초록 ▼

Embodiments of the invention comprise a new device and technique to realize an improved temperature control for a chemical photoresist developer utilizing a preexisting integrated single reservoir. This improvement is achieved by providing for a modified temperature control unit and procedure. The t

Embodiments of the invention comprise a new device and technique to realize an improved temperature control for a chemical photoresist developer utilizing a preexisting integrated single reservoir. This improvement is achieved by providing for a modified temperature control unit and procedure. The temperature control unit preferably comprises a plurality of heat exchanger conduits that are each supplied by an inlet manifold, and then exhausted via an outlet manifold. The temperature control unit preferably extends fully within the modified nozzle unit. By utilizing the improved temperature control unit, a first and second volumetric allocation of developer may be issued so that both may be dispensed within a relatively short period of time upon a photoresist layer surface in a temperature controlled state.

대표청구항 ▼

[ What is claimed is:] [1.]1. A method of providing a temperature controlled developer utilizing a preexisting integrated single reservoir, comprising the steps of:temperature controlling a first portion of developer within a temperature controlling developer dispensing reservoir, andtemperature con

[ What is claimed is:] [1.]1. A method of providing a temperature controlled developer utilizing a preexisting integrated single reservoir, comprising the steps of:temperature controlling a first portion of developer within a temperature controlling developer dispensing reservoir, andtemperature controlling a second portion of developer within the temperature controlling developer dispensing reservoir, after dispensing the first portion of developer,providing a heat exchanger assembly that is located adjacent to at least a part of at least one of the first and second portions of developer; whereinthe heat exchanger assembly occupies a portion of an internal volume defined by the temperature controlling developer dispensing reservoir, and whereinthe heat exchanger assembly comprises a plurality of heat exchanger conduits;providing a temperature controlled fluid to the plurality of heat exchanger conduits via an inlet manifold, andexhausting the temperature controlled fluid from the plurality of heat exchanger conduits via an outlet manifold.