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특허 상세정보

MyON담기
내보내기 페이스북 공유 카카오톡 공유

Protection of semiconductor fabrication and similar sensitive processes

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) G01N-021/76   
미국특허분류(USC) 422/052 ; 422/062 ; 422/093 ; 436/111
출원번호 US-0996790 (1997-12-23)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Bowditch & Dewey, LLP
인용정보 피인용 횟수 : 11  인용 특허 : 38
초록
▼

A detection system for detecting base contamination at low concentrations in gas, for instance to protect a sensitive process, characterized in that the detection system is constructed to examine multiple amines in gas to produce a reading stoichiometrically related to the proton bonding characteristic of the multiple amines present, the detection system comprising at least two channels through which a gas to be examined passes, an amines remover located in one of the channels, at least one thermal/catalytic converter which discharges NO for each channel...

대표
청구항

[ What is claimed is:] [1.]1. A detection system for detecting base contamination in a semiconductor processing system comprising;a converter system that oxygenates amines contained in received gas samples;a sample line that deliver s gas sample s to the converter system;a detector system coupled to the converter system that receives converted gas samples from the converter system, the detector system producing signals representative of the oxygenated amine concentration contained in converted gas samples.

이 특허에 인용된 특허 (38)

  1. Aibe Toshio (Tsukuba JPX) Shibata Kazuo (Tohnosho JPX). Activated carbon honeycombs and applications thereof. USP1994025288306.
  2. Thies Edward J. (Detroit MI) Michlin Norman (Southfield MI). Adsorbent cartridge for the exhaust of diazo process machines. USP1982064333752.
  3. Hama Masaharu (Itami JPX) Fukumoto Takaaki (Itami JPX). Air conditioning apparatus for a clean room. USP1991105053064.
  4. Sengpiel William T. (Oak Brook IL) Doucet Philip J. (Andover MA). Air purification system. USP1991105061296.
  5. Staten Michael D. (1266 S. Citrus Ave. ; #20 Los Angeles CA 90019). Air purification system. USP1988024726824.
  6. Fraim ; Freeman W.. Apparatus for chromatographically analyzing a liquid sample. USP1978014070155.
  7. Barto Robert M. (Wyckoff NJ) Shelffo Loren E. (S. Orange NJ). Apparatus for eliminating ammonia fumes emanating from diazo copiers. USP1977114059409.
  8. Lawrence AndrH. (Ottawa CAX) Elias Lorne (Nepean CAX). Concentrator for detection of amine vapors. USP1987104701306.
  9. Rounbehler David P. (Plymouth MA). Detection of hydrazine compounds in gaseous samples by their conversion to nitric oxide-yielding derivatives. USP1988104775633.
  10. Arimoto Hiromi (Kyoto JPX) Fujii Toshihiro (Tokyo JPX). Detector for gas chromatograph for detecting ammonia and amine compounds. USP1991055014009.
  11. Michlin Norman (28200 Bell Rd. Southfield MI 48034). Diazo copy machine with ammonia vapor absorber. USP1984094473282.
  12. Etess Edward (La Jolla CA) Budd Allan L. (San Diego CA). Dual channel nitrogen oxides analyzer. USP1976073967933.
  13. Hauville Francois P. (3 Royal Crest Dr. ; #12 North Andover MA 01845). Filter apparatus with improved filtration and saturation level detector. USP1990084946480.
  14. Kitano Junichi (Kofu JPX) Saitou Misako (Yamanashi JPX) Kakazu Yuji (Nirasaki JPX). Filter device. USP1995075434644.
  15. Tom Glenn M. (New Milford CT). In-line detector system for real-time determination of impurity concentration in a flowing gas stream. USP1994075325705.
  16. Ball Dean M. (Gainesville GA). Method and apparatus for detecting toxic gases. USP1991105057436.
  17. Rounbehler, David P.; Reisch, John W.. Method and apparatus for extraction of airborne amine compounds. USP1983044381408.
  18. Osborne Michael W. (Lilburn GA) England William G. (Suwanee GA) Zhang Xiuyi (Shandong CNX). Method and apparatus for monitoring corrosion. USP1993055208162.
  19. Rounbehler David P. (Bedford MA) Fine David H. (Sudbury MA) Achter Eugene K. (Lexington MA) MacDonald Stephen J. (Salem NH) Dennison Daniel B. (Kennesaw GA). Method and system for sampling and determining the presence of compounds. USP1996105567623.
  20. Rounbehler David P. (Bedford MA) Achter Eugene K. (Lexington MA) Fine David H. (Sudbury MA) Fraim Freeman W. (Lexington MA) MacDonald Stephen J. (Salem NH) Klotzsch Helmut W. (Groton MA). Method and system for sampling and determining the presence of salts of ammonia and amines in containers. USP1995055418170.
  21. Stokes Konrad H. (Los Gatos CA). Method for controlling contamination in a clean room. USP1985074530272.
  22. Mallow William A. (Helotes TX) Dziuk ; Jr. Jerome J. (San Antonio TX). Method for detecting vapor and liquid reactants. USP1994065322797.
  23. Bonometti Guy (Orthez FRX) Olivier Roland (Orthez FRX) Maurice Jacques (Pau FRX). Method for the determination of total nitrogen including adding an alkali metal halide or an alkaline earth metal halide. USP1993025185268.
  24. Burton C. Shepherd (San Rafael CA) Harker Alan B. (Thousand Oaks CA) Ho William W. (Thousand Oaks CA). Method of detecting gaseous contaminants. USP1977094049383.
  25. Rounbehler David P. (Concord MA) Reisch John W. (Brookline MA). Molecular sieve trap for nitrogen compound detection. USP1981114301114.
  26. Rezuke Robert W. (N. Grafton MA) Kinkead Devon A. (Providence RI). Non-woven filter composite. USP1996125582865.
  27. Croker Michael G. (Rocklin CA). Photoresist solvent fume exhaust scrubber. USP1995065427610.
  28. Neel Edward M. (Warwick RI) Dwinell John F. (Foxboro MA) Nemergut ; III Michael T. (Westborough MA). Portable volatile organic compound monitoring system. USP1994105356594.
  29. Hardy James E. (Scotch Plains NJ) Knarr John J. (South Plainfield NJ). Process and apparatus for measuring gaseous fixed nitrogen species. USP1982064333735.
  30. Bikson Benjamin (Brookline MA) Nelson Joyce K. (Lexington MA) Perrin Jerry E. (Dorchester MA). Process for recovery of ammonia from an ammonia-containing gas mixture. USP1991045009678.
  31. Jones John A. (Wilbraham MA) Ayes Adolfo V. (Hartford CT). Respirator cartridge end-of-service lift indicator system and method of making. USP1979054154586.
  32. Kudirka Paul J. (Grand Rapids MI) Grochoski Gregory T. (Ada MI) Hamilton Robert W. (Grand Rapids MI). Room air treatment system. USP1988044737173.
  33. Stetter Joseph R. (Naperville IL). Sensor for detecting the exhaustion of an adsorbent bed. USP1989074847594.
  34. Fine David H. (Framingham MA) Lieb David P. (Lexington MA) Rounbehler David P. (Bedford MA). Specific compound detection system with gas chromatograph. USP1976123996008.
  35. Polak Anthony J. (Lake Zurich IL) Young Ping (Hoffman Estates IL). Thin film polymer blend membranes. USP1990054921651.
  36. Polak Anthony J. (Lake Zurich IL) Young Ping (Hoffman Estates IL). Thin film polymer blend membranes. USP1987124714482.
  37. Greene Michael (Baltimore MD) Michlin Norman (Dearborn MI). Ventilating system for diazo process printing machines. USP1989124890136.
  38. Freidank Michael (Berlin DEX) Coym Jurgen (Berlin DEX) Schubert Axel (Berlin DEX). Warning device to indicate the state of gases exhaustion of a gas filter retaining dangerous gases. USP1989104873970.

