초록 ▼

The present invention provides apparatus, systems, and methods related to the manufacture of integrated circuits. Specifically, embodiments of the present invention include apparatus designed to provide thorough and reliable fluid mixture for gases used in a semiconductor processing system. In one e

The present invention provides apparatus, systems, and methods related to the manufacture of integrated circuits. Specifically, embodiments of the present invention include apparatus designed to provide thorough and reliable fluid mixture for gases used in a semiconductor processing system. In one embodiment of the invention, the gas mixing apparatus comprises a gas mixer housing having a gas inlet, a fluid flow channel, and a gas outlet. The fluid flow channel is fluidly coupled to a plurality of gas sources. The majority of the gas mixture occurs in the fluid flow channel which comprises one or more fluid separators for separating the gas into two or more gas portions and one or more fluid collectors for allowing the gas portions to collide with each other to mix the gas portions. This separation and collection of the gas portions results in a thoroughly mixed gas.

대표청구항 ▼

[ What is claimed is:] [6.]6. A method for fabricating an integrated circuit device, said method comprising the steps of:flowing a plurality of gases into a gas mixture apparatus;separating the plurality of gases into two or more gas portions;colliding the gas portions with each other to form a mixe

[ What is claimed is:] [6.]6. A method for fabricating an integrated circuit device, said method comprising the steps of:flowing a plurality of gases into a gas mixture apparatus;separating the plurality of gases into two or more gas portions;colliding the gas portions with each other to form a mixed gas; andflowing the mixed gas into the processing chamber onto a semiconductor wafer;wherein said colliding step comprises:collecting the two or more gas portions with a fluid collector; andcombining the two or more gas portions together in a turbulent manner to form a mixed gas within said fluid collector.