초록

A method for producing topographic projections, especially useful for producing many small projections of less than about 100 .mu.m in diameter and in height. This method is useful for making contact pads of membrane probes used to test integrated circuits and spacers of liquid crystal light valves.

대표청구항 ▼

[ We claim:] [1.]1. A method for making projections from a layer of photodefinable material overlaying a sublayer, wherein the method allows the formation of a number of small, well defined projections of less than about 100 .mu.m in diameter and in height, said projection being of a desired pattern

[ We claim:] [1.]1. A method for making projections from a layer of photodefinable material overlaying a sublayer, wherein the method allows the formation of a number of small, well defined projections of less than about 100 .mu.m in diameter and in height, said projection being of a desired pattern on the sublayer, said method comprising the steps of:masking the photodefinable material to delineate areas from which the projections will be formed;exposing the unmasked areas of photodefinable material to radiation, whereby the irradiated areas of the photodefinable material become resistant to removal; andremoving the nonirradiated areas of the photodefinable material to leave the irradiated areas as projections, each one of said projections having a height proportionately greater than its diameter and said projections being comprised of a substance which has the same coefficient of expansion as the sublayer.