초록 ▼

A method of depositing a material onto a substrate, comprising the steps of: feeding a material solution to an outlet to provide a stream of droplets of the material solution; applying a potential difference between the outlet and a substrate to electrostatically attract the droplets from the outlet

A method of depositing a material onto a substrate, comprising the steps of: feeding a material solution to an outlet to provide a stream of droplets of the material solution; applying a potential difference between the outlet and a substrate to electrostatically attract the droplets from the outlet towards the substrate such that a corona discharge is formed around the outlet; heating the substrate to provide an increase in temperature between the outlet and the substrate; and progressively increasing the temperature of the substrate during material deposition.

대표청구항 ▼

[ What is claimed is:] [1.]1. A method of depositing a material onto a substrate, comprising the steps of:feeding a material solution to an outlet to provide a stream of droplets of the material solution;applying a potential difference between the outlet and a substrate to electrostatically attract

[ What is claimed is:] [1.]1. A method of depositing a material onto a substrate, comprising the steps of:feeding a material solution to an outlet to provide a stream of droplets of the material solution;applying a potential difference between the outlet and a substrate to electrostatically attract the droplets from the outlet towards the substrate;heating the substrate to a deposition temperature to provide an increase of temperature between the outlet and the substrate enabling deposition of the material onto the heated substrate; andprogressively increasing the temperature of the substrate during material deposition to maintain a substantially constant deposition temperature.