초록 ▼

A sputtering-deposition method usable in forming on an insulator substrate a film including a conductive layer includes the steps of: preparing a conductive substrate holder in the form of a frame having an opening at its central area and electrically grounded; positioning the insulator substrate to

A sputtering-deposition method usable in forming on an insulator substrate a film including a conductive layer includes the steps of: preparing a conductive substrate holder in the form of a frame having an opening at its central area and electrically grounded; positioning the insulator substrate to cover the opening of the holder; arranging a flexible spacer on a peripheral edge of the substrate and also superposing a back plate on the spacer to press the substrate against the holder via the spacer; pressing and fixing the back plate to the holder; and then sputtering a separately provided target to deposit a new layer on a region of the substrate exposed in the holder's opening.

대표청구항 ▼

[ What is claimed is:] [1.]1. An integrated thin-film solar battery, including:a stacked-layered body comprised of a transparent electrode layer, a semiconductor layer and a back metal electrode layer successively deposited on a transparent insulator substrate, wherein the stacked-layered body is di

[ What is claimed is:] [1.]1. An integrated thin-film solar battery, including:a stacked-layered body comprised of a transparent electrode layer, a semiconductor layer and a back metal electrode layer successively deposited on a transparent insulator substrate, wherein the stacked-layered body is divided by a peripheral isolation groove that extends through the stacked-layered body to isolate a peripheral region from a photoelectric conversion cell region in which a plurality of electrically interconnected photoelectric conversion cells are formed, and wherein a whole outer peripheral edge of the back metal electrode layer is slightly inward of a whole outer peripheral edge of the semiconductor layer in said peripheral region.