silva,Laura J.; Long,Richard Q.; Yang,Barry L.; Trenkamp,Kristina Marie; Freeman,Jennifer Anne, Process for forming an emulsion using microchannel process technology.
  38. Qiu,Dongming; Tonkovich,Anna Lee; Silva,Laura; Long,Richard Q.; Yang,Barry L.; Trenkamp,Kristina Marie, Process for forming an emulsion using microchannel process technology.
  39. Tonkovich,Anna Lee; Jarosch,Kai Tod Paul; Hesse,David John, Process for producing hydrogen peroxide using microchannel technology.
  40. Tonkovich, Anna Lee; Qiu, Dongming; Long, Richard Q.; Yang, Barry L.; Yuschak, Thomas; Perry, Steven T., Process of conducting reactions or separation in a microchannel with internal fin support for catalyst or sorption medium.
  41. Tonkovich, Anna Lee; Perry, Steven T.; LaPlante, Timothy J.; Jarosch, Kai Tod Paul; Hickey, Thomas P.; Fitzgerald, Sean Patrick; Qiu, Dongming; Arora, Ravi; Sullivan, Timothy J.; Neagle, Paul, Process using microchannel technology for conducting alkylation or acylation reaction.
  42. Tonkovich,Anna Lee; Perry,Steven T.; Arora,Ravi; Qiu,Dongming; Lamont,Michael Jay; Burwell,Deanna; Dritz,Terence Andrew; McDaniel,Jeffrey S.; Rogers, Jr.,William A.; Silva,Laura J.; Weidert,Daniel J.; Simmons,Wayne W.; Chadwell,G. Bradley, Separation process using microchannel technology.
  43. Tonkovich, Anna Lee; Jarosch, Kai Tod Paul; Marco, Jeffrey D.; Yang, Bin; Fitzgerald, Sean Patrick; Perry, Steven T.; Yuschak, Thomas; Daly, Francis P.; Chen, Haibiao, Support for use in microchannel processing.
  44. Appleby, Michael P.; Randolph, William T.; Klinger, Jill E., Systems for large area micro mechanical systems.
  45. Appleby, Michael P.; Fraser, Iain; Paulus, John, Systems, devices, and/or methods for manufacturing castings.
  46. Appleby, Michael; Fraser, Iain; Paulus, John, Systems, devices, and/or methods for manufacturing castings.
  47. Appleby, Michael; Paulus, John; Fraser, Iain; Klinger, Jill; Heneveld, Benjamin, Systems, devices, and/or methods for producing holes.
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