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System and method for discharging gas 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B01D-053/04
  • B01D-053/22
출원번호 US-0192603 (1998-11-17)
우선권정보 JP0171766 (1998-06-18)
발명자 / 주소
  • Sadakata Takayuki,JPX
  • Yoshinaga Hiroshi,JPX
  • Ozaki Katsuhiro,JPX
출원인 / 주소
  • Fujitsu Limited, JPX
대리인 / 주소
    Armstrong, Westerman, Hattori, McLeland & Naughton, LLP
인용정보 피인용 횟수 : 32  인용 특허 : 7

초록 ▼

A system for discharging gas emitted from an apparatus or facility having a vacuum pump which sucks the gas emitted from the apparatus or facility while being supplied with a gas other than the sucked gas, the system comprising a unit for recovering at least part of the gas discharged from the vacuu

대표청구항 ▼

[ What is claimed is:] [1.]1. A method for evacuating gas from an apparatus using a vacuum pump which sucks the gas discharged from the apparatus while being supplied with a gas other than the sucked gas, the method comprising recovering at least part of the gas discharged from the vacuum pump, and

이 특허에 인용된 특허 (7)

  1. Krishnamurthy Ramachandran (Piscataway NJ) MacLean Donald L. (Annandale NJ), Argon recovery from argon-oxygen-decarburization process waste gases.
    상세보기
  2. Grant Robert W. (Excelsior MN) Novak Richard E. (Plymouth MN), Chemical processing system for maintaining concentration of semiconductor processing solution.
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  3. Ji Wenchang ; Shen Dongmin ; Jain Ravi ; Shirley Arthur I. ; Athalye Atul M. ; Sadkowski Piotr J., Method of processing semiconductor manufacturing exhaust gases.
    상세보기
  4. Doubrawa Franz (Tribuswinkel DEX) Joksch Martin (Baden DEX), Process for purifying exhaust air from plant parts of oil mills.
    상세보기
  5. Zarchy Andrew S. (Amawalk NY) Maurer Richard T. (Nanuet NY) Chao Chen C. (Millwood NY), Process for separation and recovery of methyl chloride from vent streams containing isobutane.
    상세보기
  6. Kirsch, Warren B.; Laurent, Sebastian M., Purification of halide.
    상세보기
  7. Yang James Hsu-Kuang ; Chernyakov Iosif ; Hsiung Thomas Hsiao-Ling ; Schwarz Alexander, Recovery of perfluorinated compounds from the exhaust of semiconductor fabs using membrane and adsorption in series.
    상세보기

이 특허를 인용한 특허 (32)

