초록 ▼

An effluent gas stream treatment system for treatment of gaseous effluents such as waste gases from semiconductor manufacturing operations. The effluent gas stream treatment system comprises a pre-oxidation treatment unit, which may for example comprise a scrubber, an oxidation unit such an electrot

An effluent gas stream treatment system for treatment of gaseous effluents such as waste gases from semiconductor manufacturing operations. The effluent gas stream treatment system comprises a pre-oxidation treatment unit, which may for example comprise a scrubber, an oxidation unit such an electrothermal oxidizer, and a post-oxidation treatment unit, such as a wet or dry scrubber. The effluent gas stream treatment system of the invention may utilize an integrated oxidizer, quench and wet scrubber assembly, for abatement of hazardous or otherwise undesired components from the effluent gas stream. Gas or liquid shrouding of gas streams in the treatment system may be provided by high efficiency inlet structures.

대표청구항 ▼

[ What is claimed is:] [1.]1. An apparatus for treating an effluent fluid stream from one or more semiconductor manufacturing process tools, comprising:a pre-treatment unit, downstream from at least one semiconductor manufacturing process tool, arranged to remove water-soluble components from the ef

[ What is claimed is:] [1.]1. An apparatus for treating an effluent fluid stream from one or more semiconductor manufacturing process tools, comprising:a pre-treatment unit, downstream from at least one semiconductor manufacturing process tool, arranged to remove water-soluble components from the effluent fluid stream;an oxidizing unit, downstream from the pre-treatment unit, arranged to elevate the temperature of the effluent fluid stream and effect oxidation of at least a portion of oxidizable components of the effluent fluid stream;a quench unit, downstream from the oxidizing unit, arranged to lower the temperature of the effluent fluid stream; anda post-treatment unit, downstream from the quench unit, arranged to remove acidic components from the effluent fluid stream.