초록 ▼

A heating apparatus for a microinjection device and a method for fabricating the same, wherein an adhesion layer for improving adhesive force is included between a heater resistor layer and the electrode which supplies electricity to the heater resistor layer. This apparatus shows improved performan

A heating apparatus for a microinjection device and a method for fabricating the same, wherein an adhesion layer for improving adhesive force is included between a heater resistor layer and the electrode which supplies electricity to the heater resistor layer. This apparatus shows improved performance and lifespan over other heating apparatuses.

대표청구항 ▼

[ What is claimed is:] [1.]1. A microinjection device for ejecting a fluid, comprising:a substrate;a protective film formed on said substrate;a heater resistor layer formed on said protective film;an adhesion layer formed on said heater resistor layer, said adhesion layer being formed of an electric

[ What is claimed is:] [1.]1. A microinjection device for ejecting a fluid, comprising:a substrate;a protective film formed on said substrate;a heater resistor layer formed on said protective film;an adhesion layer formed on said heater resistor layer, said adhesion layer being formed of an electrically conductive material;a first electrode formed as a layer on said adhesion layer;a second electrode formed as a layer on said first electrode, said second electrode being formed as a layer without contacting said adhesion layer;an electrode pad formed on said second electrode for receiving electrical energy for said microinjection device;a heater chamber barrier layer formed on said second electrode, defining a heater chamber with an exposed portion of said heater resistor layer as a floor of said heater chamber;a membrane formed on said heater chamber barrier layer spanning the top of said heater chamber;a fluid chamber barrier layer formed on said membrane, defining a fluid chamber for a fluid; anda nozzle plate formed on said fluid chamber barrier layer, said nozzle plate containing a nozzle providing an opening from said fluid chamber to outside of said microinjection device.