초록 ▼

Modular cartridges which may be inserted into and removed from a well or receptacle on the bottom of a pod. The cartridges may be configured to include various types and combinations of valves, filters, and/or conditioning agents. A standalone cartridge replacement station may be provided for insert

Modular cartridges which may be inserted into and removed from a well or receptacle on the bottom of a pod. The cartridges may be configured to include various types and combinations of valves, filters, and/or conditioning agents. A standalone cartridge replacement station may be provided for inserting and removing various cartridges from one or more of the receptacles on the bottom of a pod while wafers are seated within the pod. The standalone replacement unit may decouple an existing cartridge from the pod by rotating the cartridge from a locked to an unlocked position and then lowering the cartridge out of the pod. Thereafter, the replacement station may insert a new cartridge up into the appropriate receptacle and rotate the cartridge into a locked position in the pod.

대표청구항 ▼

[ I claim:] [1.]1. A SMIF pod, comprising:a pod, having a pod shell and a pod door, said pod door forming a gas-tight seal with said pod shell, said pod having an opening;a receptacle forming a gas-tight seal with said pod, and positioned to cover said opening in said pod; andan interchangeable modu

[ I claim:] [1.]1. A SMIF pod, comprising:a pod, having a pod shell and a pod door, said pod door forming a gas-tight seal with said pod shell, said pod having an opening;a receptacle forming a gas-tight seal with said pod, and positioned to cover said opening in said pod; andan interchangeable modular cartridge positioned within said receptacle.