초록 ▼

An intermetal level dielectric with two different low dielectric constant insulators: one for gap filling (140) within a metal level and the other (150) for between metal levels. Preferred embodiments include HSQ (140) as the gap filling low dielectric constant insulator and fluorinated silicon oxid

An intermetal level dielectric with two different low dielectric constant insulators: one for gap filling (140) within a metal level and the other (150) for between metal levels. Preferred embodiments include HSQ (140) as the gap filling low dielectric constant insulator and fluorinated silicon oxide (150) as the between metal level low dielectric constant insulator.

대표청구항 ▼

[ What is claimed is:] [1.]1. An integrated circuit interlevel insulation structure, comprising:(a) a first interconnection level having a plurality of spaced apart conductors havinp, an upper surface and a first insulator region of an electrically insulating material which is highly susceptible to

[ What is claimed is:] [1.]1. An integrated circuit interlevel insulation structure, comprising:(a) a first interconnection level having a plurality of spaced apart conductors havinp, an upper surface and a first insulator region of an electrically insulating material which is highly susceptible to cracldng as a thick fihn having a thickness sufficiergyv thin to generally avoid cracking disposed adjacent and between said plurality of spaced apart conductors and disposed over and in contact with said upper surface by up to about 0.05 micrometers, said first insulator region having a dielectric constant of less than 3.7; and(b) a second interconnection level disposed over said first interconnection level having a second planarizable electrical insulator region and said plurality of spaced apart conductors and disposed under a second conductor, said second insulator region composed of dielectric material with a dielectric constant less than 3.7 but greater than said first dielectric material and less susceptible to cracking than said first dielectric material.