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Porous organo polysilica dielectric materials having low dielectric constants useful in electronic component manufacture are disclosed along with methods of preparing the porous organo polysilica dielectric materials. Also disclosed are methods of forming integrated circuits containing such porous o

Porous organo polysilica dielectric materials having low dielectric constants useful in electronic component manufacture are disclosed along with methods of preparing the porous organo polysilica dielectric materials. Also disclosed are methods of forming integrated circuits containing such porous organo polysilica dielectric materials.

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[ What is claimed is:] [1.]1. A method of preparing porous organo polysilica dielectric materials comprising the steps of: a) dispersing removable cross-linked polymeric porogen particle in a B-staged organo polysilica dielectric material; b) curing the B-staged organo polysilica dielectric material

[ What is claimed is:] [1.]1. A method of preparing porous organo polysilica dielectric materials comprising the steps of: a) dispersing removable cross-linked polymeric porogen particle in a B-staged organo polysilica dielectric material; b) curing the B-staged organo polysilica dielectric material to form an organo polysilica dielectric matrix material without substantially degrading the porogen particle; and c) subjecting the organo polysilica dielectric matrix material to conditions which at least partially remove the porogen particle to form a porous organo polysilica dielectric material without substantially degrading the organo polysilica dielectric material; wherein the porogen particle is substantially compatible with the B-staged organo polysilica dielectric material and wherein the porogen particle comprises as polymerized units at least one compound selected from silyl containing monomers or poly(alkylene oxide) monomers and at least one cross-linking agent; provided that when the organo polysilica is methyl silsesquioxane and the porogen particle comprises (trimethoxylsilyl)propylmethacrylate as polymerized units, the porogen particle further comprises as polymerized units at least one other compound selected from silyl containing monomers or poly(alkylene oxide) monomers.