초록 ▼

A microelectromechanical (MEMS) device is provided that includes a microelectronic substrate and a thermally actuated microactuator and associated components disposed on the substrate and formed as a unitary structure from a single crystalline material, wherein the associated components arc actuated

A microelectromechanical (MEMS) device is provided that includes a microelectronic substrate and a thermally actuated microactuator and associated components disposed on the substrate and formed as a unitary structure from a single crystalline material, wherein the associated components arc actuated by the microactuator upon thermal actuation thereof. For example, the MEMS device may be a valve. As such, the valve may include at least one valve plate that is controllably brought into engagement with at least one valve opening in the microelectronic substrate by selective actuation of the microactuator. While the MEMS device can include various microactuators, the microactuator advantageously includes a pair of spaced apart supports disposed on the substrate and at least one arched beam extending therebetween. By heating the at least one arched beam of the microactuator, the arched beams will further arch such that the microactuator moves between a closed position in which the valve plate sealingly engages the valve opening and an open position in which the valve plate is at least partly disengaged from and does not seal the valve opening. The microactuator may further include metallization traces on distal portions of the arched beams to constrain the thermally actuated regions of arched beams to medial portions thereof. The valve may also include a latch for maintaining the valve plate in a desired position without requiring continuous energy input to the microactuator. An advantageous method for fabricating a MEMS valve having unitary structure single crystalline components is also provided.

대표청구항 ▼

[ What is claimed is:] [1.]1. A microactuator comprising:a microelectronic substrate;spaced apart supports disposed upon said microelectronic substrate;at least one arched beam comprising a semiconductor material and extending between said spaced apart supports, the arched beam having opposed distal

[ What is claimed is:] [1.]1. A microactuator comprising:a microelectronic substrate;spaced apart supports disposed upon said microelectronic substrate;at least one arched beam comprising a semiconductor material and extending between said spaced apart supports, the arched beam having opposed distal portions proximate the respective supports and an arched medial portion extending between the distal portions; anda metal layer disposed on the distal portions of said at least one arched beam, wherein the arched medial portion of the arched beam is substantially free of said metal layer such that an electrical current passing between said supports preferentially heats the arched medial portion of the arched beam and causes further arching of the arched medial portion of the arched beam.