초록 ▼

An embodiment of the instant invention is an optical illumination system for illuminating the mask of an exposure apparatus for transferring the image of the pattern on the mask onto the semiconductor wafer, the optical illumination system comprising: illumination means (illumination means 45 of FIG

An embodiment of the instant invention is an optical illumination system for illuminating the mask of an exposure apparatus for transferring the image of the pattern on the mask onto the semiconductor wafer, the optical illumination system comprising: illumination means (illumination means 45 of FIG. 3) comprised of a plurality of light sources for emitting light beams along beam paths; and a lens system (lenses 55 and 57 of FIG. 3) for focusing the light beams to the wafer, the lens system comprising at least one lens element positioned in the beams paths. Preferably, the light sources are individually addressable point like sources, and the optical illumination system further comprising a light control means for operating each of the light sources independently of the others. The plurality of light sources is, preferably, comprised of a matrix addressable array of electro-optic modulators (preferably comprised of LCD modulators); an array of semiconductor lasers (preferably an array of Vertical Cavity Surface Emitting Lasers); or an array of bonded edge emitting DFB lasers.

대표청구항 ▼

[ We claim:] [1.]1. An optical illuminating system for transferring a pattern on a mask onto a wafer, said optical illumination system comprising:a plurality of controllable light sources, each said light source capable of emitting an individual light beam along a beam path to provide a light beam a

[ We claim:] [1.]1. An optical illuminating system for transferring a pattern on a mask onto a wafer, said optical illumination system comprising:a plurality of controllable light sources, each said light source capable of emitting an individual light beam along a beam path to provide a light beam along said beam path which is a composite of the light beams from said light sources which are emitting light at any instant in time and has a shape determined by the light beam from each of said plurality of light sources;a controller coupled to each of said light sources, said controller independently controlling the light output of each of said light sources relative to the other of said light sources to control the shape of said composite light beam emanating from said light sources; anda lens system for directing said composite light beam to said mask, said lens system comprising at least one lens element positioned in the paths of all of said individual light beams.