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특허 상세정보

MyON담기
내보내기 페이스북 공유 카카오톡 공유

Gas control device and method of supplying gas

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B08B-009/027    F16K-011/10    F16K-051/00    F17D-001/04   
미국특허분류(USC) 137/240 ; 137/597 ; 137/884 ; 134/098.1 ; 134/099.1 ; 134/166C
출원번호 US-0189562 (1998-11-11)
우선권정보 GB0024168 (1997-11-14)
발명자 / 주소
  • Zheng Dao-Hong,GBX
  • Irven John,GBX
  • George Mark Allen
출원인 / 주소
  • Air Products and Chemicals, Inc.
대리인 / 주소
    McAndrews, Held & Malloy, Ltd.
인용정보 피인용 횟수 : 30  인용 특허 : 18
초록
▼

A modular gas control device for use with a compressed gas cylinder (111) comprises a primary module (152) and a secondary module (252) mounted on the primary module. The primary module comprises a first supporting body (154) having a first main gas flow path (155) through the body. The supporting body has input connecting means (156) for mounting the body on the cylinder (111) and connecting the gas flow path (155) to communicate with the gas cylinder through a first flow path (157). Pressure reducing means (166) provides gas in the flow path at a lower...

대표
청구항
▼

[ What is claimed is:] [35.]35. A module gas control device for use with a cylinder of compressed gas comprising a discrete primary module adapted to be directly mounted onto said cylinder, and a discrete secondary module directly mounted on the primary module;the primary module comprising a body having therein:a main gas flow path through the body, said path having a high pressure gas delivery inlet and a low pressure gas delivery outlet,a high pressure gas filing path through the body, said path having a high pressure gas filling inlet and a high press...

인용문헌 (18)

  1. Zheng Dao-Hong (London GBX) Irven John (High Wycombe GBX) Paterson Alan J. F. (Crewe GBX) Tregear Daniel C. (Cambridge GBX), Apparatus for supplying high purity fluid.
  2. Ohmi Tadahiro (Sendai JPX) Sugiyama Kazuhiko (Sendai JPX) Nakahara Fumio (Sendai JPX) Umeda Masaru (Tokyo JPX), Cylinder cabinet piping system.
  3. George Mark (23 N. 12th St. Allentown PA 18102), Delivery of reactive gas from gas pad to process tool.
  4. Cannet Gilles (Parmain FRX) Fano Emmanuel (La-Varenne-Saint-Hilaire FRX) Robin Alain (Paris FRX), Gas control and dispensing assembly and gas storage device equipped with such an assembly.
  5. Gregoire Roger J. (San Antonio TX), Gas delivery panels.
  6. Lhomer Gerard (Le Mesnil Saint Denis FRX) Theurant Gilbert (Vitry sur Seine FRX), Gas dispensing control assembly and gas bottle equipped with such an assembly.
  7. Campion Grard (Paris FRX) Demeulemeester Alain (Pierrefitte sur Seine FRX) Fortuit Eric (Viroflay FRX), Gas distribution adapter and pressure reducer for high pressure gas containers.
  8. Park Jae Won,KRX, Gas supply device for semiconductor manufacturing apparatus.
  9. Yokogi Kazuo,JPX, Gas supply system equipped with cylinders.
  10. Otteman John H. (11940 E. Washington Blvd. Whittier CA 90606) Gray William M. (1191 Lenor Way San Jose CA 95128), Gas supply system with purge means.
  11. Strong ; Jr. Benjamin R. (Sunnyvale CA) Elliot Brent D. (Santa Clara CA) Balma Frank R. (San Jose CA), Integrated gas panel.
  12. Rohrberg Roderick G. (Torrance CA) Young Russell D. (Redondo Beach CA) Rohrberg Timothy K. (Torrance CA), Modular bottle-mounted gas management system.
  13. Lasnier Didier (Cergy FRX) Beaco Bruno (Verona ITX) Sakreiter Daniel (Montgeroult par Boissy l\Aillerie FRX), Pressure reducer.
  14. Patel Milan N. (10 Norton Ave. Surbiton ; Surrey KT5 9DY GBX) Clements Hubert J. T. (32 Canford Avenue Northolt ; Middlesex GBX), Pressure reducing valve.
  15. Williams, Todd E.; Desch, Steven M., Process gas controller.
  16. Ohmi Tadahiro (Sendai JPX) Sugiyawa Kazuhiko (Sendai JPX) Nakahara Fumio (Sendai JPX) Umeda Masaru (Tokyo JPX), Process gas supply piping system.
  17. Ritrosi Joe ; Schmitt Gary ; Quintino Carl ; Kasper Gerhard, Purgeable connection for gas supply cabinet.
  18. Lorenz, Andrew K.; Mobley, Scott R., Purging apparatus.