이 특허를 인용한 특허 피인용횟수: 11

  1. Li, Leping; Gilhooly, James A.; Morgan, III, Clifford O.; Wei, Cong; Moser, Werner; Kutter, Matthias; Knee, Joseph; Imfeld, Walter; Greuter, Bruno; Stuenzi, Heinz. Chemiluminescence detection apparatus. USP2003016506341.
  2. Miyamoto, Hidenori; Maruyama, Kenji; Hirakawa, Tadahiko; Misumi, Koichi. Coating apparatus including a chamber, sensor, removal unit and control device for application of liquid to a substrate. USP2015119186696.
  3. Miyamoto, Hidenori; Maruyama, Kenji; Hirakawa, Tadahiko; Misumi, Koichi. Coating apparatus including a glove part and a controller for stopping coating. USP2013078485126.
  4. Kishkovich, Oleg P.; Kinkead, Devon; Grayfer, Anatoly; Goodwin, William M.; Ruede, David. Filters employing both acidic polymers and physical-adsorption media. USP2009067540901.
  5. Kishkovich, Oleg P.; Kinkead, Devon; Grayfer, Anatoly; Goodwin, William M.; Ruede, David. Filters employing both acidic polymers and physical-adsorption media. USP201310RE44536.
  6. Leping Li ; James Albert Gilhooly ; Clifford Owen Morgan, III ; William Joseph Surovic ; Cong Wei. Indirect endpoint detection by chemical reaction and chemiluminescence. USP2002086440263.
  7. Brown, Steven S.; Dubé, William P.; Wild, Robert J.. Measurement of total reactive nitrogen, NOy, together with NO2, NO, and O3via cavity ring-down spectroscopy. USP2017109804138.
  8. Birks,John W.; Bollinger,Mark J.. Method and apparatus to detect a gas by measuring ozone depletion. USP2006057045359.
  9. Dams, Johannes Adrianus Antonius Theodorus; Kroon, Mark; Voorma, Harm-Jan; Spee, Carolus Ida Maria Antonius. Method of preparing components, prepared component, lithographic apparatus and device manufacturing method. USP2011128077287.
  10. Ly, Sidney; Salour, Ali. Predictive analysis of complex datasets and systems and methods including the same. USP2018049945825.
  11. Sergi, John E.; Gaudreau, John; Kishkovich, Oleg P.; Goodwin, William; Kinkead, Devon A.. System and method for removing contaminants. USP2013038398753.

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