초록 ▼

A fiber optic reflectometer employs an optical fiber near a target substrate in a deposition chamber. The optical fiber is positioned within the chamber so that deposition of a thin film on the substrate also occurs on a portion of the optical fiber. A combination of monochromatic and broadband whit

A fiber optic reflectometer employs an optical fiber near a target substrate in a deposition chamber. The optical fiber is positioned within the chamber so that deposition of a thin film on the substrate also occurs on a portion of the optical fiber. A combination of monochromatic and broadband white light is transmitted through the optical fiber to the film deposited on it, and light reflectance measurements are made to determine, in situ and substantially in real time, such characteristics of the film as its growth rate, thickness, composition, surface roughness and refractive index. Such measurements can be made without bulk optics and without the precise alignment requirements of ellipsometry techniques and apparatus.

대표청구항 ▼

[ What is claimed is:] [1.]1. A system for in situ characterization of thin films deposited on a substrate, comprising:a) a deposition chamber, including input means for introducing one or more process reactants into the chamber, output means for exhausting by-products from the chamber, and means fo

[ What is claimed is:] [1.]1. A system for in situ characterization of thin films deposited on a substrate, comprising:a) a deposition chamber, including input means for introducing one or more process reactants into the chamber, output means for exhausting by-products from the chamber, and means for monitoring and controlling the environment within the chamber;b) means within the deposition chamber for supporting a substrate onto which a film is to be deposited;c) one or more optical fibers mounted within the deposition chamber so that the film deposited on the substrate is also deposited onto at least a portion of an optical fiber;d) a light source disposed outside of the deposition chamber and coupled to the optical fiber for transmitting light through the optical fiber to the film deposited on the fiber and establishing a light reflectance pattern from the film on the optical fiber, wherein the light source comprises a source of monochromatic light and a source of polychromatic light and means for transmitting both types of light through the optical fiber;e) detector means for detecting light reflected from the film on the optical fiber and for generating a signal representative of the reflected light; andf) means for analyzing the signal to characterize the film substantially in real time and to provide a feedback signal for controlling the environment of the chamber and the temperature of the substrate to achieve desired properties of the film.