초록 ▼

A chemical delivery system for delivering chemicals having at least a high purity includes at least one first reservoir for containing a fluid and at least one second reservoir for containing the fluid. The system also includes a first conduit, a first fluid sensor, and a controller. The first condu

A chemical delivery system for delivering chemicals having at least a high purity includes at least one first reservoir for containing a fluid and at least one second reservoir for containing the fluid. The system also includes a first conduit, a first fluid sensor, and a controller. The first conduit is for transferring the fluid over time from the at least one first reservoir to the at least one second reservoir. The first conduit is metallic and has a first end in communication with the at least one first reservoir and a second end in communication with the at least one second reservoir. The fluid being transferred from the at least one first reservoir to the at least one second reservoir flows through the first conduit from the first end to the second end. The first fluid sensor is adjacent the first conduit, and the first fluid sensor is adapted to detect a presence of the fluid and to detect an absence of the fluid in the first conduit. The first fluid sensor generates at least one first signal indicative of the presence of the fluid or the absence of the fluid. The controller receives the at least one first signal. The controller is adapted to identify an empty condition in the at least one first reservoir upon receiving the at least one first signal indicative of the absence of the fluid in the first conduit or upon not receiving at least one first signal indicative of the presence of the fluid in the first conduit.

대표청구항 ▼

[ What is claimed is:] [1.]1. A chemical delivery system for delivering chemicals having at least a high purity adapted for semiconductor processing, comprising:at least one first reservoir for containing a fluid, adapted to change out upon substantially complete utilization of said fluid;at least o

[ What is claimed is:] [1.]1. A chemical delivery system for delivering chemicals having at least a high purity adapted for semiconductor processing, comprising:at least one first reservoir for containing a fluid, adapted to change out upon substantially complete utilization of said fluid;at least one second reservoir for containing said fluid;a first conduit for transferring said fluid over time from said at least one first reservoir to said at least one second reservoir, said first conduit being metallic and having a first end in communication with said at least one first reservoir and a second end in communication with said at least one second reservoir, wherein said fluid being transferred from said at least one first reservoir to said at least one second reservoir flows through said first conduit from said first end to said second end;a first fluid sensor adjacent said first conduit, said first fluid sensor adapted to detect a presence of said fluid in said first conduit and to detect an absence of said fluid in said first conduit, wherein said first fluid sensor generates at least one first signal indicative of the presence of said fluid or the absence of said fluid; anda controller for receiving said at least one first signal, said controller being adapted to identify an empty condition in said at least one first reservoir upon receiving at least one first signal indicative of the absence of said fluid in said first conduit or upon not receiving at least one first signal indicative of the presence of said fluid in said first conduit. [16.]16. A method of detecting an occurrence of an empty condition in a reservoir containing a liquid, said liquid having at least a high-purity and flowing over time from said reservoir through a metallic conduit in communication with said reservoir, said reservoir having a headspace pressurized by a has above said liquid, comprising the steps of:(a) providing a fluid sensor adjacent said metallic conduit, said fluid sensor adapted to detect a presence of said liquid in said metallic conduit and to transmit at least one first signal indicative thereof, said fluid sensor also adapted to detect a presence of said gas in said metallic conduit and to transmit at least one another signal indicative thereof;(b) detecting with said fluid sensor a presence of said liquid in said metallic conduit, said fluid sensor transmitting said at least one first signal; and(c) identifying with said fluid sensor a subsequent absence of said liquid in said metallic conduit.17. A method as in claim 16, wherein said fluid sensor is an ultrasonic fluid sensor.18. A method as in claim 16, comprising the further steps of:(d) waiting a predetermined period of time after identifying said subsequent absence of said liquid;(e) sensing with said fluid sensor a subsequent presence of a fluid in said metallic conduit;(f) determining with said fluid sensor whether said fluid is said liquid or said gas;(g) repeating steps (b) through (f) if said fluid is determined to be said liquid; and(h) transmitting at least one another signal from said fluid sensor if said fluid is determined to be said gas, said another signal indicating an occurrence of an empty condition in the reservoir.19. A method as in claim 18, wherein said predetermined period of time is about two (2) seconds.