초록 ▼

Micron-sized particles are produced in quantity by one of various methods, including generally the steps of preparing a substrate surface through a lithographic process, the surface being characterized by defining a plurality of elements, depositing a layer of particle material on the substrate surf

Micron-sized particles are produced in quantity by one of various methods, including generally the steps of preparing a substrate surface through a lithographic process, the surface being characterized by defining a plurality of elements, depositing a layer of particle material on the substrate surface including the elements, processing the substrate surface to isolate the material deposited on the elements, and separating the particles from the elements. The size and shape of the elements predetermine the size and shape of the particles. The elements may comprise, inter alia, pillars of photoresist or spaces on the substrate surrounded and defined by photoresist.

대표청구항 ▼

[ What is claimed is:] [1.]1. An array comprised of a plurality of discrete substantially uniformly sized and substantially uniformly disk-shaped particles formed on an upper surface of a substrate, said particles being separable from said substrate and about 0.1 microns to about 25 microns in diame

[ What is claimed is:] [1.]1. An array comprised of a plurality of discrete substantially uniformly sized and substantially uniformly disk-shaped particles formed on an upper surface of a substrate, said particles being separable from said substrate and about 0.1 microns to about 25 microns in diameter.