초록 ▼

A substrate processing apparatus having a substrate transport and substrate processing chambers. The substrate transport has a transport chamber and a transport mechanism. The transport mechanism has a rotatable drive, an arm pivotably connected to the drive to pivot in vertical directions, and a su

A substrate processing apparatus having a substrate transport and substrate processing chambers. The substrate transport has a transport chamber and a transport mechanism. The transport mechanism has a rotatable drive, an arm pivotably connected to the drive to pivot in vertical directions, and a substrate holder pivotably connected to an end of the arm by an articulating wrist. The arm can vertically move the substrate holder up and down. The substrate processing chambers are stationarily connected to the transport chamber at two different vertical levels.

대표청구항 ▼

[ What is claimed is:] [1.]1. A substrate processing apparatus comprising:a substrate transport having a transport chamber and a transport mechanism for transporting substrates into and out of the transport chamber; andsubstrate processing chambers connected to the transport chamber, a first one of

[ What is claimed is:] [1.]1. A substrate processing apparatus comprising:a substrate transport having a transport chamber and a transport mechanism for transporting substrates into and out of the transport chamber; andsubstrate processing chambers connected to the transport chamber, a first one of the processing chambers being vertically orientated in a plane above a second one of the processing chambers, wherein the transport mechanism can separately transport substrates into and out of the first and second processing chambers.