초록 ▼

A pixel structure is provided that has a substrate and a bolometer disposed upon the substrate that includes a transducer and an absorber that have been spaced apart from each other and from the substrate so as to permit the transducer and the absorber to be separately optimized. For example, the ab

A pixel structure is provided that has a substrate and a bolometer disposed upon the substrate that includes a transducer and an absorber that have been spaced apart from each other and from the substrate so as to permit the transducer and the absorber to be separately optimized. For example, the absorption characteristics of the bolometer can be maximized, while concurrently minimizing the thermal loss to the substrate. While the absorber is spaced from the transducer, the absorber is in thermal contact with the transducer such that radiation absorbed by the absorber also heats the transducer. In this regard, the bolometer also includes a thermally conductive post extending from the transducer to the absorber. Since the transducer has an electrical resistance that varies in response to changes in the temperature of the transducer, heating of the transducer in response to the absorption of radiation by the absorber causes the electrical resistance of the transducer to correspondingly vary in a predetermined manner. By measuring the change in electrical resistance of the transducer, such as by passing a known current therethrough, a precise measurement of the radiation absorbed by the absorber can be determined. In addition to the pixel structure, a method is provided for fabricating a pixel structure having a bolometer in which the transducer and absorber are spaced apart so as to likewise facilitate the independent optimization of the characteristics of both the absorber and the transducer.

대표청구항 ▼

[ That which is claimed:] [1.]1. A pixel structure of a bolometer-based focal plane array for preferentially detecting radiation of a predetermined wavelength comprising:a substrate; anda bolometer comprising:a transducer supported in a spaced apart relationship with respect to said substrate to def

[ That which is claimed:] [1.]1. A pixel structure of a bolometer-based focal plane array for preferentially detecting radiation of a predetermined wavelength comprising:a substrate; anda bolometer comprising:a transducer supported in a spaced apart relationship with respect to said substrate to define a first there between, said transducer having an electrical resistance that varies in response to changes in the temperature of said transducer; andan absorber supported in a spaced apart relationship with respect to both said substrate and said transducer to thereby define a second gap between said absorber and said transducer, said absorber being in thermal contact with said transducer, thereby permitting radiation absorbed by said absorber to heat said transducer and cause the electrical resistance of said transducer to correspondingly vary,wherein a combined thickness of the first and second gaps has a predefined relationship to the predetermined wavelength of radiation that the pixel structure preferentially detects.