이 특허를 인용한 특허 (30)

  1. Patel, Shwetak N.; Gupta, Sidhant; Reynolds, Matthew S., Apparatus configured to detect gas usage, method of providing same, and method of detecting gas usage.
  2. Hertzler,Benjamin Lee; Shay,Robert Harrison; Botelho,Alexandre de Almeida, Assembly and method for containing, receiving and storing fluids and for dispensing gas from a fluid control and gas delivery assembly having an integrated fluid flow restrictor.
  3. Vincent,Jean Louise; Pearlstein,Ronald Martin; Berger,Kerry Renard; Lachawiec, Jr.,Anthony John, Built in purifier for reactive gases.
  4. Bang,Won; Wang,Yen Kun; Ghanayem,Steve, Clog-resistant gas delivery system.
  5. Alexandre, Guiliani, Coupling assembly for petroleum liquefied gas with quick fastening automatic disconnection and retention and relief valve.
  6. Bruat, Josyane; L'Heveder, Clarisse, Device for storing and mixing two gases.
  7. Miyamoto,Yoshio; Yamaguchi,Tsutomu, Electronic digital pressure switch.
  8. Hale, John C.; Harris, Christopher B.; McCune, William D., Enhanced aerial delivery system.
  9. Hale, John C.; Harris, Christopher B.; McCune, William D., Enhanced aerial delivery system.
  10. Kim,Yu kweon; Chae,Seung ki; Jeon,Jai kang; Roh,Young seok; Lee,Yong wook, Gas delivery system for supplying gas to semiconductor manufacturing equipment.
  11. Ishitoya, Tsukuo; Kobayashi, Nobuo, High-pressure tank.
  12. Monereau, Christian; Belot, Jean-Marc, Installation for the cyclic treatment of fluid by adsorption with valves with improved sealing.
  13. Udischas, Richard J.; Muller, Denis; Schleser, Werner, Integrated valve regulator assembly and system for the controlled storage and dispensing of a hazardous material.
  14. Udischas, Richard J.; Muller, Denis; Schleser, Werner, Integrated valve regulator assembly and system for the controlled storage and dispensing of a hazardous material.
  15. Okabe,Tsuneyuki; Okura,Shigeyuki; Doi,Hiroki; Ito,Minoru; Mori,Yoji; Nishimura,Yasunori, Liquid raw material supply unit for vaporizer.
  16. Bailey, David A., Method of evaluating, expanding, and collapsing connectivity regions within dynamic systems.
  17. Bourasseau, Cyril; Rameau, Guillaume, Miniature gas cabinet.
  18. Schneider,Claus; Trunk,Ralph; Pfitzner,Lothar; Schmid,Heinz, Particle measurement configuration and semiconductor wafer processing device with such a configuration.
  19. Davidson,Gilbert; Davidson,Brian R.; Lev,Goldshtrakh I., Portable gas delivery device with impact protection.
  20. Stenmark, Lars, Pressure controlled gas storage.
  21. Olander, W. Karl; Donatucci, Matthew B.; Wang, Luping; Wodjenski, Michael J., Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases.
  22. Olander, W. Karl; Donatucci, Matthew B.; Wang, Luping; Wodjenski, Michael J., Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases.
  23. Olander, W. Karl; Donatucci, Matthew B.; Wang, Luping; Wodjenski, Michael J., Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases.
  24. Olander,W. Karl; Donatucci,Matthew B; Wang,Luping; Wodjenski,Michael J., Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases.
  25. Bertagnolli, Emmerich; Wanzenboeck, Heinz; Buehler, Wolfram; Stebler, Camille; Zeile, Ulrike; Rosenthal, Alexander, Processing system.
  26. Schuetze, Karl T.; Hudson, Robert S., Systems and methods for controlling temperature and pressure of fluids.
  27. Roberge, Guillaume; Allidieres, Laurent; Zsigmond, Zsolt, Tap for a storage container, container provided with such a tap, and corresponding use.
  28. Ogami, Nobuyuki; Kobayashi, Nobuo; Yamashita, Akira, Valve assembly for gas container.
  29. Kubo, Toshikatsu; Shima, Toshihiko; Suzuki, Takuya; Kuroyanagi, Munetoshi, Valve device and manually operated shutoff valve device.
  30. Feinberg,Kathleen A.; Gulvin,Peter M.; Jia,Nancy Y.; Nystrom,Peter J., Vented MEMS structures and methods.

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