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Semiconductor crystallization on composite polymer substrates 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-029/78
  • H01L-033/00
출원번호 US-0227467 (1999-01-08)
발명자 / 주소
  • Walpita Lakshaman Mahinda
대리인 / 주소
    Botjer
인용정보 피인용 횟수 : 140  인용 특허 : 8

초록

A structure and methodology for providing electronic devices comprised of semiconductor materials deposited and crystallized using a pulsed laser source on oxide and/or metal layers on polymeric and polymer composite substrates of low coefficient of thermal expansion (CTE). The present invention per

대표청구항

[ What is claimed is:] [1.]1. A structure for a semiconductor device comprising:a) a polymer substrate including a particulate filler for reducing the CTE of the polymer to less than 40 ppm/.degree. C.;b) a first buffer layer disposed atop the substrate, said buffer layer having a thickness of less

이 특허에 인용된 특허 (8)

  1. Horn ; III Allen F. (Danielson CT) Bush Robert L. (Phoenix AZ) St. Lawrence Michael E. (Thompson CT), Ceramic filled composite polymeric electrical substrate material exhibiting high dielectric constant and low thermal coe.
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  8. Kaschmitter James L. (Pleasanton CA), Three dimensional amorphous silicon/microcrystalline silicon solar cells.

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