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A transducer suitable for ultrasonic applications, fluid drop ejection and scanning force microscopy. The transducer comprises a thin piezoelectric ring bonded to a thin fully supported clamped membrane. Voltages applied to said piezoelectric ring excite axisymmetric resonant modes in the clamped me

A transducer suitable for ultrasonic applications, fluid drop ejection and scanning force microscopy. The transducer comprises a thin piezoelectric ring bonded to a thin fully supported clamped membrane. Voltages applied to said piezoelectric ring excite axisymmetric resonant modes in the clamped membrane.

대표청구항 ▼

[ What is claimed is:] [1.]1. A two dimensional array of piezoelectrically actuated flextensional transducers comprising:a plurality of membranes having a selected area,a support structure engaging the outer edges of each of said membranes to flexibly support the membranes,a piezoelectric transducer

[ What is claimed is:] [1.]1. A two dimensional array of piezoelectrically actuated flextensional transducers comprising:a plurality of membranes having a selected area,a support structure engaging the outer edges of each of said membranes to flexibly support the membranes,a piezoelectric transducer carried on one surface of each of said membranes, said transducer including a body of piezoelectric material having first and second spaced opposite surfaces,conductive contacts on the opposite surfaces of said body of piezoelectric material for each of said transducers for applying a voltage across said piezoelectric material to cause flextensional movement of said body of piezoelectric material whereby the associated membrane flexes responsive to applied voltage whereby the application of an ac voltage of predetermined frequency causes said membrane to flex,conductive means for applying said voltages across selected piezoelectric transducer to selectively flex said membranes,a pointed probe carried at the center of each membrane, anda conductive electrode spaced from the membrane whereby a voltage can be applied between said conductive electrode and one of said piezoelectric transducer contacts to electrostatically deflect the membrane.