초록 ▼

The performance of microelectromechanical devices is improved by 1) having a high-aspect-ratio between vertical and lateral dimensions of the mechanical elements, 2) integrating electronics on the same substrate as the mechanical elements, 3) good electrical isolation among mechanical elements and c

The performance of microelectromechanical devices is improved by 1) having a high-aspect-ratio between vertical and lateral dimensions of the mechanical elements, 2) integrating electronics on the same substrate as the mechanical elements, 3) good electrical isolation among mechanical elements and circuits except where electrical interconnection is desired.

대표청구항 ▼

[ What is claimed is:] [1.]1. A microelectromechanical device, comprising:a substrate having a semiconductor device layer;a first trench formed in said device layer, said first trench including a dielectric;a second trench formed in said device layer, said second trench simultaneously defining one o

[ What is claimed is:] [1.]1. A microelectromechanical device, comprising:a substrate having a semiconductor device layer;a first trench formed in said device layer, said first trench including a dielectric;a second trench formed in said device layer, said second trench simultaneously defining one or more planar microstructures and providing electrical isolation between said one or more planar microstructures and at least a portion of said device layer;wherein said first trench extends through said device layer and has a first end and a second end, each end terminating in said second trench.