초록 ▼

A premix burner apparatus includes a burner structure and a firing rate control system. The burner structure defines a premix reaction zone configured to communicate with a process chamber. The burner structure further defines a plurality of separate entrances to the reaction zone, and a correspondi

A premix burner apparatus includes a burner structure and a firing rate control system. The burner structure defines a premix reaction zone configured to communicate with a process chamber. The burner structure further defines a plurality of separate entrances to the reaction zone, and a corresponding plurality of separate premix flow paths, each of which is configured to direct both oxidant and fuel to a respective one of the entrances to the reaction zone. The firing rate control system is operative to control flows of oxidant and fuel along at least one of the flow paths separately from flows of oxidant and fuel along at least one other flow path.

대표청구항 ▼

[ What is claimed is:] [8.]8. A premix burner apparatus for heating a process chamber, said apparatus comprising:a burner structure defining a premix reaction zone configured to communicate with the process chamber, said burner structure further defining a plurality of separate entrances to said rea

[ What is claimed is:] [8.]8. A premix burner apparatus for heating a process chamber, said apparatus comprising:a burner structure defining a premix reaction zone configured to communicate with the process chamber, said burner structure further defining a plurality of separate entrances to said reaction zone, and a corresponding plurality of separate premix flow paths, each of which is configured to direct both oxidant and fuel to a respective one of said entrances to said reaction zone; anda valve assembly operative to affect flows of oxidant and fuel along only a single one of said flow paths;said valve assembly being shiftable between a closed condition blocking a combined flow of oxidant and fuel along said single flow path, and an open condition not blocking said flow;said valve assembly being further shiftable to a partially open condition blocking a flow of fuel along said single flow path but not blocking a flow of oxidant along said single flow path. [12.]12. A method of operating a premix burner apparatus for heating a process chamber, the apparatus including a burner structure defining a premix reaction zone configured to communicate with the process chamber, the burner structure further defining a plurality of separate entrances to the reaction zone, and a corresponding plurality of separate premix flow paths, each of which is configured to direct both oxidant and fuel to a respective one of the separate entrances to the reaction zone, said method comprising:controlling flows of oxidant and fuel along at least one of said flow paths separately from flows of oxidant and fuel along at least one other of said flow paths, said controlling step comprising interrupting a combined flow of oxidant and fuel along at least one of said flow paths while oxidant and fuel continue to flow along at least one other of said flow paths;said controlling step further comprising consecutive cycles in which a combined flow of oxidant and fuel is interrupted along only one of said flow paths.