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Method of forming Cu-Ca-O thin films on Cu surfaces in a chemical solution and semiconductor device thereby formed

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/44
출원번호 US-0728315 (2000-11-30)
발명자 / 주소
  • Lopatin Sergey
  • Achuthan Krishnashree
출원인 / 주소
  • Advanced Micro Devices, Inc.
대리인 / 주소
    LaRiviere, Grubman & Payne, LLP
인용정보 피인용 횟수 : 151  인용 특허 : 4

초록

A method of fabricating a semiconductor device having a Cu--Ca--O thin film formed on a Cu surface by immersing the Cu surface into a unique chemical (electroless plating) solution containing salts of calcium (Ca) and copper (Cu), their complexing agents, a reducing agent, a pH adjuster, and surfact

대표청구항

[ What is claimed:] [1.]1. A method of fabricating a copper-calcium-oxide (Cu--Ca--O) thin film on a copper (Cu) surface formed on a semiconductor device by treating the Cu surface in a chemical solution, comprising the steps of:(1) providing the semiconductor substrate;(2) providing the chemical so

이 특허에 인용된 특허 (4)

  1. Wu Lih-Fu,TWX ; Wu Nae-Lih,TWX, Method for preparing porous tin oxide monolith with high specific surface area and controlled degree of transparency.
  2. Chiang Chung-Kwang (Taipei TWX) Shei Cheng-Yie (Taipei TWX), Preparation method of high purity 115 K Tl-based superconductor.
  3. Blanchet-Fincher Graciela B. (Wilmington DE) Fincher ; Jr. Curtis R. (Wilmington DE) Herron Norman (Newark DE), Process for making superconducting Tl-Pb-Sr-Ca-Cu-O films.
  4. Kobayashi Toshio (Amagasaki JPX) Uchikawa Fusaoki (Amagasaki JPX) Nomura Kenji (Amagasaki JPX) Morita Masao (Amagasaki JPX) Yokoyama Shouichi (Amagasaki JPX), Process for producing a superconductor of an oxide system from acetylacetonates.

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