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Excimer laser ablation process control of multilaminate materials 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B23K-026/38
  • B23K-026/40
출원번호 US-0353125 (1999-07-14)
발명자 / 주소
  • Beste Russell D.
출원인 / 주소
  • Aradigm Corporation
대리인 / 주소
    Bozicevic, Field & FrancisBorden
인용정보 피인용 횟수 : 31  인용 특허 : 10

초록

The instant invention discloses a method of ablating holes in a material, using a laminated material comprising first and second layers, said first and second layers having different coefficients of thermal expansion, said first layer having within it a hole, wherein a target region of said second l

대표청구항

[ What is claimed is:] [1.]1. A method of ablating holes in a material, comprising:providing a laminated material comprising first and second layers, said first and second layers having different coefficients of thermal expansion, said first layer having within it a hole, wherein a target region of

이 특허에 인용된 특허 (10)

  1. Davis Charles R. (Wappingers Falls NY) Egitto Frank D. (Binghamton NY) Skarvinko Eugene R. (Binghamton NY), Design of high density structures with laser etch stop.
  2. Mueller Walter B. (Inman SC), Heat resistant breathable films.
  3. Nelson Gregory H. (Gilbert AZ) Lebow Sanford (Westlake CA) Nogavich Eugene (Gilbert AZ), Interconnect device and method of manufacture thereof.
  4. Davis Charles R. (Johnson City NY) Goldblatt Ronald D. (Rye Brook NY), Lamination method for coating the sidewall or filling a cavity in a substrate.
  5. Shibata Makoto (Yokohama JPX) Itoh Hitoshi (Yokohama JPX), Method and apparatus for manufacturing ink jet recording head.
  6. Miyazono Yutaka (Kasuga JPX) Matsuda Mitsuhide (Fukuoka JPX) Horio Hideaki (Fukuoka JPX) Ohtsubo Kazumi (Kurume JPX) Inoue Takumi (Fukuoka JPX), Method for manufacturing an ink jet head in which droplets of conductive ink are expelled.
  7. Lum Paul ; Greenstein Michael, Microfluidic structure assembly with mating microfeatures.
  8. Brannon James H. (Wappingers Falls NY) Lankard ; Sr. John R. (Mahopac NY), Patterning of polyimide films with ultraviolet light.
  9. Boyko Chris M. ; Farquhar Donald S. ; Stone David ; Supa Richard J., Practical method to make blind vias in circuit boards and other substrates.
  10. Pan Ju-Don T. (Saratoga CA), Rework of polymeric dielectric electrical interconnect by laser photoablation.

이 특허를 인용한 특허 (31)

