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Cryogenic vacuum pump temperature sensor

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B01D-008/00
출원번호 US-0382309 (1999-08-24)
발명자 / 주소
  • Muldowney Francis
  • Schall Eric Regis
출원인 / 주소
  • Lucent Technologies, Inc.
대리인 / 주소
    Duane Morris & Heckscher LLPKoffs
인용정보 피인용 횟수 : 15  인용 특허 : 21

초록

An assembly includes a temperature sensor having an operating range that includes a normal operating temperature of a cryogenic vacuum pump and a temperature of the pump following a dump. The assembly may be included in a semiconductor processing apparatus for performing an implant operation on a wa

대표청구항

[ What is claimed is:] [1.]1. An assembly comprising:a cryogenic vacuum pump:a temperature sensor having an operating range that includes a normal operating temperature of the cryogenic vacuum pump and a temperature of the pump following a dump; anda mounting bracket capable of mounting the temperat

이 특허에 인용된 특허 (21)

  1. Goff John G. (941 Fariston Dr. Drexel Hill PA 19026) Johnson ; Jr. George W. (2 Cambridge Rd. Downingtown PA 19335), Apparatus including distance sensors mounted on rotating shaft for measuring distances inside a turbine.
  2. Kishorenath Huruli D. (San Jose CA) de Rijke Johan E. (Cupertino CA) Foreman Mark O. (Stockton CA), Cryogenic vacuum pump with expander speed control.
  3. Noji Nobuharu (Kanagawa-ken JPX) Hayakawa Junichi (Kanagawa-ken JPX) Sato Motoyasu (Saitama-ken JPX) Aono Hiroshi (Kanagawa-ken JPX) Komai Tetsuo (Kanagawa-ken JPX), Cryopump.
  4. Hfner Hans-Ulrich (Kln DEX) Mundinger Hans-Jrgen (Brhl DEX) Flick Gerd (Brhl DEX) Forth Hans-Joachim (Kln DEX) Klein Hans-Hermann (Friedberg DEX) Timm Uwe (Frankfurt DEX), Cryopump and process for regenerating said cryopump.
  5. Andeen Bruce R. (Acton MA) Pandorf Robert C. (Newton Highlands MA), Cryopump regeneration method and apparatus.
  6. Bchler Werner (Rsrath DEX) Forth Hans-Joachim (Cologne DEX) Klein Hans-Hermann (Rsrath DEX) Strasser Wilhelm (Bergisch Gladbach DEX), Cryopump, and a method for the operation thereof.
  7. Gaudet Peter W. (Chelmsford MA) Olsen Donald A. (Millis MA) Bender Steven A. (Liverpool NY), Electronic process controller having password override.
  8. Gaudet Peter W. (Chelmsford MA) Olsen Donald A. (Millis MA), Electronically controlled cryopump.
  9. Gaudet Peter W. (Chelmsford MA) Olsen Donald A. (Millis MA) Eacobacci Michael J. (Randolph MA) Harvell John T. (Sudbury MA) Lepofsky Robert J. (Wellesley MA) Roche David E. (Nashua NH) Bender Steven , Electronically controlled cryopump.
  10. Gaudet Peter W. (Chelmsford MA) Olsen Donald A. (Millis MA) Eacobacci Michael J. (Randolph MA) Harvell John T. (Sudbury MA) Lepofsky Robert J. (Wellesley MA) Roche David E. (Nashua NH) Bender Steven , Electronically controlled cryopump.
  11. Haefner Hans-Ulrich (Cologne DEX) Klotz Manfred (Kahl/Main DEX) Strasser Wilhelm (Bergisch Gladbach DEX), Method and apparatus for checking the operation of a refrigerator-operated cryogenic pump.
  12. Wary John ; Olson Roger A. ; Beach William F. ; Swanson Walter, Method and apparatus for cryogenically cooling a deposition chamber.
  13. Lessard Philip A. (Boxboro MA) Dunn Thomas (Avon MA), Optimally staged cryopump.
  14. Ouellet Luc,CAX, Reactive PVD with NEG pump.
  15. Bergquist Lyle E. (Lakewood CO), Small component helium leak detector.
  16. Lessard Philip A. (Acton MA) Bartlett Allen J. (Milford MA) Peterson John F. (Lynnfield MA), Temperature control of cryogenic systems.
  17. Anderson Oscar A. (Berkeley CA), Transverse field focused system.
  18. Satoh Kazutoshi,JPX, Vacuum processing apparatus.
  19. Davis Cecil J. (Greenville TX) Matthews Robert T. (Plano TX), Wafer processing apparatus.
  20. Blake Julian G. (211 Hart St. Beverly Farms MA 01915) Tu Weilin (6 Oak St. Natick MA 01760), Wafer release method and apparatus.
  21. Blake Julian G. (Beverly Farms MA) Tu Weilin (Natick MA) Stone Dale K. (Haverhill MA) Holden Scott C. (Manchester MA), Wafer sensing and clamping monitor.

이 특허를 인용한 특허 (15)

  1. Myneni, Ganapati Rao, Alternative backing up pump for turbomolecular pumps.
  2. Ramachandran, Ajit; Sliger, Keith; Plasek, Ronald A., Compressor head, internal discriminator, external discriminator, manifold design for refrigerant recovery apparatus.
  3. Ramachandran, Ajit; Sliger, Keith; Plasek, Ronald A., Compressor head, internal discriminator, external discriminator, manifold design for refrigerant recovery apparatus and vacuum sensor.
  4. Ramachandran,Ajit; Sliger,Keith; Plasek,Ronald A., Compressor head, internal discriminator, external discriminator, manifold design for refrigerant recovery apparatus and vacuum sensor.
  5. Ramachandran,Ajit; Sliger,Keith; Plasek,Ronald A., Compressor head, internal discriminator, external discriminator, manifold design for refrigeration recovery apparatus.
  6. Ramachandran,Ajit; Sliger,Keith; Plasek,Ronald A., Compressor head, internal discriminator, external discriminator, manifold design for refrigeration recovery apparatus.
  7. Fukuda, Tsutomu, Cryopump, method of regenerating cryopump, and control device for cryopump.
  8. Amundsen, Paul E.; Buonpane, Maureen C.; Andrews, Douglas; Jacobs, Jordan, Integration of automated cryopump safety purge.
  9. Amundsen,Paul E.; Buonpane,Maureen C.; Andrews,Douglas; Jacobs,Jordan, Integration of automated cryopump safety purge.
  10. Bruce, Simon Harold, Method of operating a pumping system.
  11. Bruce, Simon Harold, Method of operating a pumping system.
  12. Bruce, Simon Harold, Pumping system and method of operation.
  13. Borichevsky, Steven C., Semiconductor process pumping arrangements.
  14. Ramachandran,Ajit; Sliger,Keith; Plasek,Ronald A., Vacuum sensor.
  15. Sar,David R.; Withrow,Jerry D., Vacuum-insulating system and method for generating a high-level vacuum.
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