초록 ▼

A microactuator array device, which includes a plurality of generally parallel thin flexible polymer sheets bonded together in a predetermined pattern to form an array of unit cells on at least one layer. Thin conductive and dielectric films are deposited on the sheets to form a plurality of electro

A microactuator array device, which includes a plurality of generally parallel thin flexible polymer sheets bonded together in a predetermined pattern to form an array of unit cells on at least one layer. Thin conductive and dielectric films are deposited on the sheets to form a plurality of electrodes associated with the array of unit cells. A source of electric potential operably connects the electrodes, whereby electrostatic forces are generated most intensely proximate the point where the gap between the sheets is smallest. Inlets and outlets for each cell permit displacement of fluid during generation of the electrostatic forces. In a preferred embodiment, the plurality of sheets forms a stack of layers of arrays of unit cells. The layers are configured such that bi-directional activation is caused by pairs of actuators working opposite each other. At least one of every pair of the sheets may be preformed into corrugations or into flaps to provide a predetermined mechanical bias between the pairs, or the sheets may form curved portions by an applied load to provide a displacement between the pairs. The sheets are preferably from about 1 .mu.m to about 100 .mu.m thick and the cells preferably have an individual displacement of from about 5 .mu.m to about 200 .mu.m.

대표청구항 ▼

[ What is claimed is:] [1.]1. A method of forming a microactuator array device, comprising the steps of:depositing thin conductive and dielectric films on a plurality of sheets to locate and pattern a plurality of electrodes associated with an array of unit cells;operably connecting a source of elec

[ What is claimed is:] [1.]1. A method of forming a microactuator array device, comprising the steps of:depositing thin conductive and dielectric films on a plurality of sheets to locate and pattern a plurality of electrodes associated with an array of unit cells;operably connecting a source of electric potential to said electrodes such that adjacent layers of electrodes are biased with respect to each other to form actuators, whereby electrostatic forces are generated most intensely proximate the point where the gap between said sheets is smallest; andbonding a plurality of generally parallel thin flexible polymer sheets together in a predetermined pattern to form an array of unit cells on at least one layer;connecting inlets and outlets for each cell to permit displacement of fluid during generation of said electrostatic forces.