  1. Cox, Kenneth A.; Beane, Timothy Paul; Sweeney, William R., Aerosol generator and methods of making and using an aerosol generator.
  2. Cox, Kenneth A.; Beane, Timothy Paul; Sweeney, William R.; Nichols, Walter A.; Sprinkel, Jr., F. Murphy, Aerosol generator and methods of making and using an aerosol generator.
  3. Cox,Kenneth A.; Beane,Timothy Paul; Sweeney,William R.; Nichols,Walter A.; Sprinkel, Jr.,F. Murphy, Aerosol generator and methods of making and using an aerosol generator.
  4. Sprinkel, Jr., F. Murphy; Nichols, Walter A., Aerosol generator having a multiple path heater arrangement and method of use thereof.
  5. Sherwood, Timothy S.; Sowers, Scott A.; Reddy, Sirisha P.; Sprinkel, Jr., F. Murphy; Cox, Kenneth A.; Nichols, Walter A., Aerosol generator having heater arranged to vaporize fluid in fluid passage between bonded layers of laminate.
  6. Sprinkel, Jr., F. Murphy; Nichols, Walter A.; Cox, Kenneth A.; Sherwood, Timothy S.; Sowers, Scott A.; Washington, Zelita R.; Reddy, Sirisha, Aerosol generator having heater in multilayered composite and method of use thereof.
  7. Sharpe, David E.; Felter, John L., Aerosol generator having inductive heater and method of use thereof.
  8. Kenneth A. Cox ; Walter A. Nichols ; F. Murphy Sprinkel, Jr. ; Douglas D. McRae ; William R. Sweeney, Aerosol generator having multiple heating zones and methods of use thereof.
  9. Cox,Kenneth A.; Nichols,Walter A.; Sprinkel, Jr.,F. Murphy; McRae,Douglas D.; Sweeney,William R., Aerosol generator having temperature controlled heating zone and method of use thereof.
  10. Crowder,Timothy M.; Hickey,Anthony J.; Boekestein,Vanessa, Apparatus, systems and related methods for dispensing and /or evaluating dry powders.
  11. Crowder, Timothy M.; Hickey, Anthony J.; Boekestein, Vanessa, Apparatus, systems and related methods for processing, dispensing and/or evaluatingl dry powders.
  12. Hickey,Anthony James; Crowder,Timothy; Warden,Jeffrey Alan; Johnson,Keith Arthur; Ketner,Mark Ennis; Fording,Jay Kinsley; Garten,Michael Duane; Riley,William Myles; Anderson,Sean Derek; Ferris,Bruce Seymour; Rockwell,Paul Gilbert, Blister packages with frames and associated methods of fabricating dry powder drug containment systems.
  13. Nichols, Walter A.; Sprinkel, Jr., F. Murphy, Disposable aerosol generator system and methods for administering the aerosol.
  14. Nichols,Walter A.; Sprinkel, Jr.,F. Murphy, Disposable aerosol generator system and methods for administering the aerosol.
  15. Nichols,Walter A.; Sprinkel, Jr.,F. Murphy, Disposable inhaler system.
  16. Nichols,Walter A.; Sprinkel, Jr.,F. Murphy, Disposable inhaler system.
  17. Crowder,Timothy M.; Hickey,Anthony J., Dry powder dose filling systems and related methods.
  18. Crowder,Timothy M.; Hickey,Anthony J., Dry powder dose filling systems and related methods.
  19. Hickey, Anthony J.; Crowder, Timothy M., Dry powder inhaler devices, multi-dose dry powder drug packages, control systems, and associated methods.
  20. Crowder, Timothy M.; Hickey, Anthony J.; Warden, Jeffrey A., Dry powder inhalers, related blister devices, and associated methods of dispensing dry powder substances and fabricating blister packages.
  21. Crowder, Timothy M.; Hickey, Anthony J.; Warden, Jeffrey A., Dry powder inhalers, related blister devices, and associated methods of dispensing dry powder substances and fabricating blister packages.
  22. Hickey,Anthony James; Crowder,Timothy; Warden,Jeffrey Alan; Johnson,Keith Arthur; Ketner,Mark Ennis; Fording,Jay Kinsley; Garten,Michael Duane; Riley,William Myles; Anderson,Sean Derek; Ferris,Bruce Seymour; Rockwell,Paul Gilbert, Dry powder inhalers, related blister package indexing and opening mechanisms, and associated methods of dispensing dry powder substances.
  23. Nichols, Walter A.; Cox, Kenneth A.; Nguyen, Tung Tien, Dual capillary fluid vaporizing device.
  24. Nichols, Walter A.; Cox, Kenneth A.; Nguyen, Tung Tien, Dual capillary fluid vaporizing device.
  25. Russell D. Beste, Excimer laser ablation process control of multilaminate materials.
  26. Faison, Jr.,Gene G.; Gupta,Rajiv; McRae,Douglas D.; Nichols,Walter A., Fluid vaporizing device having controlled temperature profile heater/capillary tube.
  27. Nichols, Walter A.; Cox, Kenneth A.; McRae, Douglas D.; Nguyen, Tung Tien, Fluid vaporizing device having controlled temperature profile heater/capillary tube.
  28. Byron,Peter R.; Hindle,Michael, Method and apparatus for generating an aerosol.
  29. Hindle, Michael; Byron, Peter R.; Gupta, Rajiv, Method for generating an aerosol with a predetermined and/or substantially monodispersed particle size distribution.
  30. Hindle, Michael; Byron, Peter R.; Hong, John N., Mouthpiece entrainment airflow control for aerosol generators.
  31. Walter A. Nichols, Vapor driven aerosol generator and method of use thereof.
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