초록 ▼

A detection system for detecting base contamination at low concentrations in gas, for instance to protect a sensitive process, characterized in that the detection system is constructed to examine multiple amines in gas to produce a reading stoichiometrically related to the proton bonding characteris

A detection system for detecting base contamination at low concentrations in gas, for instance to protect a sensitive process, characterized in that the detection system is constructed to examine multiple amines in gas to produce a reading stoichiometrically related to the proton bonding characteristic of the multiple amines present, the detection system comprising at least two channels through which a gas to be examined passes, an amines remover located in one of the channels, at least one thermal/catalytic converter which discharges NO for each channel, and at least one chemiluminescent NO detector, whereby the total amine concentration is determined from the difference between the detected signals for the channels.

대표청구항 ▼

[ What is claimed is:] [1.]1. A detection system for detecting base contamination in a semiconductor processing system comprising;a converter system that oxygenates amines contained in received gas samples;a sample line that deliver s gas sample s to the converter system;a detector system coupled to

[ What is claimed is:] [1.]1. A detection system for detecting base contamination in a semiconductor processing system comprising;a converter system that oxygenates amines contained in received gas samples;a sample line that deliver s gas sample s to the converter system;a detector system coupled to the converter system that receives converted gas samples from the converter system, the detector system producing signals representative of the oxygenated amine concentration contained in converted gas samples.