  1. Sherer, John Michael, Abatement system targeting a by-pass effluent stream of a semiconductor process tool.
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  2. Sherer,John Michael, Abatement system targeting a by-pass effluent stream of a semiconductor process tool.
    상세보기
  3. Patel,Satyadev R.; Schaadt,Gregory P.; MacDonald,Douglas B.; MacDonald,Niles K.; Shi,Hongqin, Apparatus and method for detecting an endpoint in a vapor phase etch.
    상세보기
  4. Patel, Satyadev R.; Schaadt, Gregory P.; MacDonald, Douglas B.; MacDonald, Niles K., Apparatus and method for flow of process gas in an ultra-clean environment.
    상세보기
  5. Brad Rake, Apparatus and method for lubricant condition control and monitoring.
    상세보기
  6. Wilson, Jay, Apparatus and methods for lubricant filtration and drum pump filtration system.
    상세보기
  7. Koehler, Don, Apparatus and methods for management of fluid condition.
    상세보기
  8. Sakai, Katsuo; Okura, Seiji; Sakamura, Masaji; Abe, Kaoru; Murata, Hitoshi; Wani, Etsuo; Kameda, Kenji; Mitsui, Yuki; Ohira, Yutaka; Yonemura, Taisuke; Sekiya, Akira, CVD apparatus and method of cleaning the CVD apparatus.
    상세보기
  9. Bloch, Heinz P.; Thomas, Rojean; Freeland, Daniel; Malinowski, Jeffrey T, Flinger disc.
    상세보기
  10. Abe, Tetsuya; Tanzawa, Sadamitsu; Hiroki, Seiji; Tajima, Yoshinori; Futatsuki, Takashi, Gas separation apparatus.
    상세보기
  11. Tajima, Yoshinori; Futatsuki, Takashi, Gas separation apparatus and gas separation method.
    상세보기
  12. Jung, Jim; Freeland, Dan; Corgiat, Nick; Kiepert, Lisa; Gundrum, Dan, Lubricant dispenser.
    상세보기
  13. Jung, Jim; Freeland, Dan; Corgiat, Nick; Kiepert, Lisa; Gundrum, Dan, Lubricant dispenser.
    상세보기
  14. Jung, Jim; Freeland, Dan; Corgiat, Nick; Kiepert, Lisa; Gundrum, Dan, Lubricant dispenser.
    상세보기
  15. Gundrum, Daniel; Scherer, Nicholas, Lubricant dispenser with nozzle.
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  16. Jung, Jim; Freeland, Dan; Corgiat, Nick; Kiepert, Lisa; Gundrum, Dan, Lubricant dispensing nozzle.
    상세보기
  17. Ishihara, Yoshio; Hayashida, Shigeru; Nagasaka, Toru; Kimijima, Tetsuya; Ohmi, Tadahiro, Method and apparatus for collecting rare gas.
    상세보기
  18. Chae, Seung-Ki; Lee, Sang-Gon; Chung, Sang-Hyuk; Heo, Seong-Jin, Method and apparatus for reducing PFC emission during semiconductor manufacture.
    상세보기
  19. Winchester, David Charles; Bosco, Matthew John; Klein, Gerald W.; West, Isaac Patrick; Samsal, Richard Linton; Dee, Douglas Paul; Johnson, Andrew David; Karwacki, Jr., Eugene Joseph, Method and equipment for selectively collecting process effluent.
    상세보기
  20. McConnell, Rachel Dianne; Hurst, Ann Marie; Shi, Xiaobo, Method for chemical mechanical planarization of a tungsten-containing substrate.
    상세보기
  21. Hufton, Jeffrey Raymond; Farris, Thomas Stephen; Golden, Timothy Christopher; Karwacki, Jr., Eugene Joseph, Method for recovering high-value components from waste gas streams.
    상세보기
  22. Patel,Satyadev R.; Schaadt,Gregory P.; MacDonald,Douglas B.; Shi,Hongqin; Huibers,Andrew G.; Heureux,Peter, Method for vapor phase etching of silicon.
    상세보기
  23. Shi, Hongqin; Schaadt, Gregory P., Methods and apparatus of etch process control in fabrications of microstructures.
    상세보기
  24. Doan,Jonathan; Patel,Satyadev, Microelectromechanical structure and a method for making the same.
    상세보기
  25. Huibers, Andrew; Patel, Satyadev, Micromirror array having reduced gap between adjacent micromirrors of the micromirror array.
    상세보기
  26. Huibers, Andrew; Patel, Satyadev, Micromirror array having reduced gap between adjacent micromirrors of the micromirror array.
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  27. Huibers,Andrew; Patel,Satyadev, Micromirror array having reduced gap between adjacent micromirrors of the micromirror array.
    상세보기
  28. Laermer, Franz; Urban, Andrea, Plasma system and method for anisotropically etching structures into a substrate.
    상세보기
  29. Kuboi, Nobuyuki; Fukusawa, Masanaga, Plasma treatment method, plasma treatment apparatus, and semiconductor device manufacturing method.
    상세보기
  30. Wilson, Jay, Portable lubricant filtration system and method.
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  31. Saito, Masashi; Hirayama, Yusuke; Sakai, Itsuko; Ohiwa, Tokuhisa, Processing method for conservation of processing gases.
    상세보기
  32. Stephens, Jason Michael; Stimson, Bradley Owen; Hussen, Guleid Nur Abdi, System and method for recycling a gas used to deposit a semiconductor layer.
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