초록 ▼

An apparatus and a method for trapping a toxic gas contained in an exhaust gas from a process chamber are disclosed. In the apparatus, two toxic gas traps are provided which are connected in series with a toxic gas sensor provided thereinbetween and in fluid communication with the two traps. When to

An apparatus and a method for trapping a toxic gas contained in an exhaust gas from a process chamber are disclosed. In the apparatus, two toxic gas traps are provided which are connected in series with a toxic gas sensor provided thereinbetween and in fluid communication with the two traps. When toxic gas is detected by the toxic gas sensor, i.e., an indication that the first toxic gas trap is fully consumed, the second toxic gas trap is used to replace the first toxic gas trap, while a new toxic gas trap is installed as the second toxic gas trap. The present invention novel apparatus and method enables the full use or utilization of a toxic gas trap and results in significant cost savings. Furthermore, the present invention novel apparatus and method improves the yield of a fabrication process by reducing the machine down time since the service frequency for the chamber is reduced.

대표청구항 ▼

[ The embodiment of the invention in which an exclusive property or privilege is claimed are defined as follows:] [1.]1. A method for trapping a toxic gas comprising the steps of:providing a first toxic gas trap equipped with a first inlet and a first outlet,providing a second toxic gas trap equippe

[ The embodiment of the invention in which an exclusive property or privilege is claimed are defined as follows:] [1.]1. A method for trapping a toxic gas comprising the steps of:providing a first toxic gas trap equipped with a first inlet and a first outlet,providing a second toxic gas trap equipped with a second inlet and a second outlet,connecting said first outlet to said second inlet by a first conduit having a first toxic gas sensor therein,connecting said second outlet to a gas evacuation device by a second conduit,feeding a toxic gas into said first gas inlet, andreplacing said first toxic gas trap with said second toxic gas trap when a toxic gas is detected by said first toxic gas sensor.